US5636401A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cleaning apparatus and cleaning method
Assignee: Tokyo Electron Ltd
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Filing: 1995-05-11
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Granted: 1997-06-10
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Expires: 2015-05-11
Abstract
Abstract The present invention provides a cleaning apparatus having object holding means for holding an object to be cleaned such that a surface of the object to be cleaned faces a cleaning body and a cleaning mechanism for moving and rotating the cleaning body for cleaning the surface of the object to be cleaned, wherein the object to be cleaned and the cleaning body are moved relative to each other in a state where the cleaning body is in contact with the surface to the object to be cleaned at a specified contact pressure, thereby cleaning the surface of the object to be cleaned, the cleaning mechanism including a rotatable arm, cleaning body supporting means rotatably supporting a cleaning body, and elevating means, attached to the arm, for moving up and down the cleaning body supporting means.
Inventors
- 👤 Akira Yonemizu
- 👤 Nobukazu Ishizaka
- 👤 Tomoko Hamada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 08:11
CPC Classifications
B; B08; B08B; B08B1/00; B08B1/50; B08B1/52; H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; B08B1/30; B08B1/32; B08B1/34; B08B11/00; B08B11/02; H10P72/0402; H10P72/0406
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
110 words
A cleaning apparatus comprising: a cleaning member; object holding means for holding a to-be-cleaned object to allow a cleaning surface of the object to face the cleaning member; cleaning member supporting means for rotatably supporting the cleaning member; an arm on which the cleaning member supporting means is mounted; arm holding means for rotatably holding the arm; arm elevating means for elevating the arm; and cleaning member supporting means elevating means for elevating the cleaning member supporting means, wherein the object and cleaning member are moved relative to each other with the cleaning member contacting the object at a specified contact pressure to clean the cleaning surface of the object.
Claim 2
Dependent Claim
110 words
A cleaning apparatus comprising: a cleaning member; object holding means for holding a to-be-cleaned object to allow a cleaning surface of the object to face the cleaning member; cleaning member supporting means for rotatably supporting the cleaning member; an arm on which the cleaning member supporting means is mounted; arm holding means for rotatably holding the arm; arm elevating means for elevating the arm; and cleaning member supporting means elevating means for elevating the cleaning member supporting means, wherein the object and cleaning member are moved relative to each other with the cleaning member contacting the object at a specified contact pressure to clean the cleaning surface of the object.
Claim 3
Dependent Claim
25 words
The apparatus according to claim 1, wherein a rotation plane of the cleaning member is set substantially parallel to the cleaning surface of the object.
Claim 4
Dependent Claim
31 words
The apparatus according to claim 1, further comprising detecting means for detecting the contact pressure with which the cleaning member is set in contact with the cleaning surface of the object.
Claim 5
Dependent Claim
19 words
The apparatus according to claim 1, further comprising means for detecting a position of the cleaning member supporting means.
Claim 6
Dependent Claim
33 words
The apparatus according to claim 1, wherein the cleaning member supporting means includes means for preventing dust which is generated in the cleaning member supporting means from being deposited on the cleaning surface.
Claim 7
Dependent Claim
19 words
The apparatus according to claim 1, wherein the arm elevating means is comprised of a cylinder using a fluid.
Claim 8
Dependent Claim
25 words
The apparatus according to claim 1, wherein the cleaning means is made of one selected from the group consisting of a brush and a sponge.
Claim 9
Dependent Claim
17 words
The apparatus according to claim 1, wherein the specified contact pressure is below 60 gf/cm 2 .
Claim 10
Dependent Claim
15 words
The apparatus according to claim 1, further comprising means for maintaining the specified contact pressure.
Claim 11
Dependent Claim
14 words
The apparatus according to claim 1, further comprising means for cleaning the cleaning member.
Claim 12
Dependent Claim
158 words
A cleaning apparatus comprising: a cleaning member; object holding means for holding a to-be-cleaned object to allow a cleaning surface of the object to face the cleaning member; cleaning member supporting means for rotatably supporting the cleaning member having a rotation plane of the cleaning member set substantially parallel to the cleaning surface of the object; an arm on which the cleaning member supporting means is mounted; arm holding means for rotatably holding the arm; arm elevating means, mounted on the arm holding means, for elevating the arm; cleaning member supporting means elevating means, mounted on the arm, for elevating the cleaning member supporting means; a dust preventing member mounted on the cleaning member supporting means to receive dust generated in the cleaning member supporting means; wherein the object and cleaning member are moved relative to each other with the cleaning member contacting the object at a specified contact pressure to clean the cleaning surface of the object.
