US5362585A
Expired / Lapsed
US
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Seimconductor integrated circuit fabrication utilizing latent imagery
Assignee: Nokia Bell Labs
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Filing: 1993-04-07
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Granted: 1994-11-08
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Expires: 2013-04-07
Abstract
Abstract A method to achieve good stepper focus and exposure over an entire wafer for a particular mask level before the start of a product run is described. This method can also be used to produce a characterization of lens field curvature (i.e., a surface of optimum focus across the lens) and to characterize lens astigmatism, defocus sensitivity, relative resolution, and other characteristics, and to check the stepper for optical column tilt. The process prevents the complexities of resist development from affecting determination of focus. The process involves forming an array of latent images in a resist and examining the scattered light from the edges of the latent images. Analysis of the scattered light quickly provides information on correct exposure and focus together with lens characteristics over the printing field.
Inventors
- 👤 Thomas E. Adams
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 08:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G03F7/70216; G03F7/70241; G03F7/70591; G03F7/706; G03F7/70605; G03F7/70616; G03F7/70641; G03F7/70653; G03F7/70675; G03F9/00; G03F9/70; G03F9/7003; G03F9/7023; G03F9/7026
Claims Analysis
Total Claims: 53
Claim 1
Independent Claim
82 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating a first plurality of latent images in said resist, each said latent image being characterized by at least one predetermined lithographic parameter; interrogating said latent images by exposing them to energy and measuring scattered energy; selecting a desired value of said lithographic parameter chosen to create a desired latent image; utilizing said desired lithographic parameter value to form a second plurality of latent images in said resist.
Claim 2
Independent Claim
82 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating a first plurality of latent images in said resist, each said latent image being characterized by at least one predetermined lithographic parameter; interrogating said latent images by exposing them to energy and measuring scattered energy; selecting a desired value of said lithographic parameter chosen to create a desired latent image; utilizing said desired lithographic parameter value to form a second plurality of latent images in said resist.
Claim 3
Dependent Claim
28 words
The method of claim 1 in which said first plurality of latent images is formed utilizing an exposure dose which is insufficient to produce a fully developed image.
Claim 4
Dependent Claim
52 words
The method of claim 1 in which said step of selecting a desired lithographic parameter includes determining a functional relationship between the said scattered energy and the said lithographic parameter; and determining a desired scattered energy from said functional relationship; and selecting said desired lithographic parameter to correspond to said desired energy.
Claim 5
Dependent Claim
20 words
The method of claim 1 in which said substrate includes a silicon wafer having partially fabricated integrated circuits formed thereon.
Claim 6
Dependent Claim
21 words
The method of claim 1 in which said latent images are formed within the boundaries of at least one integrated circuit.
Claim 7
Dependent Claim
38 words
The method of claim 1 in which said first plurality of latent images are formed in areas chosen from the group consisting of: regions which subsequently become streets overlying said substrate, and regions adjacent to the product array.
Claim 8
Independent Claim
91 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating a first plurality of latent images in said resist, each image being formed at a different focus; interrogating said latent images by measuring energy scattered from each of said latent images; selecting a desired focus, said focus chosen to create latent images capable of producing a predetermined scattered energy; forming a second plurality of latent images in said resist, said latent image representing a semiconductor process level, said latent images being formed at said desired focus.
Claim 9
Independent Claim
91 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating a first plurality of latent images in said resist, each image being formed at a different focus; interrogating said latent images by measuring energy scattered from each of said latent images; selecting a desired focus, said focus chosen to create latent images capable of producing a predetermined scattered energy; forming a second plurality of latent images in said resist, said latent image representing a semiconductor process level, said latent images being formed at said desired focus.
Claim 10
Dependent Claim
39 words
The method of claim 7 in which said first plurality of said latent images are formed in areas chosen from the group consisting of: regions which subsequently become streets overlying said substrate, and regions adjacent to the product array.
Claim 11
Dependent Claim
24 words
The method of claim 7 in which said first plurality of latent images are formed within the boundaries of at least one integrated circuit.
