US6572710B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Brush force control method for a substrate cleaning apparatus
Assignee: Rite Track Equipment Services Inc
•
Filing: 2002-08-05
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Granted: 2003-06-03
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Expires: 2022-08-05
Abstract
Abstract A method of cleaning a substrate supported on an upper end of a spindle by first positioning a brush at a fixed elevation over the substrate. Next, the spindle is moved upward to bring the substrate into contact with the brush. Thereafter, a cleaning force on the substrate caused by the brush is measured, and the spindle is moved in response to the measured cleaning force on the substrate.
Inventors
- 👤 Daniel O. Middendorf
- 👤 Thomas R. Slavik
- 👤 James G. Johnson
- 👤 Dean A. Donovan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 04:05
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0604; B; B08; B08B; B08B1/00; B08B1/30; B08B1/32; B08B1/34; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0412
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
73 words
A method of cleaning a substrate supported on an upper end of a spindle comprising: positioning a brush at a fixed elevation over the substrate; moving the spindle in an upward direction to bring the substrate into contact with the brush; measuring a cleaning force on the spindle caused by the brush contacting the substrate; and moving the spindle in response to measuring the cleaning force on the substrate caused by the brush.
Claim 2
Independent Claim
73 words
A method of cleaning a substrate supported on an upper end of a spindle comprising: positioning a brush at a fixed elevation over the substrate; moving the spindle in an upward direction to bring the substrate into contact with the brush; measuring a cleaning force on the spindle caused by the brush contacting the substrate; and moving the spindle in response to measuring the cleaning force on the substrate caused by the brush.
Claim 3
Dependent Claim
59 words
A method of claim 1 further comprising: moving the substrate in the upward direction toward the brush; stopping motion of the spindle in response to detecting an initial contact force exerted on the substrate by the brush; and thereafter moving the spindle an incremental displacement in the upward direction to bring the substrate into cleaning contact with the brush.
Claim 4
Dependent Claim
35 words
A method of claim 1 further comprising: determining a range of acceptable cleaning forces between the cleaning brush and the substrate; maintaining the cleaning force on the substrate within the range of acceptable cleaning forces.
Claim 5
Dependent Claim
34 words
A method of claim 3 further comprising: providing user determined cleaning force and tolerance values; and determining the range of acceptable cleaning forces in response to the user determined cleaning force and tolerance values.
Claim 6
Dependent Claim
36 words
A method of claim 4 further comprising: determining preload forces on the spindle in the absence of the brush contacting the substrate; and determining the range of acceptable cleaning forces in response to the preload forces.
Claim 7
Dependent Claim
28 words
A method of claim 3 further comprising moving the spindle and substrate selectively upward and downward to maintain the cleaning force within the range of acceptable cleaning forces.
Claim 8
Dependent Claim
26 words
A method of claim 6 further comprising: detecting a cleaning force in excess of the range of acceptable cleaning forces; and reducing the measured clean force.
Claim 9
Dependent Claim
20 words
A method of claim 7 further comprising moving the spindle in a downward direction to reduce the measured cleaning force.
Claim 10
Dependent Claim
25 words
A method of claim 6 further comprising: detecting a cleaning force less than the range of acceptable cleaning forces; and increasing the measured cleaning force.
Claim 11
Dependent Claim
20 words
A method of claim 9 further comprising moving the spindle in an upward direction to increase the measured cleaning force.
Claim 12
Dependent Claim
34 words
A method of claim 1 further comprising: determining an acceptable cleaning force between the cleaning brush and the substrate; maintaining the cleaning force on the substrate substantially equal to the acceptable cleaning force value.
Claim 13
Dependent Claim
32 words
A method of claim 11 further comprising: providing user determined cleaning force and tolerance values; and determining the acceptable clearing force in response to the user determined cleaning force and tolerance values.
Claim 14
Dependent Claim
34 words
A method of claim 12 further comprising: determining preload forces on the spindle in the absence of the brush contacting the substrate; and determining the acceptable cleaning force in response to the preload forces.
Claim 15
Dependent Claim
29 words
A method of claim 11 further comprising moving the spindle and substrate selectively upward and downward to maintain the cleaning force substantially equal to the acceptable cleaning force value.
Claim 16
Dependent Claim
30 words
A method of claim 14 further comprising: detecting a cleaning force in excess of the acceptable cleaning force value; and reducing the cleaning force between the substrate and the brush.
Claim 17
Dependent Claim
21 words
A method of claim 15 further comprising moving the spindle in a downward direction to reduce the measured cleaning force value.
Claim 18
Dependent Claim
29 words
A method of claim 14 further comprising: detecting a cleaning force less than the acceptable cleaning force value; and increasing the cleaning force between the substrate and the brush.
Claim 19
Dependent Claim
21 words
A method of claim 17 further comprising moving the spindle in an upward direction to increase the measured cleaning force value.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-06-02 | 2006-12-02 | 2007-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-06-02 | 2010-12-02 | 2011-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-06-02 | 2014-12-02 | 2015-06-03 | $7700.00 | Window Closed / Lapsed |