US6414979B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Gas discharge laser with blade-dielectric electrode
Assignee: Cymer LLC
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Filing: 2001-01-23
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Granted: 2002-07-02
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Expires: 2021-01-23
Abstract
Abstract A gas discharge laser having a laser chamber with two elongated erodable electrode elements, at least one of said electrode element having a generally blunt blade-shaped portion comprised of a material having high electrical conductivity with a flow shaping dielectric fairing positioned on each of two sides of said blunt blade-shaped portion. A pulse power system provides electrical pulses at rates of at least 1 KHz. A blower circulates laser gas between the electrodes at speeds of at least 10 m/s and a heat exchanger is provided to remove heat produced by the blower and the discharges.
Inventors
- 👤 Richard C. Ujazdowski
- 👤 Michael C. Cates
- 👤 Richard G. Morton
- 👤 Jean-Marc Hueber
- 👤 Ross H. Winnick
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 04:25
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/708; G03F7/70908; G03F7/70933; G03F7/70008; G03F7/70025; G03F7/70041; G03F7/70483; G03F7/7055; G03F7/70575; H; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/036; H01S3/038; H01S3/14; H01S3/22; H01S3/223; H01S3/225; H01S3/0381; H01S3/0385; H01S3/0387; H01S3/04; H01S3/041; H01S3/09; H01S3/097; H01S3/0979; H01S3/2207
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
188 words
A gas discharge laser comprising: A) a laser chamber containing a laser gas, B) two elongated erodable electrode elements disposed within said laser chamber, at least one of said electrode elements having a blunt blade-shaped portion comprised of a material with high electric conductivity and a first flow-shaping dielectric fairing positioned on a first side of said blade-shaped portion and a second flow-shaping dielectric fairing positioned on a second side of said blade-shaped portion, c) a pulse power system providing electrical pulses to said electrodes at rates in excess of 1,000 Hz to produce electric discharges, each discharge defining a discharge region and a discharge shape, D) a blower system for circulating said laser gas between said two electrodes at a velocity in excess of 5 m per second, E) a heat exchanger having sufficient capacity to remove heat from said laser gas produced by said blower system and said discharge, F) a gas flow guiding means to guide gas flow past said erodable electrodes without creating significant turbulence in said gas either when the electrodes are new or when the electrodes are eroded to their end-of-life shape.
Claim 2
Dependent Claim
188 words
A gas discharge laser comprising: A) a laser chamber containing a laser gas, B) two elongated erodable electrode elements disposed within said laser chamber, at least one of said electrode elements having a blunt blade-shaped portion comprised of a material with high electric conductivity and a first flow-shaping dielectric fairing positioned on a first side of said blade-shaped portion and a second flow-shaping dielectric fairing positioned on a second side of said blade-shaped portion, c) a pulse power system providing electrical pulses to said electrodes at rates in excess of 1,000 Hz to produce electric discharges, each discharge defining a discharge region and a discharge shape, D) a blower system for circulating said laser gas between said two electrodes at a velocity in excess of 5 m per second, E) a heat exchanger having sufficient capacity to remove heat from said laser gas produced by said blower system and said discharge, F) a gas flow guiding means to guide gas flow past said erodable electrodes without creating significant turbulence in said gas either when the electrodes are new or when the electrodes are eroded to their end-of-life shape.
Claim 3
Dependent Claim
44 words
A laser as in claim 1 , wherein at least one of said first or second fairings is a flow shaper at least partially defining a gradually expanding diffuser region permitting gas pressure recovery and avoiding substantial flow turbulence downstream of said discharge region.
Claim 4
Dependent Claim
22 words
A laser as in claim 2 wherein said gradually expanding diffuser region defines a cone angle of about 7 to 15 degrees.
Claim 5
Dependent Claim
16 words
A laser as in claim 1 wherein said dielectric fairings are comprised of a metal fluoride.
Claim 6
Dependent Claim
14 words
A laser as in claim 1 wherein said dielectric fairings are comprised of alumina.
Claim 7
Dependent Claim
19 words
A laser as in claim 1 wherein said dielectric fairings comprise an insulating edge comprised of a metal fluoride.
Claim 8
Dependent Claim
23 words
A laser as in claim 1 wherein at least one of an erodable electrode elements is position adjustable relative to said electrode support.
Claim 9
Dependent Claim
17 words
A laser as in claim 1 wherein said blunt blade-shaped portion is comprised of a copper alloy.
Claim 10
Dependent Claim
15 words
A laser as in claim 8 wherein said copper alloy comprises copper, aluminum and iron.
Claim 11
Dependent Claim
24 words
A laser as in claim 8 wherein said copper alloy is comprised of about 97.5 percent copper 2.35 percent iron and 0.12 percent zinc.
Claim 12
Dependent Claim
24 words
A laser as in claim 8 wherein said copper alloy is comprised of about 85 percent copper, 11 percent aluminum and 4 percent iron.
Claim 13
Dependent Claim
22 words
A laser as in claim 8 wherein said blunt blade-shaped portion is produced by a machining process and is annealed after machining.
Claim 14
Dependent Claim
15 words
A laser as in claim 8 wherein said copper alloy is a spinodal copper alloy.
Claim 15
Dependent Claim
21 words
A laser as in claim 1 wherein one of said electrode elements is a cathode having a generally pointed-shaped cross section.
Claim 16
Dependent Claim
22 words
A laser as in claim 14 wherein said cathode comprises two surfaces approaching each other at an angle of about 130 degrees.
Claim 17
Dependent Claim
30 words
A laser as in claim 1 wherein one of said electrode elements is a cathode having two tapered end sections tapered to provide uniform electric fields along said end sections.
Claim 18
Dependent Claim
23 words
A laser as in claim 16 wherein each of said tapered end sections taper along a path approximating a portion of an ellipse.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-07-01 | 2005-12-31 | 2006-07-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-07-01 | 2009-12-31 | 2010-07-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-07-01 | 2013-12-31 | 2014-07-02 | $7700.00 | Window Closed / Lapsed |