Claim 12
Dependent Claim
60 words
The process of claim 7 in which said step of selecting a desired focus includes determining a functional relationship between each of the energies scattered from each of said latent images and its respective; determining the maximum actual or interpolated scattered energy value from said functional relationship; and selecting said desired focus to correspond to said maximal scattered energy value.
Claim 13
Dependent Claim
78 words
The method of claim 7 in which said step of selecting a desired focus includes determining a functional relationship between each of the energies scattered from each of said latent images and its respective focus; determining the maximum signal or interpolated signal energy value from said functional relationship; selecting a focus to correspond to said maximal energy value, and then selecting said desired focus to be a predetermined offset from said focus corresponding to said maximal energy value.
Claim 14
Dependent Claim
20 words
The method of claim 7 in which said substrate includes a silicon wafer having partially fabricated integrated circuits formed thereon.
Claim 15
Dependent Claim
29 words
The method of claim 7 in which said first plurality of said latent images have formed utilizing an exposure dose which is insufficient to produce a fully developed image.
Claim 16
Dependent Claim
24 words
The method of claim 7 in which said interrogation step is performed simultaneously with the step of creating said first plurality of latent images.
Claim 17
Dependent Claim
54 words
The method of claim 14 in which creation of said first plurality of said latent images is accomplished by exposing said resist to an energy source, and further in which said interrogation step includes measuring energy originating from said energy source which is scattered from said latent image while said latent image is forming.
Claim 18
Dependent Claim
20 words
The method of claim 15 in which the relationship between the intensity of said scattered energy and exposure is measured.
Claim 19
Dependent Claim
34 words
The method of claim 16 further including the step of selecting a desired exposure for said second plurality of latest images value chosen to create latent images capable of producing a predetermined scattered signal.
Claim 20
Dependent Claim
40 words
The method of claim 7 in which creation of said first plurality of said latent images is accomplished by exposing said resist to an energy source chosen from the group consisting of electrons, ions, neutral particle beams, and electromagnetic radiation.
Claim 21
Dependent Claim
61 words
The method of claim 14 in which said first plurality of latent images is formed by exposing said resist to a first energy source and further in which said interrogation step is performed by exposing said latent images to a second energy source and measuring the energy originating from said second energy source and scattered from each of said latent images.
Claim 22
Independent Claim
97 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating a first plurality of latent images in said resist; each image being formed at the same focus and a different respective exposure; interrogating said latent images by measuring energy scattered from said latent images; selecting a desired exposure value chosen to create latent images capable of producing a predetermined scattered signal; forming a second plurality of latent images in said resist, said second plurality of latent images representing a semiconductor process level, said latent images being formed at said desired exposure value.
Claim 23
Independent Claim
97 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating a first plurality of latent images in said resist; each image being formed at the same focus and a different respective exposure; interrogating said latent images by measuring energy scattered from said latent images; selecting a desired exposure value chosen to create latent images capable of producing a predetermined scattered signal; forming a second plurality of latent images in said resist, said second plurality of latent images representing a semiconductor process level, said latent images being formed at said desired exposure value.
Claim 24
Dependent Claim
39 words
The method of claim 20 in which said first plurality of said latent images are formed in areas chosen from the group consisting of: regions which subsequently become streets overlying said substrate, and regions adjacent to the product array.
Claim 25
Dependent Claim
21 words
The method of claim 20 in which said latent images are formed within the boundaries of at least one integrated circuit.
Claim 26
Dependent Claim
51 words
The process of claim 20 in which said process of selecting a desired exposure value includes determining the functional relationship in which each of the intensities of energy scattered from each of said latent images and its respective exposure; and determining said desired exposure value in accordance with said functional relationship.
Claim 27
Dependent Claim
20 words
The method of claim 20 in which said substrate includes a silicon wafer having partially fabricated integrated circuits formed thereon.
