US6334902B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for removing a liquid from a surface
Assignee: Imec
•
Filing: 1998-09-24
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Granted: 2002-01-01
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Expires: 2018-09-24
Abstract
Abstract A method and an apparatus for removing a liquid, i.e. a wet processing liquid, from at least one surface of at least one substrate is disclosed. A liquid is supplied on a surface of substrate. Simultaneously or thereafter the liquid or the substrate is locally heated to thereby reduce the surface tension of said liquid. By doing so, at least locally a sharply defined liquid-ambient boundary is created. According to one aspect of the invention, the substrate is subjected to a rotary movement at a speed to guide said liquid-ambient boundary over the surface of the substrate thereby removing said liquid from said surface.
Inventors
- 👤 Paul Mertens
- 👤 Marc Meuris
- 👤 Marc Heyns
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 20:14
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0408; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
69 words
A method of removing a liquid from at least one surface of at least one substrate comprising the steps of: subjecting said substrate to a rotary movement supplying a liquid on at least a part of said surface of said substrate; and locally heating said liquid on said part of said surface, while supplying said liquid, wherein said heating is accomplished by means of irradiation with an energetic beam.
Claim 2
Independent Claim
69 words
A method of removing a liquid from at least one surface of at least one substrate comprising the steps of: subjecting said substrate to a rotary movement supplying a liquid on at least a part of said surface of said substrate; and locally heating said liquid on said part of said surface, while supplying said liquid, wherein said heating is accomplished by means of irradiation with an energetic beam.
Claim 3
Dependent Claim
38 words
A method as recited in claim 1 , wherein, by supplying said liquid and by locally heating said liquid on said part of said surface of said substrate, at least locally a sharply defined liquid-ambient boundary is created.
Claim 4
Dependent Claim
28 words
A method as recited in claim 1 , wherein said rotary movement is performed at a speed to guide said liquid-ambient boundary over said surface of said substrate.
Claim 5
Dependent Claim
27 words
A method as recited in claim 3 , wherein said rotary movement is applied on a single substrate such that said substrate rotates around its own centre.
Claim 6
Dependent Claim
22 words
A method as in claim 4 , wherein the rotation speed is in the range form 2 to 40 revolutions per second.
Claim 7
Dependent Claim
27 words
A method as recited in claim 1 , wherein said liquid is one of a group of an etching liquid, a cleaning liquid or a rinsing liquid.
Claim 8
Dependent Claim
53 words
A method as recited in claim 6 , wherein said cleaning liquid comprises a mixture of NH 4 OH, H 2 O 2 and H 2 O; or comprises a mixture of HCl, H 2 O 2 and H 2 O; or comprises diluted HCl; or comprises a mixture comprising O 3 .
Claim 9
Dependent Claim
35 words
A method as recited in claim 6 , wherein said rinsing liquid comprises H 2 O; or a mixture of H 2 O and an acid, said mixture having a pH between 2 and 6.
Claim 10
Dependent Claim
16 words
A method as recited in claim 1 , wherein said liquid is a dilute aqueous solution.
Claim 11
Independent Claim
112 words
An apparatus for removing a liquid from at least one surface of at least one substrate, said apparatus comprising: a substrate holder which is subjectable to a rotary movement, said substrate being releasably held by said substrate holder; at least one liquid supply system for applying a liquid on at least a part of said surface of said substrate; at least one heat source for locally heating said liquid; and said heat source and said liquid supply system being positioned such that said heating is applied closer to the centre of said rotary movement of said substrate holder than said liquid and wherein said heat source is a source of radiant energy.
Claim 12
Independent Claim
112 words
An apparatus for removing a liquid from at least one surface of at least one substrate, said apparatus comprising: a substrate holder which is subjectable to a rotary movement, said substrate being releasably held by said substrate holder; at least one liquid supply system for applying a liquid on at least a part of said surface of said substrate; at least one heat source for locally heating said liquid; and said heat source and said liquid supply system being positioned such that said heating is applied closer to the centre of said rotary movement of said substrate holder than said liquid and wherein said heat source is a source of radiant energy.
Claim 13
Dependent Claim
38 words
An apparatus as recited in claim 10 , further comprising a chamber wherein said substrate holder is positioned, said chamber being designed in a manner to avoid back splashing of said liquid on said surface of said substrate.
Claim 14
Dependent Claim
31 words
An apparatus as recited in claim 10 , where said liquid supply system comprises at least one nozzle for applying said liquid on said part of said surface of said substrate.
Claim 15
Dependent Claim
25 words
An apparatus as recited in claim 12 , where said nozzle is mounted on an arm, said arm being movable relative to said substrate holder.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-12-31 | 2005-07-02 | 2006-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-12-31 | 2009-07-02 | 2010-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-12-31 | 2013-07-02 | 2014-01-01 | $7700.00 | Window Closed / Lapsed |