Claim 13
Dependent Claim
158 words
A cleaning apparatus comprising: a cleaning member; object holding means for holding a to-be-cleaned object to allow a cleaning surface of the object to face the cleaning member; cleaning member supporting means for rotatably supporting the cleaning member having a rotation plane of the cleaning member set substantially parallel to the cleaning surface of the object; an arm on which the cleaning member supporting means is mounted; arm holding means for rotatably holding the arm; arm elevating means, mounted on the arm holding means, for elevating the arm; cleaning member supporting means elevating means, mounted on the arm, for elevating the cleaning member supporting means; a dust preventing member mounted on the cleaning member supporting means to receive dust generated in the cleaning member supporting means; wherein the object and cleaning member are moved relative to each other with the cleaning member contacting the object at a specified contact pressure to clean the cleaning surface of the object.
Claim 14
Dependent Claim
30 words
The apparatus according to claim 11, further comprising means for sensing the contact pressure with which the cleaning member is set in contact with the cleaning surface of the object.
Claim 15
Dependent Claim
19 words
The apparatus according to claim 11, further comprising means for detecting a position of the cleaning member supporting means.
Claim 16
Dependent Claim
19 words
The apparatus according to claim 11, wherein the arm elevating means is comprised of a cylinder using a fluid.
Claim 17
Dependent Claim
25 words
The apparatus according to claim 11, wherein the cleaning member is comprised of one selected from the group consisting of a brush and a sponge.
Claim 18
Dependent Claim
25 words
The apparatus according to claim 11, wherein the object is comprised of one selected from the group consisting of a semiconductor wafer and LCD substrate.
Claim 19
Dependent Claim
17 words
The apparatus according to claim 11, wherein the specified contact pressure is below 60 gf/cm 2 .
Claim 20
Dependent Claim
15 words
The apparatus according to claim 11, further comprising means for maintaining the specified contact pressure.
Claim 21
Dependent Claim
14 words
The apparatus according to claim 11, further comprising means for cleaning the cleaning member.
Claim 22
Dependent Claim
116 words
A cleaning apparatus comprising: a cleaning member; object holding means for holding a to-be-cleaned object to allow a cleaning surface of the object to face the cleaning member; cleaning member-supporting means for rotatably supporting the cleaning member; an arm on which the cleaning member-supporting means is mounted; arm holding means for rotatably holding the arm; arm elevating means for elevating the arm; cleaning member supporting means-elevating means for elevating the cleaning member-supporting means; and means for detecting a position of the cleaning member-supporting means, wherein the object and cleaning member are moved relative to each other, with the cleaning member contacting the object at a specified contact pressure to clean the cleaning surface of the object.
Claim 23
Dependent Claim
116 words
A cleaning apparatus comprising: a cleaning member; object holding means for holding a to-be-cleaned object to allow a cleaning surface of the object to face the cleaning member; cleaning member-supporting means for rotatably supporting the cleaning member; an arm on which the cleaning member-supporting means is mounted; arm holding means for rotatably holding the arm; arm elevating means for elevating the arm; cleaning member supporting means-elevating means for elevating the cleaning member-supporting means; and means for detecting a position of the cleaning member-supporting means, wherein the object and cleaning member are moved relative to each other, with the cleaning member contacting the object at a specified contact pressure to clean the cleaning surface of the object.
Claim 24
Dependent Claim
25 words
The apparatus according to claim 20, wherein a rotation plane of the cleaning member is set substantially parallel to the cleaning surface of the object.
Claim 25
Dependent Claim
31 words
The apparatus according to claim 20, further comprising detecting means for detecting the contact pressure with which the cleaning member is set in contact with the cleaning surface of the object.
Claim 26
Dependent Claim
29 words
The apparatus according to claim 20, wherein the cleaning member-supporting means includes means for preventing dust, generated in the cleaning member-supporting means, from being deposited on the cleaning surface.
Claim 27
Dependent Claim
19 words
The apparatus according to claim 20, wherein the arm elevating means is comprised of a cylinder using a fluid.
Claim 28
Dependent Claim
25 words
The apparatus according to claim 20, wherein the cleaning means is made of one selected from the group consisting of a brush and a sponge.
Claim 29
Dependent Claim
17 words
The apparatus according to claim 20, wherein the specified contact pressure is below 60 gf/cm 2 .
Claim 30
Dependent Claim
15 words
The apparatus according to claim 20, further comprising means for maintaining the specified contact pressure.
Claim 31
Dependent Claim
14 words
The apparatus according to claim 20, further comprising means for cleaning the cleaning member.
References Cited (Backward Citations)
JPS57102024A
Cited
US4382308A
Cited
US4476601A
Cited
JPS59112625A
Cited
JPS59193029A
Cited
JPS62259447A
Cited
JPS6316626A
Cited
JPS63239953A
Cited
JPH01289122A
Cited
JPH0352228A
Cited
US5144711A
Cited
US5351360A
Cited
US5282289A
Cited
US5375291A
Cited
US5485644A
Cited
US5421056A
Cited
US5475889A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-06-09 | 2000-12-09 | 2001-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-06-09 | 2004-12-09 | 2005-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-06-09 | 2008-12-09 | 2009-06-10 | $7700.00 | Window Closed / Lapsed |