US5972127A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Methods for centrifugally cleaning wafer carriers
Assignee: Applied Materials Inc
•
Filing: 1997-11-26
•
Granted: 1999-10-26
•
Expires: 2017-11-26
Abstract
Abstract A process for cleaning carriers used to hold semiconductor articles includes loading a carrier on a rotor within a processing chamber. The rotor is rotated while spraying cleaning liquid onto the carrier. A flow of primary drying gas is induced through the processing chamber via the centrifugal action of the rotor. Secondary drying gas is sprayed onto the cariers from nozzles. Carriers are loaded onto carrier supports on the rotor, and are held in place with removable baskets.
Inventors
- 👤 Raymon F. Thompson
- 👤 Aleksander Owczarz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 15:41
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; B; B08; B08B; B08B3/00; B08B3/02; H10P72/0406; H10P72/0408; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 47
Claim 1
Independent Claim
81 words
A process for cleaning carriers used to hold semiconductor articles comprising the steps of: loading at least one corner upon a rotor within a processing chamber; rotating the rotor with the at least one carrier supported thereon; spraying cleaning liquid upon the at least one carrier, said spraying occurrg during at least a portion of said rotating; flowing primary drying gas in a generally downwardly direction through the processing chamber; and jetting secondary drying gas upon the at least one carrier.
Claim 2
Dependent Claim
81 words
A process for cleaning carriers used to hold semiconductor articles comprising the steps of: loading at least one corner upon a rotor within a processing chamber; rotating the rotor with the at least one carrier supported thereon; spraying cleaning liquid upon the at least one carrier, said spraying occurrg during at least a portion of said rotating; flowing primary drying gas in a generally downwardly direction through the processing chamber; and jetting secondary drying gas upon the at least one carrier.
Claim 3
Dependent Claim
18 words
A process according to claim 1 wherein said jetting occurs during at least a portion of said rotating.
Claim 4
Dependent Claim
25 words
A process according to claim 1 wherein said flowing primary drying gas is performed with primary drying gas entering upper portions of the processing chamber.
Claim 5
Dependent Claim
22 words
The process of claim 1 further comprising the step of flowing the primary drying gas into an interior space of the rotor.
Claim 6
Dependent Claim
22 words
The process of claim 1 further comprising the step of flowing the primary drying gas outwardly toward sidewalls of the processing chamber.
Claim 7
Dependent Claim
19 words
The process of claim 1 further comprising the step of jetting the secondary drying gas outwardly through the rotor.
Claim 8
Dependent Claim
15 words
The process of claim 1 further comprising the step of heating the primary drying gas.
Claim 9
Dependent Claim
20 words
The process of claim 1 further comprising the step of jetting the secondary drying gas inwardly toward the wafer carriers.
Claim 10
Dependent Claim
21 words
The process of claim 1 wherein the primary drying gas comprises clean dry air and the secondary drying gas comprises Nitrogen.
Claim 11
Dependent Claim
18 words
The process of claim 1 wherein the primary drying gas is induced to flow by rotating the rotor.
Claim 12
Dependent Claim
25 words
The process of claim 1 further including the step of removing moisture from the processing chamber by flowing primary drying gas through the processing chamber.
Claim 13
Dependent Claim
87 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon a rotor which is positioned within a processing chamber; rotating the rotor with the carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; supplying primary drying gas to the processing chamber; and jetting secondary drying gas upon the carriers; wherein said supplying primary drying gas is accomplished through a primary drying gas port which is adjacent a rotational axis of the rotor.
Claim 14
Dependent Claim
87 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon a rotor which is positioned within a processing chamber; rotating the rotor with the carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; supplying primary drying gas to the processing chamber; and jetting secondary drying gas upon the carriers; wherein said supplying primary drying gas is accomplished through a primary drying gas port which is adjacent a rotational axis of the rotor.
Claim 15
Dependent Claim
77 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers onto a carrier support basket; moving the carrier support basket into a processing chamber of a cleaning machine; attaching the carrier support basket onto a first mounting bracket on a rotor in the processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers during at least a portion of said rotating; and supplying drying gas to the processing chamber.
Claim 16
Dependent Claim
77 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers onto a carrier support basket; moving the carrier support basket into a processing chamber of a cleaning machine; attaching the carrier support basket onto a first mounting bracket on a rotor in the processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers during at least a portion of said rotating; and supplying drying gas to the processing chamber.
Claim 17
Dependent Claim
27 words
A process according to claim 13 wherein said spraying cleaning liquid upon the carriers is accomplished by supplying cleaning liquid from both inner and outer liquid supplies.
Claim 18
Dependent Claim
28 words
A process according to claim 13 wherein said supplying drying gas includes supplying primary drying gas to the processing chamber and jetting secondary drying gas upon the carriers.
Claim 19
Dependent Claim
77 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying drying gas to the processing chamber; wherein said carriers are loaded upon plural carrier supports.
Claim 20
Dependent Claim
77 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying drying gas to the processing chamber; wherein said carriers are loaded upon plural carrier supports.
Claim 21
Dependent Claim
93 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying drying gas to the processing chamber; wherein said loading carriers includes loading the carriers onto at least one carrier support which includes a support basket which is detachable from the rotor.
Claim 22
Dependent Claim
93 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying drying gas to the processing chamber; wherein said loading carriers includes loading the carriers onto at least one carrier support which includes a support basket which is detachable from the rotor.
Claim 23
Dependent Claim
83 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying drying gas to the processing chamber; wherein said supplying drying gas includes inducing flow of primary drying gas using said rotor.
