US6425112B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Auto correction of error checked simulated printed images
Assignee: International Business Machines Corp
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Filing: 1999-06-17
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Granted: 2002-07-23
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Expires: 2019-06-17
Abstract
Abstract A method and computer system are provided for checking integrated circuit designs for design rule violations. The method may include generating a working design data set, creating a wafer image data set, comparing the wafer image data set to the design rules to produce an error list and automatically altering the working design data set when the comparing indicates a design rule violation. The method further automatically repeats the creating, the comparing and the automatically altering until no design rule violations occur or no solution to the errors exists.
Inventors
- 👤 Orest Bula
- 👤 Daniel C. Cole
- 👤 Edward W. Conrad
- 👤 William C. Leipold
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 09:44
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/36; G06; G06F; G06F30/00; G06F30/30; G06F30/39; G06F30/398
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
92 words
A method for checking designs for design rule violations comprising: generating a working design data set based on said designs; creating an image data set based on said working design data set; comparing said image data set to said design rules for one or more of spacing, intersection area, common run lengths, and overlapping; automatically altering said working design data set when said comparing indicates a design rule violation; and automatically repeating said creating, said comparing and said automatically altering until one of no design rule violations occur and no solution exists.
Claim 2
Independent Claim
92 words
A method for checking designs for design rule violations comprising: generating a working design data set based on said designs; creating an image data set based on said working design data set; comparing said image data set to said design rules for one or more of spacing, intersection area, common run lengths, and overlapping; automatically altering said working design data set when said comparing indicates a design rule violation; and automatically repeating said creating, said comparing and said automatically altering until one of no design rule violations occur and no solution exists.
Claim 3
Dependent Claim
25 words
The method of claim 1 , wherein said altering comprises adjusting at least one of size, shape and spacings of the working design data set.
Claim 4
Dependent Claim
19 words
The method of claim 1 , wherein said image data set is a predicted printed structure on a wafer.
Claim 5
Dependent Claim
18 words
The method of claim 1 , wherein said altering comprises adding notches to the working design data set.
Claim 6
Dependent Claim
23 words
The method of claim 1 , wherein said design rules check one or more of spacing, intersection area, common run lengths and overlapping.
Claim 7
Dependent Claim
13 words
The method of claim 1 , wherein said method checks integrated circuit designs.
Claim 8
Independent Claim
150 words
A method of checking a design data set comprising a plurality of shapes having a spatial relationship to one another against rules, the method comprising: applying a set of systematic error correction rules to said design data set to modify said design data set into a first intermediate design data set; applying a set of shapes adjustment rules to change to said first intermediate design data set into a second intermediate design set; applying a set of process window rules to said second intermediate design data set to change said second intermediate design data set into an image data set; checking said image data set for a violation of said rules; modifying said first intermediate design data set in response to said violation of said rules; and automatically repeating said method until one of determining said image data set is free from violating said rules and determining no solution exists.
Claim 9
Independent Claim
150 words
A method of checking a design data set comprising a plurality of shapes having a spatial relationship to one another against rules, the method comprising: applying a set of systematic error correction rules to said design data set to modify said design data set into a first intermediate design data set; applying a set of shapes adjustment rules to change to said first intermediate design data set into a second intermediate design set; applying a set of process window rules to said second intermediate design data set to change said second intermediate design data set into an image data set; checking said image data set for a violation of said rules; modifying said first intermediate design data set in response to said violation of said rules; and automatically repeating said method until one of determining said image data set is free from violating said rules and determining no solution exists.
Claim 10
Dependent Claim
21 words
The method of claim 7 , wherein said first intermediate design data set is modified using a set of optimization rules.
Claim 11
Dependent Claim
19 words
The method of claim 7 , wherein said image data set is a predicted printed structure on a wafer.
Claim 12
Dependent Claim
22 words
The method of claim 7 , wherein said rules check one or more of spacing, intersection area, common run lengths and overlapping.
Claim 13
Dependent Claim
12 words
The method of claim 7 , wherein said method checks integrated circuits.
