US5771258A
Expired / Lapsed
US
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Aerodynamic chamber design for high pulse repetition rate excimer lasers
Assignee: Cymer LLC
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Filing: 1997-05-16
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Granted: 1998-06-23
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Expires: 2017-05-16
Abstract
Abstract An excimer laser chamber capable of arc-free operation at repetitive pulse rates of 1 kHz or greater is provided. The chamber balances the electrode design criteria required to produce a well-defined discharge channel with the flow design criteria required to achieve high clearing rates at comparatively high blower efficiency. A ceramic insulator located on either side of the cathode/pre-ionizer assembly enhances the flow of gas through the discharge region by reducing the turbulence in the electrode region. A series of specifically designed flow vanes further enhance the gas flow. The gas exiting the blower fan is guided into the discharge region with one vane. The anode support bar is extended downwardly, thus improving the efficiency of the tangential blower and also minimizing the amount of gas bypassing the discharge region. A pair of vanes downstream from the discharge region smoothly direct the heated gas towards the heat exchanger. These vanes reduce the collapse of the flow velocity as it leaves the electrode region, thus minimizing turbulence.
Inventors
- 👤 Richard George Morton
- 👤 Igor Vladimirovich Fomenkov
- 👤 William Norman Partlo
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 20:38
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/036; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
133 words
An excimer laser, comprising: a housing structure defining a laser cavity for containing a gas capable of lasing; a first electrode and a second electrode disposed in spaced relationship within the housing and defining a discharge region; a fan for circulating said gas through said laser cavity; a heat exchanger disposed within said housing for cooling said gas; a first insulating member disposed in proximity to said first electrode, wherein said gas passes said first insulating member prior to entering said discharge region, wherein said first insulating member reduces gas turbulence in said discharge region; and a second insulating member disposed in proximity to said first electrode, wherein said gas passes said second insulating member after passing through said discharge region, wherein said second insulating member reduces gas turbulence in said discharge region.
Claim 2
Dependent Claim
133 words
An excimer laser, comprising: a housing structure defining a laser cavity for containing a gas capable of lasing; a first electrode and a second electrode disposed in spaced relationship within the housing and defining a discharge region; a fan for circulating said gas through said laser cavity; a heat exchanger disposed within said housing for cooling said gas; a first insulating member disposed in proximity to said first electrode, wherein said gas passes said first insulating member prior to entering said discharge region, wherein said first insulating member reduces gas turbulence in said discharge region; and a second insulating member disposed in proximity to said first electrode, wherein said gas passes said second insulating member after passing through said discharge region, wherein said second insulating member reduces gas turbulence in said discharge region.
Claim 3
Dependent Claim
24 words
The excimer laser of claim 1, further comprising a pre-ionizer adjacent to said first electrode, wherein said first insulating member partially surrounds said pre-ionizer.
Claim 4
Dependent Claim
45 words
The excimer laser of claim 1, further comprising: a first pre-ionizer adjacent to said first electrode, wherein said first insulating member partially surrounds said first pre-ionizer; and a second pre-ionizer adjacent to said first electrode, wherein said second insulating member partially surrounds said second pre-ionizer.
Claim 5
Dependent Claim
26 words
The excimer laser of claim 1, further comprising an arcing vane partially surrounding said fan, said vane directing gas from said fan towards said discharge region.
Claim 6
Dependent Claim
37 words
The excimer laser of claim 4, further comprising a gas siphon, said gas siphon having an inlet passing through a portion of said vane, wherein a portion of said gas from said fan passes through said inlet.
Claim 7
Dependent Claim
46 words
The excimer laser of claim 1, further comprising a support member coupled to said second electrode, wherein said support member extends substantially between said second electrode and said fan, wherein said support member substantially prevents said gas circulated by said fan from bypassing said discharge region.
Claim 8
Dependent Claim
33 words
The excimer laser of claim 1, further comprising a first arcing vane coupled to said second electrode, wherein said first arcing vane directs said gas exiting said discharge region towards said heat exchanger.
Claim 9
Dependent Claim
32 words
The excimer laser of claim 7, further comprising a second arcing vane coupled to said housing, wherein said second arcing vane directs said gas exiting said discharge region towards said heat exchanger.
Claim 10
Dependent Claim
110 words
The excimer laser of claim 1, further comprising: a first arcing vane partially surrounding said fan, said first vane directing gas from said fan toward said discharge region; a support member coupled to said second electrode, wherein said support member extends between said second electrode and said fan, wherein said support member substantially prevents said gas circulated by said fan from bypassing said discharge region; a second arcing vane coupled to said second electrode and said support member; and a third arcing vane coupled to said housing, wherein said third arcing vane in conjunction with said second arcing vane directs said gas exiting said discharge region towards said heat exchanger.
Claim 11
Dependent Claim
166 words
An excimer laser, comprising: a housing structure defining a laser cavity for containing a gas capable of lasing; a cathode and an anode separated along a first direction, wherein said cathode and said anode define a discharge region; a main insulator isolating said cathode from said housing structure; a first pre-ionizer and a second pre-ionizer proximate said cathode and separated along a second direction transverse to said first direction; a first insulating member proximate said cathode and said first pre-ionizer, wherein said gas passes said first insulating member prior to entering said discharge region, wherein said first insulating member reduces gas turbulence in said discharge region; a second insulating member proximate said cathode and said second pre-ionizer, wherein said gas passes said second insulating member after passing through said discharge region, wherein said second insulating member reduces gas turbulence in said discharge region; a fan for circulating said gas through said laser cavity; and a heat exchanger disposed within said housing structure for cooling said gas.
Claim 12
Dependent Claim
166 words
An excimer laser, comprising: a housing structure defining a laser cavity for containing a gas capable of lasing; a cathode and an anode separated along a first direction, wherein said cathode and said anode define a discharge region; a main insulator isolating said cathode from said housing structure; a first pre-ionizer and a second pre-ionizer proximate said cathode and separated along a second direction transverse to said first direction; a first insulating member proximate said cathode and said first pre-ionizer, wherein said gas passes said first insulating member prior to entering said discharge region, wherein said first insulating member reduces gas turbulence in said discharge region; a second insulating member proximate said cathode and said second pre-ionizer, wherein said gas passes said second insulating member after passing through said discharge region, wherein said second insulating member reduces gas turbulence in said discharge region; a fan for circulating said gas through said laser cavity; and a heat exchanger disposed within said housing structure for cooling said gas.
Claim 13
Dependent Claim
65 words
The excimer laser of claim 9, further comprising: a first arcing vane partially surrounding said fan, said first vane directing gas from said fan toward said discharge region a second arcing vane coupled to said second electrode; and a third arcing vane coupled to said housing structure, wherein said second and third arcing vanes direct said gas exiting said discharge region towards said heat exchanger.
Claim 14
Dependent Claim
41 words
The excimer laser of claim 11, further comprising an anode support member, wherein said support member extends substantially between said anode and said fan, wherein said support member substantially prevents said gas circulated by said fan from bypassing said discharge region.
Claim 15
Dependent Claim
33 words
The excimer laser of claim 12, further comprising a fourth vane coupled to said support member, wherein said fourth vane decreases turbulence in said gas prior to said gas entering said discharge region.
Claim 16
Dependent Claim
18 words
The excimer laser of claim 10, wherein said first and second insulating members are fabricated from aluminum oxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-06-22 | 2001-12-22 | 2002-06-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-06-22 | 2005-12-22 | 2006-06-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-06-22 | 2009-12-22 | 2010-06-23 | $7700.00 | Window Closed / Lapsed |