Semiconductor device and manufacturing method thereof

Claim 2

A semiconductor device comprising: a semiconductor chip having a principal surface and a back surface, and including an integrated circuit and a plurality of external terminals formed on said principal surface; a tape carrier having a base substrate and a plurality of lead portions formed on one surface of said base substrate, said base substrate having a device hole and a plurality of through hole wirings formed at both sides of said device hole, said plurality of through hole wirings extending from said one surface to the other surface of said base substrate and being electrically connected to said plurality of lead portions, wherein said semiconductor chip is disposed in said device hole of said base substrate and first ends of said plurality of lead portions are electrically connected to said plurality of external terminals of said semiconductor chip, and wherein said semiconductor chip has a reduced thickness defined by spin-etching of said back surface to effect a thinning of said semiconductor chip to a thickness less than that of said tape carrier, a seal resin material sealing said thinned semiconductor chip so that said principal surface and said back surface of said semiconductor chip are covered with said seat resin material; and a plurality of bump electrodes formed on said one surface of said base substrate at said plurality of through hole wirings and being electrically connected to said plurality of lead portions, said plurality of bump electrodes providing a connection with a printed circuit board, while said plurality of through hole wirings at the other surface of said base substrate providing a connection with another device to be mounted on said tape carrier.

Claim 3

The semiconductor device as recited in claim 1 , wherein said semiconductor chip is disposed on a stress neutral plane extending parallel to the principal surface of said semiconductor chip at a position along the thickness direction of said tape carrier.

Claim 4

The semiconductor device as recited in claim 1 , characterized in that said lead is bent in its thickness direction to be electrically connected to said external terminal.

Claim 5

The semiconductor device as recited in claim 1 , wherein said seal resin material has its upper and lower surfaces substantially identical in level to upper and lower surfaces of said tape carrier.

Claim 6

The semiconductor device as recited in claim 1 , wherein an injection port for use in seal resin injection is provided at part of said tape carrier to effect coupling of said device hole to a gate of a metal mold structure used during formation of said seal resin.

Claim 7

The semiconductor device as recited in claim 5 , wherein said tape carrier has an air exhaust port formed so that the device hole of said tape carrier is coupled to an air vent of the metal mold structure used during formation of said resin seal.

Claim 8

The semiconductor device as recited in claim 5 , wherein an electroplated metal layer is formed at part of a surface of said tape carder in close proximity to said injection port for seal resin injection, the part being brought into contact with the seal resin during formation of said resin seal.

Claim 9

The semiconductor device as recited in claim 1 , wherein said tape carrier has an air exhaust port formed so that the device hole of said tape carrier is coupled to an air vent of a metal mold structure used during formation of said resin seal.

Claim 10

The semiconductor device as recited in claim 1 , wherein said bump electrodes are electrically connected to corresponding ones of leads of said printed circuit board.

Claim 11

The semiconductor device as recited in claim 1 , characterized in that said lead has its other end extending from an outer periphery of said tape carrier to thereby form an outer lead section electrically connected to more than one lead of a mount board for use in mounting thereon the semiconductor device.

Claim 12

The semiconductor device as recited in claim 1 , wherein said semiconductor chip has its back surface polished by a spin-etching technique.

Claim 13

The semiconductor device as recited in claim 1 , wherein a gold bump electrode is provided at each external terminal of said semiconductor chip, said gold bump electrode being coupled to said first end of a respective lead.

Claim 14

The semiconductor device as recited in claim 1 , wherein electroplating is applied to said first ends of said leads causing the lead ends to be connected to corresponding ones of external terminals of said semiconductor chip.

Claim 15

A semiconductor device comprising: a semiconductor chip having a principal surface and a back surface, opposite to said principal surface, and including an integrated circuit and a plurality of external terminals formed on said principal surface; a base wiring substrate having a plurality of lead portions formed on one surface of said base wiring substrate, said base wiring substrate having a device hole and a plurality of through hole wirings formed at both sides of said device hole, said plurality of through hole wirings extending from said one surface to the other surface of said base wiring substrate and being electrically connected to said plurality of lead portions, wherein said semiconductor chip is disposed in said device hole of said base wiring substrate and said plurality of lead portions are electrically connected to said plurality of external terminals of said semiconductor chip, and wherein said semiconductor chip has a reduced thickness defined by spin-etching of said back surface to effect a thinning of said semiconductor chip to a thickness less than that of said base wiring substrate; a seal resin material sealing said thinned semiconductor chip so that said principal surface and said back surface of said semiconductor chip are covered with said seal resin material; and a plurality of bump electrodes formed on said one surface of said base wiring substrate at said plurality of through hole wirings and being electrically connected to said plurality of lead portions, said plurality of bump electrodes providing a connection with a printed circuit board, while said plurality of through hole wirings at the other surface of said base wiring substrate providing a connection with another device to be stacked on said base wiring substrate.

Claim 16

A semiconductor device comprising: a semiconductor chip having a principal surface and a back surface, opposite to said principal surface, and including an integrated circuit and a plurality of external terminals formed on said principal surface; a base wiring substrate having a plurality of lead portions formed on one surface of said base wiring substrate, said base wiring substrate having a device hole and a plurality of through hole wirings formed at both sides of said device hole, said plurality of through hole wirings extending from said one surface to the other surface of said base wiring substrate and being electrically connected to said plurality of lead portions, wherein said semiconductor chip is disposed in said device hole of said base wiring substrate and said plurality of lead portions are electrically connected to said plurality of external terminals of said semiconductor chip, and wherein said semiconductor chip has a reduced thickness defined by spin-etching of said back surface to effect a thinning of said semiconductor chip to a thickness less than that of said base wiring substrate; a seal resin material sealing said thinned semiconductor chip so that said principal surface and said back surface of said semiconductor chip are covered with said seal resin material; and a plurality of bump electrodes formed on said one surface of said base wiring substrate at said plurality of through hole wirings and being electrically connected to said plurality of lead portions, said plurality of bump electrodes providing a connection with a printed circuit board, while said plurality of through hole wirings at the other surface of said base wiring substrate providing a connection with another device to be stacked on said base wiring substrate.

Claim 17

A semiconductor device as recited in claim 14 , herein said base wiring substrate includes a flexible base tape.