US6532585B1
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US
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Method and apparatus for application of proximity correction with relative segmentation
Assignee: Bell Semiconductor LLC
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Filing: 2000-11-14
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Granted: 2003-03-11
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Expires: 2020-11-14
Abstract
Abstract The present invention is a method and apparatus for applying one-dimensional proximity correction to a piece of a mask pattern, by segmenting a first piece of a mask pattern with horizontal dividing lines into a plurality of segments, segmenting a second piece of said mask pattern with said horizontal dividing lines into a second plurality of segments, and applying proximity correction to a first segment from said first plurality of segments taking into consideration a second segment from said second plurality of segments.
Inventors
- 👤 Dusan Petranovic
- 👤 Ranko Scepanovic
- 👤 Edwin Jones
- 👤 Richard Schinella
- 👤 Nicholas F. Pasch
- 👤 Mario Garza
- 👤 Keith K. Chao
- 👤 John V. Jensen
- 👤 Nicholas K. Eib
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70433; G03F7/70441; G03F1/00; G03F1/36
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
94 words
An apparatus for applying one-dimensional proximity correction to a piece of a mask pattern, said apparatus comprising: a. Means for segmenting a first piece of a mask pattern with a first plurality of dividing lines into a plurality of segments; b. means for segmenting a second piece of said mask pattern with said first plurality of dividing lines into a second plurality of segments; and c. means for applying proximity correction to a first segment from said first plurality of segments as a function of a second segment from said second plurality of segments.
Claim 2
Independent Claim
94 words
An apparatus for applying one-dimensional proximity correction to a piece of a mask pattern, said apparatus comprising: a. Means for segmenting a first piece of a mask pattern with a first plurality of dividing lines into a plurality of segments; b. means for segmenting a second piece of said mask pattern with said first plurality of dividing lines into a second plurality of segments; and c. means for applying proximity correction to a first segment from said first plurality of segments as a function of a second segment from said second plurality of segments.
Claim 3
Dependent Claim
19 words
The apparatus according to claim 1 wherein said first segment and said second segments are of substantially equal length.
Claim 4
Dependent Claim
32 words
The apparatus according to claim 2 wherein said proximity correction to said first segment is not a function of any segments in said second plurality of segments other than said second segment.
Claim 5
Dependent Claim
22 words
The apparatus according to claim 3 wherein proximity correction to said second segment is performed as a function of the first segment.
Claim 6
Dependent Claim
33 words
The apparatus according to claim 4 wherein the proximity correction performed on said second segment is not a function of any segment of said first plurality of segments other than said first segment.
Claim 7
Dependent Claim
31 words
The apparatus according to claim 5 wherein each dividing line in said first plurality of dividing lines is parallel to each other dividing line in said first plurality of dividing lines.
Claim 8
Dependent Claim
84 words
The apparatus of claim 6 , further comprising: d. Means for segmenting a third piece of a mask pattern with a second plurality of dividing lines into a plurality of segments; e. means for segmenting a fourth piece of said mask pattern with said second plurality dividing lines into a fourth plurality of segments: and f. means for applying proximity correction to a third segment from said third plurality of segments as a function of a fourth segment from said fourth plurality of segments.
Claim 9
Dependent Claim
31 words
The apparatus according to claim 7 wherein each dividing line in said second plurality of dividing lines is parallel to each other dividing line in said second plurality of dividing lines.
Claim 10
Dependent Claim
30 words
The apparatus according to claim 8 wherein each dividing line in said first plurality of dividing lines is perpendicular to each dividing line in said second plurality of dividing lines.
Claim 11
Dependent Claim
19 words
The apparatus according to claim 9 wherein said third segment and said fourth segment are of substantially equal length.
Claim 12
Dependent Claim
22 words
The apparatus according to claim 10 wherein, the proximity correction applied to said third segment is a function of said fourth segment.
Claim 13
Dependent Claim
23 words
The appartus according to claim 11 wherein proximity correction to said fourth segment is further performed as a function of said third segment.
Claim 14
Dependent Claim
32 words
The apparatus according to claim 1 wherein said proximity correction to said first segment is not a function of any segments in said second plurality of segments other than said second segment.
Claim 15
Dependent Claim
22 words
The apparatus according to claim 1 wherein proximity correction to said second, segment is performed as a function of the first segment.
Claim 16
Dependent Claim
33 words
The apparatus according to claim 14 wherein the proximity correction performed on said second segment is not a function of any segment of said first plurality of segments other than said first segment.