Claim 28
Dependent Claim
39 words
The method of claim 20 in which creation of said first plurality of said latent images is accomplished by exposing said resist to an energy source chosen from the group consisting of ions, neutral particle beams, and electromagnetic radiation.
Claim 29
Independent Claim
86 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating at least one latent image in said resist; interrogating said latent image during its formation by measuring energy scattered from said latent image as a function of exposure; selecting a desired exposure chosen to create latent images capable of producing a predetermined scattered signal; forming a second plurality of latent images in said resist; said latent images representing a semiconductor process level, said latent images being formed at said desired exposure.
Claim 30
Independent Claim
86 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating at least one latent image in said resist; interrogating said latent image during its formation by measuring energy scattered from said latent image as a function of exposure; selecting a desired exposure chosen to create latent images capable of producing a predetermined scattered signal; forming a second plurality of latent images in said resist; said latent images representing a semiconductor process level, said latent images being formed at said desired exposure.
Claim 31
Dependent Claim
39 words
The method of claim 26 in which said first plurality of said latent images are formed in areas chosen from the group consisting of: regions which subsequently become streets overlying said substrate, and regions adjacent to the product array.
Claim 32
Dependent Claim
21 words
The method of claim 26 in which said latent images are formed within the boundaries of at least one integrated circuit.
Claim 33
Dependent Claim
20 words
The method of claim 26 in which said substrate includes a silicon wafer having partially fabricated integrated circuits formed thereon.
Claim 34
Dependent Claim
40 words
The method of claim 26 in which creation of said first plurality of said latent images is accomplished by exposing said resist to an energy source chosen from the group consisting of electrons, ions, neutral particle beams, and electromagnetic radiation.
Claim 35
Dependent Claim
48 words
The method of claim 26 in which said step of creating at least one latent image includes exposing said resist to an energy source and said step of interrogating said latent image includes measurement of energy originating from said energy source and subsequently scattered from said latent image.
Claim 36
Dependent Claim
52 words
The method of claim 26 in which said step of creating at least one latent image includes exposing said resist to a first energy source and said step of interrogating said latent image during its formation includes measurement of energy originating from a second energy source and scattered from said latent image.
Claim 37
Independent Claim
70 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating at least one latent image within a printing field in said resist by exposing said resist to a first energy source; interrogating said latent image during its formation by measuring energy scattered from said latent image; terminating the exposure of said resist to said first energy source when said scattered energy reaches a predetermined value.
Claim 38
Independent Claim
70 words
A method of semiconductor integrated circuit fabrication comprising: providing a substrate having a resist; creating at least one latent image within a printing field in said resist by exposing said resist to a first energy source; interrogating said latent image during its formation by measuring energy scattered from said latent image; terminating the exposure of said resist to said first energy source when said scattered energy reaches a predetermined value.
Claim 39
Dependent Claim
18 words
The method of claim 33 in which said latent image of interrogation encompasses substantially the entire printing field.
Claim 40
Dependent Claim
40 words
The method of claim 33 in which said latent image under interrogation is formed in an area chosen from the group consisting of: a region which subsequently becomes a street overlying said substrate, and regions adjacent to the product array.
Claim 41
Dependent Claim
23 words
The method of claim 33 in which said latent image under interrogation is formed within the boundaries of at least one integrated circuit.
Claim 42
Dependent Claim
28 words
The process of claim 33 in which said interrogation process includes the measurement of light originating from said first energy source and subsequently scattered from said latent image.
Claim 43
Dependent Claim
42 words
The method of claim 33 in which said interrogation step includes exposure of said latent image during its formation to a second energy source and measurement of energy originally emanating from said second energy source and subsequently scattered from said latent image.
Claim 44
Independent Claim
87 words
A method of semiconductor integrated circuit fabrication comprising: providing at least two lithographic tools; using each of said lithographic tools to create a first plurality of latent images in a first resist; interrogating said latent images by exposing them to energy and measuring scattered energy to thereby measure a desired lithographic parameter characteristic of each lithographic tool; selecting a lithographic tool having a superior lithographic parameter; using said selected lithographic tool to form a second plurality of latent images in a second resist upon a product wafer.
