Patent US6632279B1 successfully refreshed from Google Patents.
US6632279B1
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Method for growing thin oxide films
Assignee: ASM International NV
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Filing: 2000-10-13
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Granted: 2003-10-14
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Expires: 2020-10-13
Abstract
Abstract A method is provided for growing thin oxide films on the surface of a substrate by alternatively reacting the surface of the substrate with a metal source material and an oxygen source material. The oxygen source material is preferably a metal alkoxide. The metal source material may be a metal halide, hydride, alkoxide, alkyl, a cyclopentadienyl compound, or a diketonate.</PTEXT>
Inventors
- 👤 Mikko Ritala
- 👤 Antti Rahtu
- 👤 Markku Leskela
- 👤 Kaupo Kukli
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:40
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45523; C23C16/45525; C23C16/45527; H; H10; H10P; H10P14/00; H10P14/20; C23C16/02; C23C16/0209; C23C16/0218; C23C16/0272; C23C16/22; C23C16/30; C23C16/40; C23C16/45531; C30; C30B; C30B25/00; C30B25/02; C30B25/18; C30B29/00; C30B29/10; C30B29/16
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
120 words
A process for the fabrication of oxide films on a readily oxidized substrate, comprising: depositing a protective thin oxide film onto the substrate by an atomic layer deposition process comprising alternately reacting the surface of the substrate with a metal source material and an oxygen source material, wherein the oxygen source material is a boron, silicon or metal compound which has at least one organic ligand and wherein an oxygen is bonded to at least one boron, silicon or metal atom; and depositing a second oxide film on the substrate by a second process employing a different oxygen source, wherein the protective thin oxide film protects the surface of the substrate from oxidation during deposition of the second oxide film.
Claim 2
Dependent Claim
120 words
A process for the fabrication of oxide films on a readily oxidized substrate, comprising: depositing a protective thin oxide film onto the substrate by an atomic layer deposition process comprising alternately reacting the surface of the substrate with a metal source material and an oxygen source material, wherein the oxygen source material is a boron, silicon or metal compound which has at least one organic ligand and wherein an oxygen is bonded to at least one boron, silicon or metal atom; and depositing a second oxide film on the substrate by a second process employing a different oxygen source, wherein the protective thin oxide film protects the surface of the substrate from oxidation during deposition of the second oxide film.
Claim 3
Dependent Claim
21 words
A process according to claim 1 , wherein the thickness of the protective thin oxide film is 1-20 atom layers thick.
Claim 4
Dependent Claim
21 words
A process according to claim 1 , wherein the thickness of the protective thin oxide film is 1-10 atom layers thick.
Claim 5
Dependent Claim
21 words
A process according to claim 1 , wherein the thickness of the protective thin oxide film is 1-5 atom layers thick.
Claim 6
Dependent Claim
21 words
The process of claim 1 , wherein the protective thin oxide film and the second oxide film have the same composition.
Claim 7
Dependent Claim
21 words
The process of claim 1 , wherein the protective thin oxide film and the second oxide film have a different composition.
Claim 8
Dependent Claim
26 words
The process of claim 1 wherein the oxygen source material used in the second process is selected from the group consisting of water and hydrogen peroxide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-10-13 | 2007-04-14 | 2007-10-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-10-13 | 2011-04-14 | 2011-10-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-10-13 | 2015-04-14 | 2015-10-14 | $7700.00 | Window Closed / Lapsed |