US6281576B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of fabricating structure for chip micro-joining
Assignee: International Business Machines Corp
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Filing: 1999-06-16
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Granted: 2001-08-28
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Expires: 2019-06-16
Abstract
Abstract A structure and process for joining semiconductor components. The present invention allows the flexibility of fabricating electronic components, or semiconductor chip structures, to a common point and electrically joining the different parts together at a back end level, or to a metal wiring level, to complete circuit functionality. Different combinations of front end of the line device chips may be readily joined to a common back end of the line device using a small electrical connection to form a small semiconductor chip package. Instead of packaging different groups of semiconductor chips onto different substrates and then electrically connecting each substrate together for circuit and component functionality, each group of chips can be formed on a single substrate and electrically joined on a back end wafer. These electrically connected and combined groups of chips becomes, for all practical purposes, one chip. The micro-joining of these electronic devices enhances “chip” electrical performance due to reductions in resistance and shorter wiring lengths between devices.
Inventors
- 👤 Mark C. Hakey
- 👤 William Hsioh-Lien Ma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 12:00
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; H10W90/00; H10W72/251; H10W72/90; H10W72/921; H10W72/922; H10W72/9223; H10W72/923; H10W72/941; H10W72/942; H10W90/20; H10W90/297; H10W90/701; H10W90/721; H10W90/722
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
157 words
A method of electrically connecting electronic semiconductor components comprising the steps of: providing a first semiconductor substrate comprising a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed thereon, said column electrically connected to said first electronic semiconductor component; providing a second semiconductor substrate comprising a third electrically insulating layer over a layer comprising a second electronic semiconductor component; a second electrically conductive layer over said third insulating layer; and a fourth electrically insulating layer over said second conductive layer, said fourth insulating layer having at least one via formed therein, said via adapted to receive said column and provide an electrical connection to said second electronic semiconductor component; inserting said column into said via to join said first semiconductor substrate to said second semiconductor substrate; and electrically connecting said first electronic semiconductor component to said second electronic semiconductor component.
Claim 2
Independent Claim
157 words
A method of electrically connecting electronic semiconductor components comprising the steps of: providing a first semiconductor substrate comprising a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed thereon, said column electrically connected to said first electronic semiconductor component; providing a second semiconductor substrate comprising a third electrically insulating layer over a layer comprising a second electronic semiconductor component; a second electrically conductive layer over said third insulating layer; and a fourth electrically insulating layer over said second conductive layer, said fourth insulating layer having at least one via formed therein, said via adapted to receive said column and provide an electrical connection to said second electronic semiconductor component; inserting said column into said via to join said first semiconductor substrate to said second semiconductor substrate; and electrically connecting said first electronic semiconductor component to said second electronic semiconductor component.
Claim 3
Independent Claim
141 words
A method of electrically connecting electronic semiconductor components comprising the steps of: providing a first semiconductor substrate comprising a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed thereon, said column electrically connected to said first electronic semiconductor component; providing a second semiconductor substrate comprising a plurality of layers, at least one of said layers comprising a second electronic semiconductor component, said second semiconductor substrate having at least one via opening formed therein, said via opening adapted to receive said column and provide an electrical connection to said second electronic semiconductor component; inserting said column into said via opening to join said first semiconductor substrate to said second semiconductor substrate; and electrically connecting said first electronic semiconductor component to said second electronic semiconductor component.
Claim 4
Independent Claim
141 words
A method of electrically connecting electronic semiconductor components comprising the steps of: providing a first semiconductor substrate comprising a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed thereon, said column electrically connected to said first electronic semiconductor component; providing a second semiconductor substrate comprising a plurality of layers, at least one of said layers comprising a second electronic semiconductor component, said second semiconductor substrate having at least one via opening formed therein, said via opening adapted to receive said column and provide an electrical connection to said second electronic semiconductor component; inserting said column into said via opening to join said first semiconductor substrate to said second semiconductor substrate; and electrically connecting said first electronic semiconductor component to said second electronic semiconductor component.
Claim 5
Dependent Claim
51 words
The method of claim 2 wherein said first semiconductor substrate comprises: a first electrically insulating layer over said first electronic component; a first electrically conductive layer over said first insulating layer; and a second electrically insulating layer over said first conductive layer, said second insulating layer having said column formed therein.
Claim 6
Dependent Claim
42 words
The method of claim 2 wherein said first electronic semiconductor component comprises a first semiconductor layer with at least one front end of the line device and a second semiconductor layer with at least one partial back end of the line device.
Claim 7
Dependent Claim
32 words
The method of claim 4 wherein said second semiconductor layer has at least one electrically conductive stud extending therefrom, said stud adapted to provide an electrical connection to said second semiconductor layer.
Claim 8
Dependent Claim
21 words
The method of claim 4 wherein said front end of the line device comprises at least one semiconductor integrated circuit device.
Claim 9
Dependent Claim
18 words
The method of claim 2 wherein said second semiconductor component comprises a back end of the line device.
Claim 10
Dependent Claim
17 words
The method of claim 7 wherein said back end of the line device is a wiring substrate.
Claim 11
Independent Claim
176 words
A method of electrically connecting electronic semiconductor components comprising the steps of: providing a first semiconductor substrate comprising a first electrically insulating layer over a layer comprising a first electronic semiconductor component; a first electrically conductive layer over said first insulating layer; and a second electrically insulating layer over said first conductive layer, said second insulating layer having at least one conductive column formed thereon, said column electrically connected to said first electronic semiconductor component; providing a second semiconductor substrate comprising a third electrically insulating layer over a layer comprising a second electronic semiconductor component; a second electrically conductive layer over said third insulating layer; and a fourth electrically insulating layer over said second conductive layer, said fourth insulating layer having at least one via formed therein, said via adapted to receive said column and provide an electrical connection to said second electronic semiconductor component; inserting said column into said via to join said first semiconductor substrate to said second semiconductor substrate; and electrically connecting said first electronic semiconductor component to said second electronic semiconductor component.
