US6452292B1 — Planar motor with linear coil arrays

Claim 1

Independent Claim 127 words

A planar electric motor comprising: a magnet array generating magnetic fields of alternating polarity; and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils having a first shape and extending longitudinally in a first direction, and a second coil array having a plurality of coils having a second shape different from said first shape and extending longitudinally in a second direction generally orthogonal to said first direction, wherein individual coil of the plurality of coils having the second shape has a length greater than the stroke of the motor in the second direction.

Claim 2

Dependent Claim 127 words

A planar electric motor comprising: a magnet array generating magnetic fields of alternating polarity; and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils having a first shape and extending longitudinally in a first direction, and a second coil array having a plurality of coils having a second shape different from said first shape and extending longitudinally in a second direction generally orthogonal to said first direction, wherein individual coil of the plurality of coils having the second shape has a length greater than the stroke of the motor in the second direction.

Claim 3

Dependent Claim 52 words

The electric motor of claim 1 , wherein the first shape is a polygonal shape and the second shape is an oval shape and each of the oval shaped coils of the second coil array has a length greater than a length of the polygonal shaped coils of the first coil array.

Claim 4

Dependent Claim 31 words

The electric motor of claim 2 , wherein a ratio of the length of the oval shaped coils to the length of the polygonal shaped coils is at least about 2.

Claim 5

Dependent Claim 31 words

The electric motor of claim 1 , wherein the first coil array includes a plurality of polygonal shaped coils, and the second coil array includes a plurality of oval shaped coils.

Claim 6

Dependent Claim 26 words

The electric motor of claim 4 , wherein each of said plurality of oval shaped coils is substantially flat with generally planar upper and lower surfaces.

Claim 7

Dependent Claim 26 words

The electric motor of claim 4 , wherein the oval shaped coils are stacked in a laterally partially overlapping arrangement to form a row of coils.

Claim 8

Dependent Claim 13 words

The electric motor of claim 4 , wherein said polygonal shape is hexagonal.

Claim 9

Dependent Claim 27 words

The electric motor of claim 4 , wherein the polygonal shaped coils are arranged in a laterally abutting configuration to form a row of polygonal shaped coils.

Claim 10

Dependent Claim 28 words

The electric motor of claim 4 , wherein the polygonal shaped coils are arranged in a laterally partially overlapping configuration to form a row of polygonal shaped coils.

Claim 11

Dependent Claim 24 words

The electric motor of claim 4 , wherein said plurality of oval shaped coils comprises less coils than said plurality of polygonal shaped coils.

Claim 12

Dependent Claim 38 words

The electric motor of claim 4 , wherein one of the magnet array and the coil array is operable to move in six degrees of freedom relative to the other of the magnet array and the coil array.

Claim 13

Dependent Claim 21 words

The electric motor of claim 4 , wherein said magnetic fields alternate in adjacent rows and columns of the magnet array.

Claim 14

Dependent Claim 16 words

The electric motor of claim 4 , wherein said magnet array comprises a plurality of magnets.

Claim 15

Dependent Claim 19 words

The electric motor of claim 13 , wherein each of said plurality of magnets is rectangular in cross-sectional shape.

Claim 16

Dependent Claim 19 words

The electric motor of claim 13 , wherein each of said plurality of magnets is octagonal in cross-sectional shape.

Claim 17

Dependent Claim 34 words

The electric motor of claim 1 , wherein one of the first coil array and the second coil array is stacked on the other of the first coil array and the second coil array.

Claim 18

Dependent Claim 223 words

An exposure apparatus comprising: a frame; an optical system for forming an image on an article, the optical system being mounted on the frame; a base positioned below the optical system; a stage positioned adjacent to the base and configured for supporting the article, the stage being movable relative to the base and the optical system; and an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils having a first shape and extending longitudinally in a first direction, and a second coil array having a plurality of coils having a second shape different from the first shape and extending longitudinally in a second direction generally orthogonal to said first direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array connected to the base, wherein individual coil of the plurality of coils having the second shape has a length greater than the stroke of the motor in the second direction.

Claim 19

Dependent Claim 223 words

An exposure apparatus comprising: a frame; an optical system for forming an image on an article, the optical system being mounted on the frame; a base positioned below the optical system; a stage positioned adjacent to the base and configured for supporting the article, the stage being movable relative to the base and the optical system; and an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils having a first shape and extending longitudinally in a first direction, and a second coil array having a plurality of coils having a second shape different from the first shape and extending longitudinally in a second direction generally orthogonal to said first direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array connected to the base, wherein individual coil of the plurality of coils having the second shape has a length greater than the stroke of the motor in the second direction.

Claim 20

Dependent Claim 52 words

The exposure apparatus of claim 17 , wherein the first shape is a polygonal shape and the second shape is an oval shape and each of the oval shaped coils of the second coil array has a length greater than a length of the polygonal shaped coils of the first coil array.

Claim 21

Dependent Claim 31 words

The exposure apparatus of claim 18 , wherein a ratio of the length of the oval shaped coils to the length of the polygonal shaped coils is at least about 2.

Claim 22

Dependent Claim 31 words

The exposure apparatus of claim 17 , wherein the first coil array includes a plurality of polygonal shaped coils, and the second coil array includes a plurality of oval shaped coils.

