US6470227B1 — Method and apparatus for automating a microelectr…

Claim 1

Independent Claim 50 words

A method of automating a manufacturing process, said method comprising the steps of: providing an application object, the application object implementing a domain knowledge for equipment used in the manufacturing process; and implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.

Claim 2

Independent Claim 50 words

A method of automating a manufacturing process, said method comprising the steps of: providing an application object, the application object implementing a domain knowledge for equipment used in the manufacturing process; and implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.

Claim 3

Dependent Claim 19 words

The method of claim 1 , wherein said implementing step is performed by a user of the manufacturing process.

Claim 4

Dependent Claim 75 words

The method of claim 2 , wherein said implementing step further comprises the step of: interacting with the workflow by designing the workflow using a computer system, the computer system having a computer program containing a highest architectural tier and a lower architectural tier for automating the manufacturing process, the user interacting only with the highest architectural tier, the highest architectual tier containing the workflow to implement a standard operating procedure for the manufacturing process.

Claim 5

Dependent Claim 64 words

The method of claim 3 wherein said computer program further includes: a second highest architectural tier having an activity client; a third highest architectural tier having an application object, said application object operable to be invoked by said activity client; and a fourth highest architectural tier having an interface component, said interface component in communication with said application object and said lower architectural tier.

Claim 6

Dependent Claim 18 words

The method of claim 1 , wherein the manufacturing process is a process for manufacturing a semiconductor device.

Claim 7

Dependent Claim 20 words

The method of claim 1 , wherein the manufacturing process is a process for manufacturing a flat panel display device.

Claim 8

Dependent Claim 19 words

The method of claim 1 , wherein the manufacturing process is a process for manufacturing a disk drive device.

Claim 9

Dependent Claim 102 words

The method of claim 1 , wherein said providing step further comprises the steps of: interfacing by a user with a computer system to provide equipment information; storing the equipment information in a database configuration table; interfacing by the user with the computer system to provide an activity information; interfacing by the user with the computer system to provide virtual factory equipment interface commands for the activity information; interfacing by the user with the computer to provide manufacturing execution system parameters to the computer system; and interfacing by the user with the computer system to provide an event that activates the workflow.

Claim 10

Dependent Claim 37 words

The method of claim 8 , wherein the event is selected from a group consisting of a pod arrival event, a main batch control start event, a main batch control complete event and a pod removal event.

Claim 11

Dependent Claim 29 words

The method of claim 1 , wherein the implementing step further comprises the steps of: designing the workflow by a user; and registering the workflow using a workflow engine.

Claim 12

Dependent Claim 42 words

The method of claim 10 , wherein said designing step further comprises the steps of: choosing an activity to be performed in the manufacturing process; and placing the activity into the workflow to provide the sequence of steps of the manufacturing process.

Claim 13

Dependent Claim 75 words

A computer readable medium having a computer program stored thereon, that, when loaded into a computer, causes the computer to perform a function of automating a manufacturing process, the computer automating the manufacturing process by performing the steps of: providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process; and implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.

Claim 14

Dependent Claim 75 words

A computer readable medium having a computer program stored thereon, that, when loaded into a computer, causes the computer to perform a function of automating a manufacturing process, the computer automating the manufacturing process by performing the steps of: providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process; and implementing a workflow using the application object, the workflow representing a sequence of steps of the manufacturing process.

Claim 15

Independent Claim 91 words

An apparatus for automating a manufacturing process, comprising: a storage device, said storage device containing a computer program for automating the process by performing the steps of: providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process; and implementing a workflow using the application object, the workflow representing a sequence of steps of said microelectronic manufacturing process; a display device for interfacing with the computer program; an interfacing device for interfacing with the computer program; and a processing device for executing said computer program.

Claim 16

Independent Claim 91 words

An apparatus for automating a manufacturing process, comprising: a storage device, said storage device containing a computer program for automating the process by performing the steps of: providing an application object, the application object implementing a domain knowledge for equipment in the manufacturing process; and implementing a workflow using the application object, the workflow representing a sequence of steps of said microelectronic manufacturing process; a display device for interfacing with the computer program; an interfacing device for interfacing with the computer program; and a processing device for executing said computer program.

