Patent US6332829B1 successfully refreshed from Google Patents.
US6332829B1
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US
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Polishing method and device
Assignee: MPM Ltd
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Filing: 2000-05-04
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Granted: 2001-12-25
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Expires: 2020-05-04
Abstract
Abstract A system for polishing a surface including a polishing material and one or more magnetic means in contact with the polishing material. The one or more magnetic means react upon the polishing material to plasticize it, whereby the plasticized material is then used to polish the surface. Preferably the polishing material intermittently and repeatedly contacts with the surface for polishing. A method for polishing a planar surface including bringing two or more magnetic means into contact with a polishing material, thereby plasticizing the polishing material. Then a planar side of the surface contacts the plasticized polishing material, so that the plasticized polishing material polishes the surface. Upon contact with the surface, the plasticized polishing material liquidizes. After termination of the contact with the surface, the liquidized polishing material solidifies. The surface is moved and the above steps are repeated a multiplicity of times until the surface is polished.
Inventors
- 👤 David Trommer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 13:33
CPC Classifications
C; C03; C03C; C03C19/00; B; B24; B24B; B24B1/00; B24B1/005; B24B13/00; B24B31/00; B24B31/10; B24B31/112
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
43 words
A system for polishing a surface, said system comprising: a polishing material; and one or more magnetic means in contact with said polishing material, for reacting upon said polishing material to plasticize such, whereby said plasticized material is used to polish said surface.
Claim 2
Independent Claim
43 words
A system for polishing a surface, said system comprising: a polishing material; and one or more magnetic means in contact with said polishing material, for reacting upon said polishing material to plasticize such, whereby said plasticized material is used to polish said surface.
Claim 3
Dependent Claim
21 words
A system according to claim 1 , wherein said polishing material is in intermittent, repeated contact with said surface for polishing.
Claim 4
Dependent Claim
20 words
A system according to claim 1 , and comprising a means for intermittently magnetizing said one or more magnetic means.
Claim 5
Dependent Claim
20 words
A system according to claim 1 , wherein said one or more magnetic means are one or more permanent magnets.
Claim 6
Dependent Claim
16 words
A system according to claim 4 , wherein said permanent magnets are placed in alternating directions.
Claim 7
Dependent Claim
38 words
A system according to claim 3 , wherein said means for intermittently magnetizing is a shuttle for intermittently acting upon said one or more magnetic means, causing said magnetic means to provide a magnetic field when acted upon.
Claim 8
Dependent Claim
19 words
A system according to claim 1 , wherein said one or more magnetic means are one or more electromagnets.
Claim 9
Dependent Claim
20 words
A system according to claim 7 , wherein said one or more electro-magnets are driven by an alternating current (AC).
Claim 10
Dependent Claim
42 words
A system according to claim 1 , and further comprising a cylinder, wherein said one or more magnetic means are laid along the longitudinal axis of said cylinder, which is rotatable along said longitudinal axis, and said plasticized material covers said cylinder.
Claim 11
Dependent Claim
23 words
A system according to claim 9 , wherein said one or more magnetic means are flush with the outer surface of said cylinder.
Claim 12
Dependent Claim
22 words
A system according to claim 9 , wherein said one or more magnetic means protrude from the outer surface of said cylinder.
Claim 13
Dependent Claim
23 words
A system according to claim 9 , wherein said one or more magnetic means are recessed in the outer surface of said cylinder.
Claim 14
Dependent Claim
30 words
A system according to claim 9 , and further comprising: a vessel holding a pool of said polishing material, wherein a lower portion of said cylinder sits in said pool.
Claim 15
Dependent Claim
37 words
A system according to claim 9 , wherein said cylinder further comprises an array of tubes containing a supply of said polishing material for secreting from said array of tubes onto the outer surface of said cylinder.
Claim 16
Dependent Claim
12 words
A system according to claim 9 , and further comprising a trimmer.
Claim 17
Dependent Claim
15 words
A system according to claim 9 , wherein said magnetic means has a spiral pattern.
Claim 18
Dependent Claim
16 words
A system according to claim 9 , and further comprising a wire mesh covered said cylinder.
Claim 19
Dependent Claim
16 words
A system according to claim 9 , and further comprising a metal-wool blanket covered said cylinder.
Claim 20
Dependent Claim
13 words
A system according to claim 18 , wherein said blanket comprises ferromagnetic materials.
Claim 21
Dependent Claim
13 words
A system according to claim 18 , wherein, said blanket comprises non-metal materials.
Claim 22
Dependent Claim
46 words
A system according to claim 9 , wherein said cylinder comprises a ferro-magnetic mandrel, inserted co-axially into the center of said cylinder, wherein an outer surface of said mandrel contacts with said magnetic means, causing said magnetic means to provide a magnetic field upon said contact.
Claim 23
Dependent Claim
14 words
A system according to claim 1 , wherein said surface is a silicon wafer.
Claim 24
Dependent Claim
14 words
A system according to claim 1 , wherein said surface is a planar surface.
Claim 25
Dependent Claim
14 words
A system according to claim 1 , wherein said surface is a curved surface.
Claim 26
Dependent Claim
15 words
A system according to claim 9 , wherein said cylinder comprises an array of electromagnets.
Claim 27
Independent Claim
73 words
A method for polishing a surface, said method comprising the steps of: plasticizing a polishing material by bringing magnetic means into contact with said polishing material; contacting said surface with said plasticized polishing material upon said contact with said surface, liquidizing said plasticized polishing material; re-plasticizing said liquidized polishing material after termination of said contact with said surface; and repeating all the steps above a multiplicity of times until said surface is polished.
Claim 28
Independent Claim
73 words
A method for polishing a surface, said method comprising the steps of: plasticizing a polishing material by bringing magnetic means into contact with said polishing material; contacting said surface with said plasticized polishing material upon said contact with said surface, liquidizing said plasticized polishing material; re-plasticizing said liquidized polishing material after termination of said contact with said surface; and repeating all the steps above a multiplicity of times until said surface is polished.
Claim 29
Dependent Claim
24 words
A method according to claim 26 , wherein said step of plasticizing comprises the step of causing said polishing material to gain Bingham properties.
Claim 30
Dependent Claim
23 words
A method according to claim 26 , wherein said step of liquidizing comprises step of causing said polishing material to gain Newtonian properties.
Claim 31
Independent Claim
50 words
A method for polishing a surface, said method comprising the steps of: bringing magnetic means into contact with a polishing material; intermittently magnetizing said magnetic means whereby said polishing material is plasticized; repeating said step of intermittently magnetizing said magnetic means a multiplicity of times until said surface is polished.
Claim 32
Independent Claim
50 words
A method for polishing a surface, said method comprising the steps of: bringing magnetic means into contact with a polishing material; intermittently magnetizing said magnetic means whereby said polishing material is plasticized; repeating said step of intermittently magnetizing said magnetic means a multiplicity of times until said surface is polished.
Claim 33
Dependent Claim
29 words
A method according to claim 29 , wherein said step of intermittently magnetizing said magnetic means comprises the step of moving an iron shuttle adjacent to said magnetic means.
Claim 34
Dependent Claim
26 words
A method according to claim 29 , wherein said step of intermittently magnetizing said magnetic means comprises the step of supplying intermittent current to said means.
References Cited (Backward Citations)
US5404680A
Cited
US5931718A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-12-24 | 2005-06-25 | 2005-12-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-12-24 | 2009-06-25 | 2009-12-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-12-24 | 2013-06-25 | 2013-12-25 | $7700.00 | Window Closed / Lapsed |