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US6518634B1
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Strontium nitride or strontium oxynitride gate dielectric
Assignee: NXP USA Inc
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Filing: 2000-09-01
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Granted: 2003-02-11
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Expires: 2020-09-01
Abstract
Abstract A method of forming a capacitor and transistor are disclosed. Initially, a substrate having a semiconductor material on a first surface is provided. A layer of strontium nitride is then deposited over the first surface and a gate electrode formed over the strontium nitride. Source and drains are then formed in the first surface disposed laterally adjacent to the gate electrode to leave a channel under the gate electrode. A dielectric layer may be formed over the layer of strontium nitride prior to forming the gate electrode. The dielectric layer may include strontium, titanium, and oxygen. In one embodiment, the dielectric layer and the layer of strontium nitride are epitaxial layers. In another embodiment the layer of strontium nitride is formed by sputtering, chemical vapor deposition (CVD), or atomic layer deposition (ALD). The dielectric layer may include strontium, oxygen, and nitrogen, such as strontium oxynitride formed by sputtering, CVD, or ALD.
Inventors
- 👤 Vidya S. Kaushik
- 👤 Bich-Yen Nguyen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:52
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69396; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01332; H10D64/01336; H10D64/01344; H10D64/60; H10D64/66; H10D64/68; H10D64/681; H10D64/685; H10D64/693; H10P14/69394; H10D64/01342; H10D64/691; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6329; H10P14/6334; H10P14/6339; H10P14/66; H10P14/662; H10P14/6921; H10P14/69215
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
80 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a layer of strontium nitride over the first surface; a gate electrode over the layer of strontium nitride; a source and drain in the first surface substantially laterally adjacent to the gate electrode; a channel in the first surface under the gate electrode; and a dielectric layer between the layer of strontium nitride and the gate electrode; wherein the dielectric layer comprises strontium, titanium, and oxygen.
Claim 2
Dependent Claim
80 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a layer of strontium nitride over the first surface; a gate electrode over the layer of strontium nitride; a source and drain in the first surface substantially laterally adjacent to the gate electrode; a channel in the first surface under the gate electrode; and a dielectric layer between the layer of strontium nitride and the gate electrode; wherein the dielectric layer comprises strontium, titanium, and oxygen.
Claim 3
Dependent Claim
20 words
The transistor device of claim 1 , wherein the dielectric layer and the layer of strontium nitride are epitaxial layers.
Claim 4
Dependent Claim
104 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a layer of strontium nitride over the first surface; a gate electrode over the layer of strontium nitride; a dielectric layer between the layer of strontium nitride and the gate electrode a source and drain in the first surface substantially laterally adjacent to the gate electrode; and a channel in the first surface under the gate electrode; wherein the layer of strontium nitride is formed by one of sputtering, CVD, and ALD: and wherein the dielectric layer comprises strontium, oxygen, and nitrogen formed by one of sputtering, CVD, and ALD.
Claim 5
Dependent Claim
104 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a layer of strontium nitride over the first surface; a gate electrode over the layer of strontium nitride; a dielectric layer between the layer of strontium nitride and the gate electrode a source and drain in the first surface substantially laterally adjacent to the gate electrode; and a channel in the first surface under the gate electrode; wherein the layer of strontium nitride is formed by one of sputtering, CVD, and ALD: and wherein the dielectric layer comprises strontium, oxygen, and nitrogen formed by one of sputtering, CVD, and ALD.
Claim 6
Dependent Claim
14 words
The transistor device of claim 3 , wherein the dielectric layer is strontium oxynitride.
Claim 7
Dependent Claim
86 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a first dielectric layer comprising strontium, oxygen, and nitrogen over the first surface; a second dielectric layer between the first surface and the first dielectric. a gate electrode over the first dielectric layer; a source and drain in the first surface substantially laterally adjacent to the gate electrode; and a channel under the gate electrode; wherein the first dielectric layer is strontium oxynitride; and wherein the second dielectric layer comprises strontium nitride.
Claim 8
Dependent Claim
86 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a first dielectric layer comprising strontium, oxygen, and nitrogen over the first surface; a second dielectric layer between the first surface and the first dielectric. a gate electrode over the first dielectric layer; a source and drain in the first surface substantially laterally adjacent to the gate electrode; and a channel under the gate electrode; wherein the first dielectric layer is strontium oxynitride; and wherein the second dielectric layer comprises strontium nitride.
Claim 9
Dependent Claim
86 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a first dielectric layer comprising strontium, oxygen, and nitrogen over the first surface; a second dielectric layer between the first surface and the first dielectric. a gate electrode over the first dielectric layer; a source and drain in the first surface substantially laterally adjacent to the gate electrode; and a channel under the gate electrode; wherein the first dielectric layer is strontium oxynitride; and wherein the second dielectric layer comprises silicon oxide.
Claim 10
Dependent Claim
86 words
A transistor device, comprising: a substrate having a semiconductor material on a first surface; a first dielectric layer comprising strontium, oxygen, and nitrogen over the first surface; a second dielectric layer between the first surface and the first dielectric. a gate electrode over the first dielectric layer; a source and drain in the first surface substantially laterally adjacent to the gate electrode; and a channel under the gate electrode; wherein the first dielectric layer is strontium oxynitride; and wherein the second dielectric layer comprises silicon oxide.
Claim 11
Dependent Claim
56 words
An integrated circuit capacitor device, comprising: a first conductive plate integrated with a semiconductor substrate; a second conductive plate integrated with the semiconductor substrate; and a first dielectric layer comprising strontium and nitrogen between the first and second conductive plates, said first dielectric layer comprising a layer of strontium nitride and a layer of strontium oxynitride.
Claim 12
Dependent Claim
56 words
An integrated circuit capacitor device, comprising: a first conductive plate integrated with a semiconductor substrate; a second conductive plate integrated with the semiconductor substrate; and a first dielectric layer comprising strontium and nitrogen between the first and second conductive plates, said first dielectric layer comprising a layer of strontium nitride and a layer of strontium oxynitride.
Claim 13
Dependent Claim
65 words
An integrated circuit capacitor device, comprising: a first conductive plate integrated with a semiconductor substrate; a second conductive plate integrated with the semiconductor substrate; and a first dielectric layer comprising strontium and nitrogen between the first and second conductive plates; wherein the first dielectric layer comprises strontium nitride; and wherein the first dielectric layer further comprises a layer of dielectric material different from strontium nitride.
Claim 14
Dependent Claim
65 words
An integrated circuit capacitor device, comprising: a first conductive plate integrated with a semiconductor substrate; a second conductive plate integrated with the semiconductor substrate; and a first dielectric layer comprising strontium and nitrogen between the first and second conductive plates; wherein the first dielectric layer comprises strontium nitride; and wherein the first dielectric layer further comprises a layer of dielectric material different from strontium nitride.
References Cited (Backward Citations)
EP1011149A2
Cited
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