US6319783B1
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Process to fabricate a novel source-drain extension
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1999-11-19
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Granted: 2001-11-20
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Expires: 2019-11-19
Abstract
Abstract A process for fabricating a MOSFET device, featuring source/drain extension regions, formed after the utilization of high temperature processes, such as heavily doped source/drain regions, has been developed. Disposable insulator spacers are formed on the sides of doped, SEG silicon regions, followed formation of a gate insulator layer, and an overlying gate structure, on a region of the semiconductor substrate located between the doped SEG silicon regions. The temperature experienced during these process steps result in the formation of the heavily doped source/drain, underlying the SEG silicon regions. Selective removal of the disposable spacers, allows the source/drain extension regions to be placed in the space vacated by the disposable spacers, adjacent to the heavily doped source/drain region. Insulator spacers are then used to fill the spaces vacated by removal of the disposable spacers, directly overlying the source/drain extension regions. Additional iterations include the use of an L shaped spacer, overlying the source/drain extension region, as well as the formation of metal silicide, on the doped SEG silicon regions, and on the gate structures.
Inventors
- 👤 Ting Cheong Ang
- 👤 Shyue Pong Quek
- 👤 Jun Song
- 👤 Xing Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 07:27
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/015; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D30/027; H10D30/0275; H10D30/60; H10D30/601; H10D30/608; H10D64/017; H10D64/018
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
317 words
A method of fabricating a metal oxide semiconductor field effect transistor, (MOSFET), device, on a semiconductor substrate, featuring a source/drain extension region formed in an area of said semiconductor substrate not covered by a polysilicon gate structure or by a selectively grown epitaxial shape, comprising the sequential steps of: forming an insulator shape on a first portion of said semiconductor substrate; forming selectively grown epitaxial, (SEG), silicon shapes, on second portions of said semiconductor substrate, not covered by said first insulator shape, with said SEG silicon shapes comprised with dopants; removing said insulator shape, exposing a top surface of said first portion of said semiconductor substrate; forming first insulator spacers directly on sides of said SEG silicon shapes; growing a gate insulator layer on the exposed surface of said first portion, of said semiconductor substrate, and forming heavily doped source/drain regions, in said second portion of said semiconductor substrate, resulting from out diffusion of a portion of said dopants, in said SEG silicon shapes, during said gate insulator layer formation; forming said polysilicon gate structure on said gate insulator layer, with said polysilicon gate structure located between said first insulator spacers, and with said polysilicon gate structure at a same height as said SEG silicon shapes; removing said first insulator spacers exposing third portion of said semiconductor substrate, with said third portion of said semiconductor substrate not covered by said SEG silicon shapes or by said polysilicon gate structure; forming source/drain extension regions in said third portion of said semiconductor substrate; forming second insulator spacers between said SEG silicon shapes, and said polysilicon gate structure, with said second insulator spacers overlying said source/drain extension regions; depositing an interlevel dielectric, (ILD), layer; forming contact holes in said ILD layer exposing a portion of a top surface of said SEG silicon shapes, and a top portion of said polysilicon gate structure; and forming metal structures in said contact holes.
Claim 2
Independent Claim
317 words
A method of fabricating a metal oxide semiconductor field effect transistor, (MOSFET), device, on a semiconductor substrate, featuring a source/drain extension region formed in an area of said semiconductor substrate not covered by a polysilicon gate structure or by a selectively grown epitaxial shape, comprising the sequential steps of: forming an insulator shape on a first portion of said semiconductor substrate; forming selectively grown epitaxial, (SEG), silicon shapes, on second portions of said semiconductor substrate, not covered by said first insulator shape, with said SEG silicon shapes comprised with dopants; removing said insulator shape, exposing a top surface of said first portion of said semiconductor substrate; forming first insulator spacers directly on sides of said SEG silicon shapes; growing a gate insulator layer on the exposed surface of said first portion, of said semiconductor substrate, and forming heavily doped source/drain regions, in said second portion of said semiconductor substrate, resulting from out diffusion of a portion of said dopants, in said SEG silicon shapes, during said gate insulator layer formation; forming said polysilicon gate structure on said gate insulator layer, with said polysilicon gate structure located between said first insulator spacers, and with said polysilicon gate structure at a same height as said SEG silicon shapes; removing said first insulator spacers exposing third portion of said semiconductor substrate, with said third portion of said semiconductor substrate not covered by said SEG silicon shapes or by said polysilicon gate structure; forming source/drain extension regions in said third portion of said semiconductor substrate; forming second insulator spacers between said SEG silicon shapes, and said polysilicon gate structure, with said second insulator spacers overlying said source/drain extension regions; depositing an interlevel dielectric, (ILD), layer; forming contact holes in said ILD layer exposing a portion of a top surface of said SEG silicon shapes, and a top portion of said polysilicon gate structure; and forming metal structures in said contact holes.
Claim 3
Dependent Claim
61 words
The method of claim 1 , wherein said SEG silicon shapes are formed via selective epitaxial growth of a silicon layer, at a temperature between about 600 to 1000° C., to a thickness between about 1000 to 3000 Angstroms, using silane or dichlorosilane as a source, or using disilane and HCl as a source, with hydrogen used as a carrier gas.
Claim 4
Dependent Claim
66 words
The method of claim 1 , wherein said SEG silicon shapes are either doped in situ, during deposition, via the addition of phosphine, or diborane to a silane, dichlorosilane, or disilane ambient, or SEG silicon shapes are grown intrinsically, then doped via implantation of phosphorous, or boron ions, resulting in a dopant concentration, for said SEG silicon shapes between about 1E22 to 1E23 atoms/cm 2 .
Claim 5
Dependent Claim
44 words
The method of claim 1 , wherein said first insulator spacers are comprised of silicon oxide, obtained via LPCVD or PECVD procedures, at a thickness between about 300 to 800 Angstroms, and defined via an anisotropic RIE procedure, using CHF 3 as an etchant.
Claim 6
Dependent Claim
43 words
The method of claim 1 , wherein said gate insulator layer is a silicon dioxide layer, obtained via thermal oxidation procedures, to a thickness between about 10 to 200 Angstroms, at a temperature between about 600 to 1100° C., in an oxygen-steam ambient.
Claim 7
Dependent Claim
65 words
The method of claim 1 , wherein said polysilicon gate structure is formed from a polysilicon layer, obtained via LPCVD procedures, to a thickness between about 1000 to 3000 Angstroms, with the polysilicon layer either doped in situ, during deposition, via the addition of arsine, or phosphine, to a silane ambient, or via implantation of arsenic or phosphorous ions, into an intrinsically grown polysilicon layer.
Claim 8
Dependent Claim
35 words
The method of claim 1 , wherein said polysilicon gate structure is defined either via a chemical mechanical polishing procedure, or via a selective RIE procedure, using Cl 2 or SF 6 as an etchant.
Claim 9
Dependent Claim
19 words
The method of claim 1 , wherein said first insulator spacers are removed using a buffered hydrofluoric acid solution.
Claim 10
Dependent Claim
44 words
The method of claim 1 , wherein said source/drain extension regions are formed via an ion implantation procedure, using arsenic, or phosphorous ions, at an energy between about 3 to 100 KeV, and at a dose between about 5E13 to 1E15 atoms/cm 2 .
Claim 11
Dependent Claim
31 words
The method of claim 1 , wherein said second insulator spacers are comprised of silicon oxide, at a thickness between about 1000 to 3000 Angstroms, obtained via LPCVD or PECVD procedures.
References Cited (Backward Citations)
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