Claim 17

Independent Claim 44 words

A method of automating a manufacturing process, the method comprising the steps of: providing an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process; and implementing a workflow, the workflow representing a sequence of steps of the manufacturing process.

Claim 18

Independent Claim 44 words

A method of automating a manufacturing process, the method comprising the steps of: providing an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process; and implementing a workflow, the workflow representing a sequence of steps of the manufacturing process.

Claim 19

Dependent Claim 16 words

The method of claim 14 , wherein said implementing step is performed before said configuring step.

Claim 20

Dependent Claim 31 words

The method of claim 14 , wherein said configuring step further comprises the step of configuring an application object, the application object using the equipment characteristic to implement the domain knowledge.

Claim 21

Dependent Claim 16 words

The method of claim 14 , wherein said configuring step is performed before said implementing step.

Claim 22

Dependent Claim 15 words

The method of claim 14 , wherein the workflow is represented graphically to a user.

Claim 23

Dependent Claim 17 words

The method of claim 14 , wherein the workflow is represented to a user by a script.

Claim 24

Dependent Claim 19 words

The method of claim 14 , wherein the workflow is represented to a user by a sequence of messages.

Claim 25

Dependent Claim 58 words

An electronic signal comprising a computer program wherein the electronic signal contains instructions that perform a method for automating manufacturing process, the method comprising the steps of: configuring an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process; and implementing a workflow, the workflow representing a sequence of steps of the manufacturing process.

Claim 26

Dependent Claim 58 words

An electronic signal comprising a computer program wherein the electronic signal contains instructions that perform a method for automating manufacturing process, the method comprising the steps of: configuring an equipment characteristic to implement a domain knowledge for equipment used in the manufacturing process; and implementing a workflow, the workflow representing a sequence of steps of the manufacturing process.

Claim 27

Dependent Claim 23 words

The electronic signal of claim 21 , wherein the electronic signal is transmitted between a first computer system and a second computer system.

Claim 28

Dependent Claim 17 words

The electronic signal of claim 22 , wherein the electronic signal is transmitted over a telecommunications network.

Claim 29

Dependent Claim 15 words

The electronic signal of claim 20 , wherein the telecommunications network is a digital network.

Claim 30

Dependent Claim 15 words

The electronic signal of claim 23 , wherein the telecommunications network is an analog network.

Claim 31

Dependent Claim 22 words

The electronic signal of claim 23 , wherein the electronic signal allows users to view an equipment status over said telecommunications network.

Claim 32

Independent Claim 72 words

A method of automating a microelectronic manufacturing process comprising the steps of: (a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool; (b) configuring the application object for a specific process tool; and (c) performing a workflow having a sequence of steps in a microelectronic manufacturing process using a version of the process tool and the application object configured in said step (b).

Claim 33

Independent Claim 72 words

A method of automating a microelectronic manufacturing process comprising the steps of: (a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool; (b) configuring the application object for a specific process tool; and (c) performing a workflow having a sequence of steps in a microelectronic manufacturing process using a version of the process tool and the application object configured in said step (b).

Claim 34

Dependent Claim 30 words

The method of claim 27 , wherein step (c) further comprises the sub-steps of: (1) creating a workflow by a user; and (2) registering the workflow using a workflow engine.

Claim 35

Independent Claim 67 words

A method of automating a manufacturing process comprising the steps of: (a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool; (b) configuring the application object for a specific process tool; and (c) providing a sequence of steps in a manufacturing process using a version of the process tool and the application object configured in said step (b).

Claim 36

Independent Claim 67 words

A method of automating a manufacturing process comprising the steps of: (a) providing an application object implementing multiple variations of a command for corresponding respective versions of a process tool; (b) configuring the application object for a specific process tool; and (c) providing a sequence of steps in a manufacturing process using a version of the process tool and the application object configured in said step (b).

Claim 37

Dependent Claim 35 words

The method of claim 29 , wherein step (c) further comprises the sub-steps of: (1) creating a workflow, the sequence of steps derived from the workflow; and (2) registering the workflow using a workflow engine.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2005-10-21	2006-04-22	2006-10-22	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2009-10-21	2010-04-22	2010-10-22	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2013-10-21	2014-04-22	2014-10-22	$7700.00	Window Closed / Lapsed

Method and apparatus for automating a microelectric manufacturing process

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