Claim 17
Dependent Claim
31 words
The apparatus according to claim 1 wherein each dividing line in said first plurality of dividing lines is parallel to each other dividing line in said first plurality of dividing lines.
Claim 18
Dependent Claim
84 words
The apparatus of claim 1 , further comprising: d. means for segmenting a third piece of a mask pattern with a second plurality of dividing lines into a plurality of segments; e. means for segmenting a fourth piece of said mask pattern with said second plurality dividing lines into a fourth plurality of segments; and f. means for applying proximity correction to a third segment from said third plurality of segments as a function of a fourth segment from said fourth plurality of segments.
Claim 19
Dependent Claim
31 words
The apparatus according to claim 17 wherein each dividing line in said second plurality of dividing lines is parallel to each other dividing line in said second plurality of dividing lines.
Claim 20
Dependent Claim
30 words
The apparatus according to claim 18 wherein each dividing line in said first plurality of dividing lines is perpendicular to each dividing line in said second plurality of dividing lines.
Claim 21
Dependent Claim
19 words
The apparatus according to claim 17 wherein said third segment and said fourth segment are of substantially equal length.
Claim 22
Dependent Claim
22 words
The apparatus according to claim 17 wherein, the proximity correction applied to said third segment is a function of said fourth segment.
Claim 23
Dependent Claim
23 words
The apparatus according to claim 21 wherein proximity correction to said fourth segment is further performed as a function of said third segment.
Claim 24
Dependent Claim
26 words
The apparatus according to claim 1 wherein at least one of said plurality of dividing lines is derived from a physical structure of said first piece.
Claim 25
Dependent Claim
18 words
The apparatus according to claim 23 wherein said physical structure of said first piece is an end point.
Claim 26
Dependent Claim
26 words
The apparatus according to claim 1 wherein at least one of said plurality of dividing lines is derived from a physical structure of said second piece.
Claim 27
Dependent Claim
18 words
The apparatus according to claim 25 wherein said physical structure of said second piece is an end point.
Claim 28
Dependent Claim
58 words
The apparatus of claim 13 further comprising means for segmenting a third piece of a mask pattern with said plurality of dividing lines into a third plurality of segments and wherein said proximity correction to said first segment is as applied as a function of said second segment and a third segment from said third plurality of segments.
Claim 29
Dependent Claim
18 words
The apparatus according to claim 27 wherein said first, second and third segments are of substantially equal length.
Claim 30
Dependent Claim
86 words
A segmented mask pattern for proximity correction, comprising: a first piece of a mask pattern segmented in accordance with a plurality of dividing lines into a first plurality of segments, said first plurality of segments comprising a first segment; a second piece of a mask pattern segmented in accordance with a plurality of dividing lines into a second plurality of segments, said second plurality of segments comprising a second segment; wherein proximity correction on said first segment is applied as a function of said second segment.
Claim 31
Dependent Claim
86 words
A segmented mask pattern for proximity correction, comprising: a first piece of a mask pattern segmented in accordance with a plurality of dividing lines into a first plurality of segments, said first plurality of segments comprising a first segment; a second piece of a mask pattern segmented in accordance with a plurality of dividing lines into a second plurality of segments, said second plurality of segments comprising a second segment; wherein proximity correction on said first segment is applied as a function of said second segment.
Claim 32
Dependent Claim
17 words
The mask pattern of claim 29 wherein said first and second segments are of substantially equal length.
Claim 33
Dependent Claim
27 words
The mask pattern according to claim 29 wherein at least one of said plurality of dividing lines is derived from a physical structure of said first piece.
Claim 34
Dependent Claim
19 words
The mask pattern according to claim 14 wherein said physical structure of said first piece is an end point.
Claim 35
Dependent Claim
27 words
The mask pattern according to claim 29 wherein at least one of said plurality of dividing lines is derived from a physical structure of said first piece.
Claim 36
Dependent Claim
15 words
The mask pattern according to claim 29 wherein said plurality of dividing lines are parallel.
Claim 37
Dependent Claim
22 words
The mask pattern according to claim 29 wherein the pattern or data representing the pattern is stored on a computer readable media.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2006-03-10 | 2006-09-09 | 2007-03-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-03-10 | 2010-09-09 | 2011-03-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-03-10 | 2014-09-09 | 2015-03-11 | $7700.00 | Window Closed / Lapsed |