Claim 45
Independent Claim
87 words
A method of semiconductor integrated circuit fabrication comprising: providing at least two lithographic tools; using each of said lithographic tools to create a first plurality of latent images in a first resist; interrogating said latent images by exposing them to energy and measuring scattered energy to thereby measure a desired lithographic parameter characteristic of each lithographic tool; selecting a lithographic tool having a superior lithographic parameter; using said selected lithographic tool to form a second plurality of latent images in a second resist upon a product wafer.
Claim 46
Independent Claim
86 words
A method of semiconductor fabrication utilizing at least first and second lithographic tools comprising: providing at least one substrate having a resist; forming a first and second latent image, utilizing said first and second lithographic tools respectively; interrogating said first and second latent images to determine a chosen lens characteristic from the group consisting of: spherical aberration, resolution, astigmatism, field curvature, column tilt, defocus sensitivity, and coma; determining which lithographic tool possesses the best of said chosen characteristic; utilizing said lithographic tool at predetermined process levels.
Claim 47
Independent Claim
86 words
A method of semiconductor fabrication utilizing at least first and second lithographic tools comprising: providing at least one substrate having a resist; forming a first and second latent image, utilizing said first and second lithographic tools respectively; interrogating said first and second latent images to determine a chosen lens characteristic from the group consisting of: spherical aberration, resolution, astigmatism, field curvature, column tilt, defocus sensitivity, and coma; determining which lithographic tool possesses the best of said chosen characteristic; utilizing said lithographic tool at predetermined process levels.
Claim 48
Independent Claim
123 words
A method of latent image interrogation comprising: providing a resist with a latent image formed in a first region and no latent image formed in a second region; illuminating said first region and said second region with a beam of energy, said beam remaining fixed upon said first and second regions for a first period of time; measuring the energy scattered during said first period of time; illuminating said second region alone with a beam of energy, said beam remaining fixed upon said second region for a second period of time; measuring the energy scattered during said second period of time; determining a scattered signal strength by subtracting said energy scattered during said second period from said energy scattered during said first period.
Claim 49
Independent Claim
123 words
A method of latent image interrogation comprising: providing a resist with a latent image formed in a first region and no latent image formed in a second region; illuminating said first region and said second region with a beam of energy, said beam remaining fixed upon said first and second regions for a first period of time; measuring the energy scattered during said first period of time; illuminating said second region alone with a beam of energy, said beam remaining fixed upon said second region for a second period of time; measuring the energy scattered during said second period of time; determining a scattered signal strength by subtracting said energy scattered during said second period from said energy scattered during said first period.
Claim 50
Dependent Claim
27 words
The method of claim 41 in which first plurality of latent images is formed utilizing an exposure dose which is insufficient to produce a fully developed image.
Claim 51
Dependent Claim
21 words
The method of claim 41 in which said resist is positioned upon a substrate having partially fabricated integrated circuits formed thereon.
Claim 52
Independent Claim
73 words
A method of semiconductor integrated circuit manufacture comprising: providing a substrate having a resist; creating a plurality of latent images in said resist; interrogating said latent image to determine machine focus offset; measuring barometric pressure at a first time associating machine focus offset as a function of barometric pressure; at a second time, measuring barometric pressure and automatically adjusting machine focus offset according to said association between machine focus offset and barometric pressure.
Claim 53
Independent Claim
73 words
A method of semiconductor integrated circuit manufacture comprising: providing a substrate having a resist; creating a plurality of latent images in said resist; interrogating said latent image to determine machine focus offset; measuring barometric pressure at a first time associating machine focus offset as a function of barometric pressure; at a second time, measuring barometric pressure and automatically adjusting machine focus offset according to said association between machine focus offset and barometric pressure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-07 | 1998-05-09 | 1998-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-07 | 2002-05-09 | 2002-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-07 | 2006-05-09 | 2006-11-08 | $7700.00 | Window Closed / Lapsed |