Cleaning apparatus

Claim 2

A cleaning apparatus for brushing an object to be treated while rotating said object, comprising: a spin chuck for holding and rotating said object; a brush for contacting said object held by said spin chuck to rub a surface of said object; an arm for supporting said brush; a processing chamber housing said spin chuck, said brush, and said arm; a support coupled to said arm and moving together with said arm in a horizontal direction, said support and said arm being capable of relatively displacing in a vertical direction; a resilient member arranged between said arm and said support and deformed in accordance with a relative displacement of said arm and said support in the vertical direction, said resilient member being deformed and generating a biasing force of said brush against said object when said brush contacts said object held by said spin chuck; a horizontal driver for moving said support in the horizontal direction; and a vertical driver for moving said support in the vertical direction, wherein said biasing force of said brush is set by adjusting a downward moving amount of said support in the vertical direction.

Claim 3

An apparatus according to claim 1, further comprising a linear guide for coupling said arm to said support.

Claim 4

An apparatus according to claim 1, further comprising a stopper for regulating a maximum downward moving amount of said support.

Claim 5

An apparatus according to claim 1, wherein said resilient member comprises a compression spring applied with a load of said brush and said arm.

Claim 6

An apparatus according to claim 4, further comprising a motor attached to said arm to be located above said resilient member and to rotate said brush, and a transmission arranged along said arm to transfer a driving force of said motor to said brush.

Claim 7

An apparatus according to claim 1, wherein said support is moved by said horizontal driver such that said brush can move between a waiting position offset from above said object held by said spin chuck and a first position above said object held by said spin chuck.

Claim 8

An apparatus according to claim 6, wherein said horizontal driver swings said arm between the waiting position and the first position.

Claim 9

An apparatus according to claim 1, further comprising supply means, supported by said arm, for supplying a cleaning liquid to said brush.

Claim 10

An apparatus according to claim 8, wherein said supply means comprises a cleaning liquid receptacle portion arranged at a rear side of said brush, a tube for supplying the cleaning liquid to said cleaning liquid receptacle portion, and a cleaning liquid passage formed between said cleaning liquid receptacle portion and said brush.

Claim 11

An apparatus according to claim 8, further comprising a first cup part vertically movable to enclose said spin chuck in said processing chamber, a cup driver for moving said first cup part in the vertical direction between an upper position where an upper end of said first cup part comes above said object held by said spin chuck and a lower position where said upper end of said first cup part comes below said object held by said spin chuck, and a second cup part fixed to said processing chamber to cover a gap formed below said first cup part when said first cup part is set at the upper position.

Claim 12

A cleaning apparatus for brushing a front face of a semiconductor wafer on which a semiconductor device is to be formed, while rotating said semiconductor wafer, comprising: a spin chuck for holding and rotating said wafer; a brush for contacting said wafer held by said spin chuck to rub a surface of said wafer, said brush comprising a plurality of sponge pillars arranged at intervals and contacting said wafer substantially only with said sponge pillars; an arm for supporting said brush; a processing chamber housing said spin chuck, said brush, and said arm; a support coupled to said arm and moving together with said arm in a horizontal direction, said support and said arm being capable of relatively displacing in a vertical direction; a resilient member arranged between said arm and said support and deformed in accordance with a relative displacement of said arm and said support in the vertical direction, said resilient member being deformed and generating a biasing force of said brush against said wafer when said brush contacts said wafer held by said spin chuck; a horizontal driver for moving said support in the horizontal direction; and a vertical driver for moving said support in the vertical direction, wherein said biasing force of said brush is set by adjusting a downward moving amount of said support in the vertical direction.

Claim 13

A cleaning apparatus for brushing a front face of a semiconductor wafer on which a semiconductor device is to be formed, while rotating said semiconductor wafer, comprising: a spin chuck for holding and rotating said wafer; a brush for contacting said wafer held by said spin chuck to rub a surface of said wafer, said brush comprising a plurality of sponge pillars arranged at intervals and contacting said wafer substantially only with said sponge pillars; an arm for supporting said brush; a processing chamber housing said spin chuck, said brush, and said arm; a support coupled to said arm and moving together with said arm in a horizontal direction, said support and said arm being capable of relatively displacing in a vertical direction; a resilient member arranged between said arm and said support and deformed in accordance with a relative displacement of said arm and said support in the vertical direction, said resilient member being deformed and generating a biasing force of said brush against said wafer when said brush contacts said wafer held by said spin chuck; a horizontal driver for moving said support in the horizontal direction; and a vertical driver for moving said support in the vertical direction, wherein said biasing force of said brush is set by adjusting a downward moving amount of said support in the vertical direction.