Claim 23

Dependent Claim 26 words

The exposure apparatus of claim 20 , wherein each of said plurality of oval shaped coils is substantially flat with generally planar upper and lower surfaces.

Claim 24

Dependent Claim 26 words

The exposure apparatus of claim 20 , wherein the oval shaped coils are stacked in a laterally partially overlapping arrangement to form a row of coils.

Claim 25

Dependent Claim 27 words

The exposure apparatus of claim 20 , wherein the polygonal shaped coils are arranged in a laterally abutting configuration to form a row of polygonal shaped coils.

Claim 26

Dependent Claim 13 words

The exposure apparatus of claim 20 , wherein said polygonal shape is hexagonal.

Claim 27

Dependent Claim 24 words

The exposure apparatus of claim 20 , wherein said plurality of oval shaped coils comprises less coils than said plurality of polygonal shaped coils.

Claim 28

Dependent Claim 38 words

The exposure apparatus of claim 20 , wherein one of the magnet array and the coil array is operable to move in six degrees of freedom relative to the other of the magnet array and the coil array.

Claim 29

Dependent Claim 34 words

The exposure apparatus of claim 20 , wherein one of the first coil array and the second coil array is stacked on the other of the first coil array and the second coil array.

Claim 30

Dependent Claim 36 words

The exposure apparatus of claim 17 , wherein the magnet array is connected to a lower surface of the stage for movement therewith and the coil array is connected to an upper surface of the base.

Claim 31

Dependent Claim 16 words

The exposure apparatus of claim 17 , wherein said magnet array comprises a plurality of magnets.

Claim 32

Dependent Claim 186 words

A stage positioning system comprising: a stage movable relative to a stationary base in a first direction, and a second direction generally orthogonal to the first direction; and an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils extending longitudinally in the first direction, and a second coil array having a plurality of coils extending longitudinally in the second direction, individual coil of the first coil array having a length smaller than a length of the stage in the first direction and individual coil of the second coil array having a length greater than a length of the stage in the second direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array.

Claim 33

Dependent Claim 186 words

A stage positioning system comprising: a stage movable relative to a stationary base in a first direction, and a second direction generally orthogonal to the first direction; and an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils extending longitudinally in the first direction, and a second coil array having a plurality of coils extending longitudinally in the second direction, individual coil of the first coil array having a length smaller than a length of the stage in the first direction and individual coil of the second coil array having a length greater than a length of the stage in the second direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array.

Claim 34

Dependent Claim 19 words

The stage positioning system of claim 30 , wherein the coils of the first coil array are polygonal shaped.

Claim 35

Dependent Claim 19 words

The stage positioning system of claim 30 , wherein the coils of the second coil array are oval shaped.

Claim 36

Dependent Claim 32 words

The stage positioning system of claim 30 , wherein the length of the coils of the first coil array is about one half the length of the stage in the first direction.

Claim 37

Dependent Claim 41 words

The stage positioning system of claim 30 , wherein the length of the coils of the second coil array is greater than the length of the stage in the second direction plus the stroke of the motor in the second direction.

Claim 38

Dependent Claim 23 words

The stage positioning system of claim 30 , wherein the coils of the second coil array are stacked in a laterally overlapping arrangement.

Claim 39

Dependent Claim 17 words

The stage positioning system of claim 30 , wherein the magnet array is connected to the stage.

Claim 40

Dependent Claim 17 words

The stage positioning system of claim 30 , wherein said magnet array comprises a plurality of magnets.

Claim 41

Dependent Claim 176 words

A stage positioning system comprising: a stage movable relative to a stationary base in a first direction, and a second direction generally orthogonal to the first direction; and an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils extending longitudinally in the first direction, and a second coil array having a plurality of coils extending longitudinally in the second direction, the length of the individual coil of the second coil array in the second direction being greater than the length of the individual coil of the first coil array in the first direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array.

Claim 42

Dependent Claim 176 words

A stage positioning system comprising: a stage movable relative to a stationary base in a first direction, and a second direction generally orthogonal to the first direction; and an electric motor operable to move the stage, the motor comprising a magnet array generating magnetic fields of alternating polarity, and a coil array positioned adjacent to the magnet array and operable to interact with said magnetic fields to generate an electromagnetic force between the coil array and the magnet array, the coil array comprising a first coil array having a plurality of coils extending longitudinally in the first direction, and a second coil array having a plurality of coils extending longitudinally in the second direction, the length of the individual coil of the second coil array in the second direction being greater than the length of the individual coil of the first coil array in the first direction, one of the coil array and the magnet array being connected to the stage for movement therewith relative to the other of the magnet array and the coil array.

Claim 43

Dependent Claim 22 words

The stage positioning system of claim 38 , wherein said magnet array comprises a plurality of magnets to generate said magnetic fields.

Claim 44

Dependent Claim 11 words

A device manufactured with the exposure apparatus of claim 17 .

Claim 45

Dependent Claim 17 words

A wafer on which an image has been formed by the exposure apparatus of claim 17 .

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2005-09-16	2006-03-18	2006-09-17	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2009-09-16	2010-03-18	2010-09-17	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2013-09-16	2014-03-18	2014-09-17	$7700.00	Window Closed / Lapsed

Planar motor with linear coil arrays

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