US5504407A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stage driving system
Assignee: Canon Inc
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Filing: 1993-02-18
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Granted: 1996-04-02
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Expires: 2013-02-18
Abstract
Abstract A stage driving system capable of positioning an object with a higher speed and a higher precision than prior systems. The system includes a base member, plural movable members provided on the base member, and a controller for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members.
Inventors
- 👤 Shinji Wakui
- 👤 Mikio Sato
- 👤 Katsumi Asada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:08
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/70733; G03F7/70716; G03F7/708; G03F7/70858; G03F7/709; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/19; G05B19/195
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
67 words
A device comprising: a base member; a first movable member provided on said base member; a second movable member movable relative to said first movable member, provided on said first movable member; first detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said second movable member by utilizing the acceleration information detected by said first detection means.
Claim 2
Independent Claim
67 words
A device comprising: a base member; a first movable member provided on said base member; a second movable member movable relative to said first movable member, provided on said first movable member; first detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said second movable member by utilizing the acceleration information detected by said first detection means.
Claim 3
Dependent Claim
16 words
A device according to claim 1, further comprising a damping device for supporting said base member.
Claim 4
Independent Claim
84 words
A device comprising: a base member; a first movable member provided on said base member; a second movable member movable relative to said first movable member, provided on said first movable member; first detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said second movable member so as to reduce the time required for positioning said second movable member at a target position by utilizing the acceleration information detected by said first detection means.
Claim 5
Independent Claim
84 words
A device comprising: a base member; a first movable member provided on said base member; a second movable member movable relative to said first movable member, provided on said first movable member; first detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said second movable member so as to reduce the time required for positioning said second movable member at a target position by utilizing the acceleration information detected by said first detection means.
Claim 6
Dependent Claim
15 words
A device according to claim 3, further comprising damping device for supporting said base member.
Claim 7
Independent Claim
134 words
A device comprising: a base member; a first movable member provided on said base member; a second movable member movable relative to said first movable member, provided on said first movable member; first detection means for detecting the acceleration of said base member; second detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said first movable member in such a manner as to reduce the time required for positioning said first movable member at a target position by utilizing the acceleration information detected by said first detection means, and controlling the displacement of said second movable member so as to reduce the time required for positioning said second movable member at a target position, utilizing the acceleration information detected by said second detection means.
Claim 8
Independent Claim
134 words
A device comprising: a base member; a first movable member provided on said base member; a second movable member movable relative to said first movable member, provided on said first movable member; first detection means for detecting the acceleration of said base member; second detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said first movable member in such a manner as to reduce the time required for positioning said first movable member at a target position by utilizing the acceleration information detected by said first detection means, and controlling the displacement of said second movable member so as to reduce the time required for positioning said second movable member at a target position, utilizing the acceleration information detected by said second detection means.
Claim 9
Dependent Claim
15 words
A device according to claim 5, further comprising damping device for supporting said base member.
Claim 10
Dependent Claim
98 words
An exposure apparatus comprising: a base member; a damping device for supporting said base member; a first movable stage provided on said base member; a second movable stage movable relative to said first stage provided on said first movable stage, for supporting a substrate to be exposed; first detection means for detecting the acceleration of said first movable stage; and control means for controlling the displacement of said second movable stage so as to reduce the time required for positioning said second movable stage at a target position, utilizing the acceleration information detected by said first detection means.
Claim 11
Dependent Claim
98 words
An exposure apparatus comprising: a base member; a damping device for supporting said base member; a first movable stage provided on said base member; a second movable stage movable relative to said first stage provided on said first movable stage, for supporting a substrate to be exposed; first detection means for detecting the acceleration of said first movable stage; and control means for controlling the displacement of said second movable stage so as to reduce the time required for positioning said second movable stage at a target position, utilizing the acceleration information detected by said first detection means.
Claim 12
Dependent Claim
134 words
An exposure apparatus comprising: a base member; a damping device for supporting said base member; a first movable stage provided on said base member; a second movable member provided on said first movable stage; first detection means for detecting the acceleration of said base member; second detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said first movable stage so as to reduce the time required for positioning said first movable stage at a target position by utilizing the acceleration information detected by said first detection means, and controlling the displacement of said second movable stage so as to reduce the time required for positioning said second movable stage at a target position by utilizing the acceleration information detected by said second detection means.
Claim 13
Dependent Claim
134 words
An exposure apparatus comprising: a base member; a damping device for supporting said base member; a first movable stage provided on said base member; a second movable member provided on said first movable stage; first detection means for detecting the acceleration of said base member; second detection means for detecting the acceleration of said first movable member; and control means for controlling the displacement of said first movable stage so as to reduce the time required for positioning said first movable stage at a target position by utilizing the acceleration information detected by said first detection means, and controlling the displacement of said second movable stage so as to reduce the time required for positioning said second movable stage at a target position by utilizing the acceleration information detected by said second detection means.
Claim 14
Independent Claim
90 words
A method for fabricating a device by placing a substrate to be exposed on a second movable stage, provided on a first movable stage positioned on a base member and exposing the substrate placed on the second movable stage comprising the steps of: controlling the displacement of the second movable stage so as to reduce the time required for positioning the second movable stage at a target position; and utilizing the acceleration information of the first movable stage to control displacement of said second movable stage in said controlling step.
Claim 15
Independent Claim
90 words
A method for fabricating a device by placing a substrate to be exposed on a second movable stage, provided on a first movable stage positioned on a base member and exposing the substrate placed on the second movable stage comprising the steps of: controlling the displacement of the second movable stage so as to reduce the time required for positioning the second movable stage at a target position; and utilizing the acceleration information of the first movable stage to control displacement of said second movable stage in said controlling step.
Claim 16
Independent Claim
112 words
A method for fabricating a device by placing a substrate to be exposed on a second movable stage, provided on a first movable stage positioned on a base member and exposing the substrate placed on the second movable stage, comprising the steps of: controlling the displacement of the second movable stage so as to reduce the time required for positioning the second movable stage at a target position by utilizing the acceleration information of the first movable stage; and controlling the displacement of the first movable stage so as to reduce the time required for positioning the first movable stage at a target position, utilizing the acceleration information of said base member.
Claim 17
Independent Claim
112 words
A method for fabricating a device by placing a substrate to be exposed on a second movable stage, provided on a first movable stage positioned on a base member and exposing the substrate placed on the second movable stage, comprising the steps of: controlling the displacement of the second movable stage so as to reduce the time required for positioning the second movable stage at a target position by utilizing the acceleration information of the first movable stage; and controlling the displacement of the first movable stage so as to reduce the time required for positioning the first movable stage at a target position, utilizing the acceleration information of said base member.
References Cited (Backward Citations)
US3656014A
Cited
US3904945A
Cited
US4525659A
Cited
US4653903A
Cited
US4843293A
Cited
US4929874A
Cited
US4952858A
Cited
US5055760A
Cited
US5008606A
Cited
EP0393994A2
Cited
US5208497A
Cited
US5315526A
Cited
US5153494A
Cited
US5187519A
Cited
EP0502578A1
Cited
WO1993001021A1
Cited
US5260580A
Cited
US5432422A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-02 | 1999-10-02 | 2000-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-02 | 2003-10-02 | 2004-04-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-02 | 2007-10-02 | 2008-04-02 | $7700.00 | Window Closed / Lapsed |