Claim 24
Dependent Claim
83 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying drying gas to the processing chamber; wherein said supplying drying gas includes inducing flow of primary drying gas using said rotor.
Claim 25
Dependent Claim
98 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying trying gas to the processing chamber; wherein said supplying drying gas includes supplying primary drying gas to the processing chamber and jetting secondary drying gas upon the carriers from both inner and outer drying gas supplies.
Claim 26
Dependent Claim
98 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers upon at least one carrier support; loading said at least one carrier support upon a rotor which is positioned within a processing chamber; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; and supplying trying gas to the processing chamber; wherein said supplying drying gas includes supplying primary drying gas to the processing chamber and jetting secondary drying gas upon the carriers from both inner and outer drying gas supplies.
Claim 27
Dependent Claim
75 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers through an entrance port onto a rotor positioned within a processing chamber; closing an entrance port door after said loading; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; supplying drying gas to the processing chamber; unloading carriers through an exit port different from said entrance port.
Claim 28
Dependent Claim
75 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers through an entrance port onto a rotor positioned within a processing chamber; closing an entrance port door after said loading; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring during at least a portion of said rotating; supplying drying gas to the processing chamber; unloading carriers through an exit port different from said entrance port.
Claim 29
Dependent Claim
17 words
A process according to claim 20 further comprising: opening an exit port door prior to said unloading.
Claim 30
Dependent Claim
27 words
A process according to claim 20 wherein said spraying cleaning liquid upon the carriers is accomplished by supplying cleaning liquid from both inner and outer liquid supplies.
Claim 31
Dependent Claim
28 words
A process according to claim 20 wherein said supplying drying gas includes supplying primary drying gas to the processing chamber and jetting secondary drying gas upon the carriers.
Claim 32
Dependent Claim
36 words
A process according to claim 20 wherein said supplying drying gas includes supplying primary drying gas to the processing chamber and jetting secondary drying gas upon the carriers from both inner and outer drying gas supplies.
Claim 33
Dependent Claim
24 words
A process according to claim 20 wherein said supplying drying gas is performed with primary drying gas entering upper portions of the processing chamber.
Claim 34
Dependent Claim
21 words
A process according to claim 20 wherein said supplying drying gas includes inducing flow of primary drying gas using said rotor.
Claim 35
Dependent Claim
33 words
A process according to claim 20 wherein said supplying drying gas is accomplished by supplying primary drying gas through a primary drying gas port which is adjacent a rotational axis of the rotor.
Claim 36
Dependent Claim
142 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers through at least one port formed in a sidewall of a processing vessel, said carriers being loaded onto at least one carrier support connected to a rotor which is positioned within a processing chamber within the processing vessel; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring from at least one outer supply which directs the cleaning liquid against the carriers from positions outward from the at least one carrier support during at least a portion of said rotating, said spraying also occurring from at least one inner supply which directs cleaning liquid against the carriers from positions inward of the at least one carrier support during at least a portion of said rotating; and supplying drying gas to the processing chamber.
Claim 37
Dependent Claim
142 words
A process for cleaning carriers used to hold semiconductor articles, comprising: loading carriers through at least one port formed in a sidewall of a processing vessel, said carriers being loaded onto at least one carrier support connected to a rotor which is positioned within a processing chamber within the processing vessel; rotating the rotor and carriers supported thereon; spraying cleaning liquid upon the carriers, said spraying occurring from at least one outer supply which directs the cleaning liquid against the carriers from positions outward from the at least one carrier support during at least a portion of said rotating, said spraying also occurring from at least one inner supply which directs cleaning liquid against the carriers from positions inward of the at least one carrier support during at least a portion of said rotating; and supplying drying gas to the processing chamber.
Claim 38
Dependent Claim
15 words
A process according to claim 28 wherein said carriers are loaded upon plural carrier supports.
Claim 39
Dependent Claim
31 words
A process according to claim 28 wherein said loading carriers includes loading the carriers onto at least one carrier support which includes a support basket which is detachable from the rotor.
Claim 40
Dependent Claim
31 words
A process according to claim 28 wherein said loading carriers includes loading the carriers upon plural carrier supports, the carrier supports including a support basket which is detachable from the rotor.
Claim 41
Dependent Claim
21 words
A process according to claim 28 wherein said supplying drying gas includes inducing flow of primary drying gas using said rotor.
Claim 42
Dependent Claim
27 words
A process according to claim 28 wherein said spraying cleaning liquid upon the carriers is accomplished by supplying cleaning liquid from both inner and outer liquid supplies.
Claim 43
Dependent Claim
28 words
A process according to claim 28 wherein said supplying drying gas includes supplying primary drying gas to the processing chamber and jetting secondary drying gas upon the carriers.
Claim 44
Dependent Claim
36 words
A process according to claim 28 wherein said supplying drying gas includes supplying primary drying gas to the processing chamber and jetting secondary drying gas upon the carriers from both inner and outer drying gas supplies.
Claim 45
Dependent Claim
24 words
A process according to claim 28 wherein said supplying drying gas is performed with primary drying gas entering upper portions of the processing chamber.
Claim 46
Dependent Claim
21 words
A process according to claim 28 wherein said supplying drying gas includes inducing flow of primary drying gas using said rotor.
Claim 47
Dependent Claim
33 words
A process according to claim 28 wherein said supplying drying gas is accomplished by supplying primary drying gas through a primary drying gas port which is adjacent a rotational axis of the rotor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-10-25 | 2003-04-26 | 2003-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-25 | 2007-04-26 | 2007-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-25 | 2011-04-26 | 2011-10-26 | $7700.00 | Window Closed / Lapsed |