Claim 14
Dependent Claim
137 words
A computer system comprising at least one central processing unit, at least one input device, at least one output device and at least one storage device, said storage device tangibly embodying a program of instructions executable by the central processing unit to perform a method for checking designs for design rule violations, said method comprising: generating a working design data set based on said designs; creating an image data set based on said working design data set; comparing said image data set to said design rules for one or more of spacing, intersection area, common run lengths and overlapping; automatically altering said working design data set when said comparing indicates a design rule violation; and automatically repeating said creating, said comparing and said automatically altering until one of no design rule violations occur and no solution exists.
Claim 15
Dependent Claim
137 words
A computer system comprising at least one central processing unit, at least one input device, at least one output device and at least one storage device, said storage device tangibly embodying a program of instructions executable by the central processing unit to perform a method for checking designs for design rule violations, said method comprising: generating a working design data set based on said designs; creating an image data set based on said working design data set; comparing said image data set to said design rules for one or more of spacing, intersection area, common run lengths and overlapping; automatically altering said working design data set when said comparing indicates a design rule violation; and automatically repeating said creating, said comparing and said automatically altering until one of no design rule violations occur and no solution exists.
Claim 16
Dependent Claim
26 words
The system of claim 12 , wherein said method further comprises adjusting at least one of size, shape and spacings of said working design data set.
Claim 17
Dependent Claim
19 words
The system of claim 12 , wherein said image data set is a predicted printed structure on a wafer.
Claim 18
Dependent Claim
18 words
The system of claim 12 , wherein said altering comprises adding notches to the working design data set.
Claim 19
Dependent Claim
23 words
The system of claim 12 , wherein said design rules check one or more of spacing, intersection area, common run lengths and overlapping.
Claim 20
Dependent Claim
12 words
The system of claim 12 , wherein said method checks integrated circuits.
Claim 21
Independent Claim
95 words
A method of checking a design data set comprising a plurality of shapes against design rules, the method comprising: creating a simulated image data set based on said design data set; checking said simulated image data set against said design rules for one or more of spacing, intersection area, common run lengths, and overlapping; modifying said design data set by applying a set of optimization rules in response to a violation of said design rules; and automatically repeating said checking and said modifying until one of no design rule violations occur and no solution exists.
Claim 22
Independent Claim
95 words
A method of checking a design data set comprising a plurality of shapes against design rules, the method comprising: creating a simulated image data set based on said design data set; checking said simulated image data set against said design rules for one or more of spacing, intersection area, common run lengths, and overlapping; modifying said design data set by applying a set of optimization rules in response to a violation of said design rules; and automatically repeating said checking and said modifying until one of no design rule violations occur and no solution exists.
Claim 23
Dependent Claim
24 words
The method of claim 18 , wherein said modifying comprises adjusting at least one of size, shape and spacings of said design data set.
Claim 24
Dependent Claim
19 words
The method of claim 18 , wherein said image data set is a predicted printed structure on a wafer.
Claim 25
Dependent Claim
17 words
The method of claim 18 , wherein said modifying comprises adding notches to the design data set.
Claim 26
Dependent Claim
23 words
The method of claim 18 , wherein said design rules check one or more of spacing, intersection area, common run lengths and overlapping.
Claim 27
Dependent Claim
13 words
The method of claim 18 , wherein said method checks integrated circuit designs.
Claim 28
Dependent Claim
113 words
A program storage device readable by machine, tangibly embodying a program of instructions executable by the machine to perform a method for checking designs for design rule violations, said method comprising: generating a working design data set based on said designs; creating an image data set based on said working design data set; comparing said image data set to said design rules for one or more of spacing, intersection area, common run lengths, and overlapping; automatically altering said working design data set when said comparing indicates a design rule violation; and automatically repeating said creating, said comparing and said automatically altering until one of no design rule violations occur and no solution exists.
Claim 29
Dependent Claim
113 words
A program storage device readable by machine, tangibly embodying a program of instructions executable by the machine to perform a method for checking designs for design rule violations, said method comprising: generating a working design data set based on said designs; creating an image data set based on said working design data set; comparing said image data set to said design rules for one or more of spacing, intersection area, common run lengths, and overlapping; automatically altering said working design data set when said comparing indicates a design rule violation; and automatically repeating said creating, said comparing and said automatically altering until one of no design rule violations occur and no solution exists.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2005-07-22 | 2006-01-21 | 2006-07-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-07-22 | 2010-01-21 | 2010-07-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-07-22 | 2014-01-21 | 2014-07-23 | $7700.00 | Window Closed / Lapsed |