Claim 14

An apparatus according to claim 11, wherein said sponge pillars comprise a plurality of first sponge pillars each having a large diameter and a plurality of second sponge pillars each having a small diameter, said first and second sponge pillars being alternately arranged.

Claim 15

An apparatus according to claim 11, further comprising supply means, supported by said arm, for supplying a cleaning liquid to said brush.

Claim 16

An apparatus according to claim 13, wherein said supply means comprises a cleaning liquid receptacle portion arranged at a rear side of said brush, a tube for supplying the cleaning liquid to said cleaning liquid receptacle portion, and a cleaning liquid passage formed between said cleaning liquid receptacle portion and said brush.

Claim 17

An apparatus according to claim 13, further comprising a first cup part vertically movable to enclose said spin chuck in said processing chamber, a cup driver for moving said first cup part in the vertical direction between an upper position where an upper end of said first cup part comes above said wafer held by said spin chuck and a lower position where said upper end of said first cup part comes below said wafer held by said spin chuck, and a second cup part fixed to said processing chamber to cover a gap formed below said first cup part when said first cup part is set at the upper position.

Claim 18

A cleaning apparatus for brushing a rear face of a semiconductor wafer on which no semiconductor device is to be formed, while rotating said semiconductor wafer, comprising: a spin chuck for holding and rotating said wafer; a brush for contacting said wafer held by said spin chuck to rub a surface of said wafer, said brush comprising a plurality of sponge pillars arranged at an interval and a plurality of bundles of hairs arranged at an interval and contacting said wafer substantially with only said sponge pillars and said bundles of hairs; an arm for supporting said brush; a processing chamber housing said spin chuck, said brush, and said arm; a support coupled to said arm and moving together with said arm in a horizontal direction, said support and said arm being capable of relatively displacing in a vertical direction; a resilient member arranged between said arm and said support and deformed in accordance with a relative displacement of said arm and said support in the vertical direction, said resilient member being deformed and generating a biasing force of said brush against said wafer when said brush contacts said wafer held by said spin chuck; a horizontal driver for moving said support in the horizontal direction; and a vertical driver for moving said support in the vertical direction, wherein said biasing force of said brush is set by adjusting a downward moving amount of said support in the vertical direction.

Claim 19

A cleaning apparatus for brushing a rear face of a semiconductor wafer on which no semiconductor device is to be formed, while rotating said semiconductor wafer, comprising: a spin chuck for holding and rotating said wafer; a brush for contacting said wafer held by said spin chuck to rub a surface of said wafer, said brush comprising a plurality of sponge pillars arranged at an interval and a plurality of bundles of hairs arranged at an interval and contacting said wafer substantially with only said sponge pillars and said bundles of hairs; an arm for supporting said brush; a processing chamber housing said spin chuck, said brush, and said arm; a support coupled to said arm and moving together with said arm in a horizontal direction, said support and said arm being capable of relatively displacing in a vertical direction; a resilient member arranged between said arm and said support and deformed in accordance with a relative displacement of said arm and said support in the vertical direction, said resilient member being deformed and generating a biasing force of said brush against said wafer when said brush contacts said wafer held by said spin chuck; a horizontal driver for moving said support in the horizontal direction; and a vertical driver for moving said support in the vertical direction, wherein said biasing force of said brush is set by adjusting a downward moving amount of said support in the vertical direction.

Claim 20

An apparatus according to claim 16, wherein said sponge pillars are arranged to form a plurality of grooves extending in a radial direction, and said bundles of hairs are arranged in the grooves.

Claim 21

An apparatus according to claim 16, further comprising supply means, supported by said arm, for supplying a cleaning liquid to said brush.

Claim 22

An apparatus according to claim 18, wherein said supply means comprises a cleaning liquid receptacle portion arranged at a rear side of said brush, a tube for supplying the cleaning liquid to said cleaning liquid receptacle portion, and a cleaning liquid passage formed between said cleaning liquid receptacle portion and said brush.

Claim 23

An apparatus according to claim 19, further comprising a first cup part vertically movable to enclose said spin chuck in said processing chamber, a cup driver for moving said first cup part in the vertical direction between an upper position where an upper end of said first cup part comes above said wafer held by said spin chuck and a lower position where said upper end of said first cup part comes below said wafer held by said spin chuck, and a second cup part fixed to said processing chamber to cover a gap formed below said first cup part when said first cup part is set at the upper position.