US5574556A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stage mechanism in exposure apparatus
Assignee: Canon Inc
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Filing: 1996-03-25
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Granted: 1996-11-12
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Expires: 2016-03-25
Abstract
Abstract A stage mechanism suitable used in an exposure apparatus is disclosed, wherein heat generation of a coil assembly of a stage driving motor is prevented from adversely affecting a semiconductor substrate or measurement by a laser interferometer. A wafer chuck and the laser interferometer are disposed at a side of a base plate, and a stage and an electromagnetic coil for dirving the stage are disposed at the other side of the base plate. The wafer chuck and the stage are coupled to each other by a coupling member which extends through a bore formed in the base plate.
Inventors
- 👤 Tetsuzo Mori
- 👤 Hidehiko Fujioka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:05
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70716
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
148 words
A stage mechanism, comprising: a base having first and second faces and having a bore extending from the first face to the second face; a substrate holder disposed at the first face side of said base and being movable in a direction along the first face of said base; a movable member disposed at the second face side of said base; a connecting member for connecting said substrate holder and said movable member through the bore of said base; a blocking member, being movable with said movable member, for substantially covering the bore of said base; electromagnetic coil means, disposed at the second face side of said base, for supplying kinetic energy to said movable member; and measuring means, disposed at the first face side of said base, for detecting positional information of said substrate holder with respect to the direction along the first face of said base.
Claim 2
Dependent Claim
148 words
A stage mechanism, comprising: a base having first and second faces and having a bore extending from the first face to the second face; a substrate holder disposed at the first face side of said base and being movable in a direction along the first face of said base; a movable member disposed at the second face side of said base; a connecting member for connecting said substrate holder and said movable member through the bore of said base; a blocking member, being movable with said movable member, for substantially covering the bore of said base; electromagnetic coil means, disposed at the second face side of said base, for supplying kinetic energy to said movable member; and measuring means, disposed at the first face side of said base, for detecting positional information of said substrate holder with respect to the direction along the first face of said base.
Claim 3
Dependent Claim
15 words
A mechanism according to claim 1, wherein said measuring means comprises a laser measuring device.
Claim 4
Dependent Claim
22 words
A mechanism according to claim 1, wherein the first face of said base serves as a guide face for said substrate holder.
Claim 5
Dependent Claim
22 words
A mechanism according to claim 1, wherein the second face of said base serves as a guide face for said movable member.
Claim 6
Dependent Claim
180 words
An exposure apparatus, comprising: a stage mechanism for support a substrate; and an optical system for exposing the substrate held by said stage mechanism, wherein said stage mechanism comprises (i) a base having first and second faces and having a bore extending from the first face to the second face, (ii) a substrate holder disposed at the first face side of said base and being movable in a direction along the first face of said base, (iii) a movable member disposed at the second face side of said base, (iv) a connecting member for connecting said substrate holder and said movable member through the bore of said base, (v) a blocking member, being movable with said movable member, for substantially covering the bore of said base, (vi) electromagnetic coil means, disposed at the second face side of said base, for supplying kinetic energy to said movable member, and (vii) measuring means, disposed at the first face side of said base, for detecting positional information of said substrate holder with respect to the direction along the first face of said base.
Claim 7
Dependent Claim
180 words
An exposure apparatus, comprising: a stage mechanism for support a substrate; and an optical system for exposing the substrate held by said stage mechanism, wherein said stage mechanism comprises (i) a base having first and second faces and having a bore extending from the first face to the second face, (ii) a substrate holder disposed at the first face side of said base and being movable in a direction along the first face of said base, (iii) a movable member disposed at the second face side of said base, (iv) a connecting member for connecting said substrate holder and said movable member through the bore of said base, (v) a blocking member, being movable with said movable member, for substantially covering the bore of said base, (vi) electromagnetic coil means, disposed at the second face side of said base, for supplying kinetic energy to said movable member, and (vii) measuring means, disposed at the first face side of said base, for detecting positional information of said substrate holder with respect to the direction along the first face of said base.
Claim 8
Dependent Claim
15 words
An apparatus according to claim 5, wherein said measuring means comprises a laser measuring device.
Claim 9
Dependent Claim
20 words
An apparatus according to claim 5, wherein the substrate comprises a wafer to which a pattern is to be transferred.
Claim 10
Dependent Claim
20 words
An apparatus according to claim 7, wherein said optical system serves to transfer a pattern of a mask by exposure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-11-12 | 2000-05-13 | 2000-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-11-12 | 2004-05-13 | 2004-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-11-12 | 2008-05-13 | 2008-11-12 | $7700.00 | Window Closed / Lapsed |