Claim 12
Independent Claim
176 words
A method of electrically connecting electronic semiconductor components comprising the steps of: providing a first semiconductor substrate comprising a first electrically insulating layer over a layer comprising a first electronic semiconductor component; a first electrically conductive layer over said first insulating layer; and a second electrically insulating layer over said first conductive layer, said second insulating layer having at least one conductive column formed thereon, said column electrically connected to said first electronic semiconductor component; providing a second semiconductor substrate comprising a third electrically insulating layer over a layer comprising a second electronic semiconductor component; a second electrically conductive layer over said third insulating layer; and a fourth electrically insulating layer over said second conductive layer, said fourth insulating layer having at least one via formed therein, said via adapted to receive said column and provide an electrical connection to said second electronic semiconductor component; inserting said column into said via to join said first semiconductor substrate to said second semiconductor substrate; and electrically connecting said first electronic semiconductor component to said second electronic semiconductor component.
Claim 13
Dependent Claim
17 words
The method of claim 9 wherein said conductive column is electrically joined to said second conductive layer.
Claim 14
Dependent Claim
41 words
The method of claim 9 wherein said conductive column comprises a first layer of a conductive material covered by a layer of a heat flowable electrically conductive material having a lower melting point than said first layer of a conductive material.
Claim 15
Dependent Claim
33 words
The method of claim 11 wherein said first electronic semiconductor component is electrically connected to said second electronic semiconductor component by heating said joined structure sufficiently to flow said heat flowable conductive material.
Claim 16
Dependent Claim
15 words
The method of claim 11 wherein said first layer of conductive material is plated copper.
Claim 17
Dependent Claim
14 words
The method of claim 11 wherein said heat flowable conductive material is plated solder.
Claim 18
Dependent Claim
108 words
A structure for electrically connecting electronic semiconductor components comprising: a first semiconductor substrate having a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed therein, said column adapted to provide an electrical connection to said first electronic component; a second semiconductor substrate having a plurality of layers, at least one of said layers comprising a second electronic semiconductor component, said second semiconductor substrate having at least one via opening formed therein, said via opening adapted to receive said conductive column and provide an electrical connection to said second electronic semiconductor component.
Claim 19
Dependent Claim
108 words
A structure for electrically connecting electronic semiconductor components comprising: a first semiconductor substrate having a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed therein, said column adapted to provide an electrical connection to said first electronic component; a second semiconductor substrate having a plurality of layers, at least one of said layers comprising a second electronic semiconductor component, said second semiconductor substrate having at least one via opening formed therein, said via opening adapted to receive said conductive column and provide an electrical connection to said second electronic semiconductor component.
Claim 20
Dependent Claim
41 words
The structure of claim 15 wherein said first electronic semiconductor component comprises a first semiconductor layer with front end of the line devices and a second semiconductor layer with partial back end of the line devices built through a stud level.
Claim 21
Dependent Claim
51 words
The structure of claim 15 wherein said first semiconductor substrate comprises: a first electrically insulating layer over said first electronic component; a first electrically conductive layer over said first insulating layer; and a second electrically insulating layer over said first conductive layer, said second insulating layer having said columns formed therein.
Claim 22
Dependent Claim
46 words
The structure of claim 15 wherein said conductive column comprises a layer of a heat flowable electrically conductive metal over a layer of an electrically conductive material, said heat flowable electrically conductive metal having a lower melting point than said layer of an electrically conductive material.
Claim 23
Dependent Claim
25 words
The structure of claim 18 wherein said heat flowable conductive metal is plated solder and said layer of an electrically conductive material is plated copper.
Claim 24
Dependent Claim
126 words
A structure for electrically connecting electronic semiconductor components comprising: a first semiconductor substrate having a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed therein, said column adapted to provide an electrical connection to said first electronic component; and a second semiconductor substrate having a third electrically insulating layer over a layer comprising a second electronic semiconductor component; a second electrically conductive layer over said third insulating layer; and a fourth electrically insulating layer over said second conductive layer, said fourth insulating layer having at least one via formed therein, said via adapted to receive said conductive column and provide an electrical connection to said second electronic semiconductor component.
Claim 25
Dependent Claim
126 words
A structure for electrically connecting electronic semiconductor components comprising: a first semiconductor substrate having a plurality of layers, at least one of said layers comprising a first electronic semiconductor component, said first semiconductor substrate having at least one conductive column formed therein, said column adapted to provide an electrical connection to said first electronic component; and a second semiconductor substrate having a third electrically insulating layer over a layer comprising a second electronic semiconductor component; a second electrically conductive layer over said third insulating layer; and a fourth electrically insulating layer over said second conductive layer, said fourth insulating layer having at least one via formed therein, said via adapted to receive said conductive column and provide an electrical connection to said second electronic semiconductor component.
Claim 26
Dependent Claim
16 words
The structure of claim 20 wherein said column is electrically joined to said second conductive layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-08-27 | 2005-02-26 | 2005-08-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-08-27 | 2009-02-26 | 2009-08-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-08-27 | 2013-02-26 | 2013-08-28 | $7700.00 | Window Closed / Lapsed |