Logic circuit and its fabrication method

Claim 2

A fabrication method for fabricating a logic circuit including a first logic gate having at least one first MOS transistor and interposed in a signal path determining an operating speed, said first MOS transistor having a threshold voltage lower than a predetermined voltage and operating at a high speed; and one or plural remaining logic gates other than said first logic circuit having at least one of a second MOS transistor and a third MOS transistor as a transistor having a margin for operating speed, said second MOS transistor having a medium threshold voltage equal to or greater than said predetermined voltage, and said third MOS transistor having a high threshold voltage equal to or greater than said predetermined voltage, said fabrication method comprising the steps of: (A) forming MOS device regions for forming MOS transistors having low, medium and high threshold voltages, said MOS device regions being isolated from each other; (B) implanting impurity for a low threshold into said MOS device regions for forming sai MOS transistors having the low and high threshold voltages; and (C) implanting impurity for a medium threshold into said MOS device regions for forming said MOS transistors having the medium and high threshold voltages.

Claim 3

The fabrication method as claimed in claim 1 , wherein said step (A) forms in said MOS device regions first and second conductivity type MOS device regions, and wherein said steps (B) and (C) are carried out in said first conductivity type MOS device regions, and subsequently said steps (B) and (C) are carried out in said second conductivity type MOS device regions.

Claim 4

A fabrication method for fabricating a logic circuit including a first logic gate having at least one first MOS transistor and interposed in a signal path determining an operating speed, said first MOS transistor having a threshold voltage lower than a predetermined voltage and operating at a high speed; one or plural remaining logic gates other than said first logic circuit having at least one of a second MOS transistor and a third MOS transistor as a transistor having a margin for operating speed, said second MOS transistor having a medium threshold voltage equal to or greater than said predetermined voltage, and said third MOS transistor having a high threshold voltage equal to or greater than said predetermined voltage; and a fourth MOS transistor having a high threshold voltage interposed between a main power supply line and a terminal of at least one of said first and second MOS transistors on the side of a high potential power supply line, said fabrication method comprising the steps of: (A) forming MOS device regions for forming MOS transistors having low, medium and high threshold voltages, said MOS device regions being isolated from each other; (B) implanting impurity for a low threshold into said MOS device regions for forming said MOS transistors having the low and high threshold voltages; and (C) implanting impurity for a medium threshold voltage into said MOS device regions for forming said MOS transistors having the medium and high threshold voltages.

Claim 5

A fabrication method for fabricating a logic circuit including a first logic gate having at least one first MOS transistor and interposed in a signal path determining an operating speed, said first MOS transistor having a threshold voltage lower than a predetermined voltage and operating at a high speed; one or plural remaining logic gates other than said first logic circuit having at least one of a second MOS transistor and a third MOS transistor as a transistor having a margin for operating speed, said second MOS transistor having a medium threshold voltage equal to or greater than said predetermined voltage, and said third MOS transistor having a high threshold voltage equal to or greater than said predetermined voltage; and a fourth MOS transistor having a high threshold voltage interposed between a main power supply line and a terminal of at least one of said first and second MOS transistors on the side of a high potential power supply line, said fabrication method comprising the steps of: (A) forming MOS device regions for forming MOS transistors having low, medium and high threshold voltages, said MOS device regions being isolated from each other; (B) implanting impurity for a low threshold into said MOS device regions for forming said MOS transistors having the low and high threshold voltages; and (C) implanting impurity for a medium threshold voltage into said MOS device regions for forming said MOS transistors having the medium and high threshold voltages.

Claim 6

The fabrication method as claimed in claim 3 , wherein said step (A) forms in said MOS device regions first and second conductivity type MOS device regions, and wherein said steps (B) and (C) are carried out in said first conductivity type MOS device regions, and subsequently said steps (B) and (C) are carried out in said second conductivity type MOS device regions.

Claim 9

The method according to claim 5 , wherein steps (A) and (B) comprises the steps of: providing a mask to permit implantation of impurity for low and high threshold voltage MOS transistors of a first type; implanting impurity corresponding to said low threshold voltage and to said first MOS transistor type; providing a mask to permit implantation of impurity for low and high threshold voltage MOS transistors of a second type; and implanting impurity corresponding to said low threshold voltage and to said second MOS transistor type.

Claim 10

The method according to claim 5 , wherein steps (C) and (D) comprises the steps of: providing a mask to permit implantation of impurity for medium and high threshold voltage MOS transistors of a first type; implanting impurity corresponding to said medium threshold voltage and to said first MOS transistor type; providing a mask to permit implantation of impurity for medium and high threshold voltage MOS transistors of a second type; and implanting impurity corresponding to said medium threshold voltage and to said second MOS transistor type.