US6350637B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabrication of a no-field MOS transistor
Assignee: STMicroelectronics SRL
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Filing: 2000-04-05
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Granted: 2002-02-26
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Expires: 2020-04-05
Abstract
Abstract Method of fabrication of a no-field transistor with no extra process costs, providing for defining an active area for the transistor surrounded by a thick field oxide layer, insulatively placing a polysilicon gate electrode across the active area to define source/drain regions of the no-field transistor, providing an implant protection mask over a boundary between at least one of the source/drain regions and the field oxide layer, selectively implanting in said source/drain regions a relatively heavy dose of dopants to form relatively heavily doped source/drain regions and to simultaneously dope the polysilicon gate electrode, the polysilicon gate electrode formed with lateral wings extending towards the at least one source/drain region, and the implant protection mask extending over the lateral wings but not over the polysilicon gate.
Inventors
- 👤 Alfonso Maurelli
- 👤 Paola Zabberoni
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:40
CPC Classifications
H; H10; H10D; H10D62/00; H10D62/10; H10D62/13; H10D62/149; H10D62/151; H10D30/00; H10D30/01; H10D30/021; H10D64/00; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/517; H10D64/519
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
121 words
A method of fabrication of a no-field transistor, comprising: defining an active area for the transistor surrounded by a field oxide layer; placing a polysilicon gate electrode across the active area to define source/drain regions of the no-field transistor; providing an implant protection mask over a boundary between at least one of the source/drain regions and the field oxide layer; and selectively implanting in said source/drain regions a relatively heavy dose of dopants to form relatively heavily doped source/drain regions and to simultaneously dope the polysilicon gate electrode, said polysilicon gate electrode is formed with lateral wings extending towards said at least one source/drain region, and said implant protection mask extends over said lateral wings but not over the polysilicon gate.
Claim 2
Independent Claim
121 words
A method of fabrication of a no-field transistor, comprising: defining an active area for the transistor surrounded by a field oxide layer; placing a polysilicon gate electrode across the active area to define source/drain regions of the no-field transistor; providing an implant protection mask over a boundary between at least one of the source/drain regions and the field oxide layer; and selectively implanting in said source/drain regions a relatively heavy dose of dopants to form relatively heavily doped source/drain regions and to simultaneously dope the polysilicon gate electrode, said polysilicon gate electrode is formed with lateral wings extending towards said at least one source/drain region, and said implant protection mask extends over said lateral wings but not over the polysilicon gate.
Claim 3
Dependent Claim
56 words
The method of claim 1 , further comprising, after the implantation of the relatively heavy dose of dopants to form the relatively heavily doped source/drain regions, a salicide protection mask over the boundary between the at least one source/drain region, the salicide protection mask overlapping the lateral wings, and salicidating the relatively heavily doped source/drain regions.
Claim 4
Independent Claim
87 words
A method for fabricating a transistor, comprising: forming a polysilicon gate across an active area surrounded by a field oxide area to define source and drain regions, the polysilicon gate having lateral wings extending therefrom; forming an implant protection mask over a boundary between the source and drain regions and the field oxide layer and over the lateral wings of the polysilicon gate; and selectively implanting with a dopant the source and drain regions and portions of the polysilicon gate not covered by the implant protection mask.
Claim 5
Independent Claim
87 words
A method for fabricating a transistor, comprising: forming a polysilicon gate across an active area surrounded by a field oxide area to define source and drain regions, the polysilicon gate having lateral wings extending therefrom; forming an implant protection mask over a boundary between the source and drain regions and the field oxide layer and over the lateral wings of the polysilicon gate; and selectively implanting with a dopant the source and drain regions and portions of the polysilicon gate not covered by the implant protection mask.
Claim 6
Dependent Claim
22 words
The method of claim 3 , wherein the source and drain regions and the polysilicon gate are simultaneously implanted with the dopant.
Claim 7
Dependent Claim
18 words
The method of claim 4 , wherein the lateral wings extend from end portions of the polysilicon gate.
Claim 8
Dependent Claim
23 words
The method of claim 4 , wherein the lateral wings extend from the polysilicon gate toward both the source and the drain regions.
Claim 9
Dependent Claim
48 words
The method of claim 4 , further comprising, after selectively implanting dopant, forming a salicide protection mask over a boundary between the source and drain regions and the field oxide area, the salicide protection mask overlapping the lateral wings, and subsequently salicidating the doped source and drain regions.
Claim 10
Dependent Claim
52 words
An integrated transistor, comprising: a polysilicon gate surrounded by a field oxide, the polysilicon gate formed across an active area to define a source region and a drain region, the polysilicon gate having a doped central portion with undoped lateral wings extending therefrom, the source and drain regions implanted with a dopant.
Claim 11
Dependent Claim
52 words
An integrated transistor, comprising: a polysilicon gate surrounded by a field oxide, the polysilicon gate formed across an active area to define a source region and a drain region, the polysilicon gate having a doped central portion with undoped lateral wings extending therefrom, the source and drain regions implanted with a dopant.
Claim 12
Dependent Claim
19 words
The integrated transistor of claim 8 , wherein the lateral wings extend from end portions of the polysilicon gate.
Claim 13
Dependent Claim
22 words
The integrated transistor of claim 8 , wherein the lateral wings extend from the polysilicon gate toward the source and drain regions.
Claim 14
Dependent Claim
15 words
The integrated transistor of claim 8 , wherein the source and drain regions are salicidated.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2005-02-25 | 2005-08-27 | 2006-02-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-02-25 | 2009-08-27 | 2010-02-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-02-25 | 2013-08-27 | 2014-02-26 | $7700.00 | Window Closed / Lapsed |