US6264533B1
Expired / Lapsed
US
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Abrasive processing apparatus and method employing encoded abrasive product
Assignee: 3M Innovative Properties Co
•
Filing: 1999-05-28
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Granted: 2001-07-24
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Expires: 2019-05-28
Abstract
Abstract An apparatus and method for abrasively processing an article involves the use of an abrasive product provided with a machine discernable pattern representative of information of varying types. The pattern is read while the abrasive product moves relative to the article, and is used to control the movement of the abrasive product relative to the article. The pattern may include one or more of a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic. Reading the pattern may involve one or more of electrically, optically, mechanically or magnetically reading the machine discernable pattern provided on the abrasive product. The pattern may include one or more of indicia, protrusions, depressions, holes, voids, color or pigment variations, bar codes, magnetic transitions or periodic markings. The pattern may include one or more of indexing information, servo information, alignment information or abrasive product identification information. Closed-loop servo control of abrasive product movement may be effected using the servo/indexing pattern information. The abrasive product may constitute a movable pad and an abrasive slurry. The pad may be moved in a controlled manner relative to the article such that the pad and the abrasive slurry abrasively contact the article. The pattern provided on the pad may be read subsequent to a cleaning operation. An information system may be used to store various types of data derived, in part, from use of the abrasive product pattern information. The stored data may be used for a variety of identification, tracking, accounting, inventory, handling, and statistical purposes.
Inventors
- 👤 Charles R. Kummeth
- 👤 Michael J. Muilenburg
- 👤 Gary B. Forsberg
- 👤 Robert J. Streifel
- 👤 Daniel B. Pendergrass, Jr.
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 01:08
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/11; B24B37/20; B24B37/205; B24B49/00; B24B49/006; B24B49/12; B24D; B24D11/00; B24D13/00; B24D13/02; B24D13/12; G; G05; G05B; G05B2219/00; G05B2219/30; G05B2219/49; G05B2219/49302; G05B2219/49305
Claims Analysis
Total Claims: 89
Claim 1
Independent Claim
84 words
A method of abrasively processing an article, comprising: providing an abrasive product comprising a machine discernable patterns the machine discernable pattern comprising at least a first pattern portion and a second pattern portion, the first pattern portion exhibiting a machine discernable characteristic different from a machine discernable characteristic exhibited by the second pattern portion; moving the abrasive product relative to the article; reading the machine discernable pattern; and controlling the movement of the abrasive product relative to the article using the machine discernable pattern.
Claim 2
Independent Claim
84 words
A method of abrasively processing an article, comprising: providing an abrasive product comprising a machine discernable patterns the machine discernable pattern comprising at least a first pattern portion and a second pattern portion, the first pattern portion exhibiting a machine discernable characteristic different from a machine discernable characteristic exhibited by the second pattern portion; moving the abrasive product relative to the article; reading the machine discernable pattern; and controlling the movement of the abrasive product relative to the article using the machine discernable pattern.
Claim 3
Dependent Claim
27 words
The method of claim 1 , wherein reading the machine discernable pattern comprises one or more of electrically, optically, mechanically or magnetically reading the machine discernable pattern.
Claim 4
Dependent Claim
27 words
The method of claim 1 , wherein the machine discernable pattern comprises one or more of indexing information, servo information, alignment information or abrasive product identification information.
Claim 5
Dependent Claim
40 words
The method of claim 1 , wherein the machine discernable pattern comprises indexing information, and controlling abrasive product movement comprises computing a location of the abrasive product at which the abrasive product abrasively contacts the article using the indexing information.
Claim 6
Dependent Claim
37 words
The method of claim 1 , wherein the machine discernable pattern comprises servo information, and controlling abrasive product movement comprises controlling a rate at which the abrasive product moves relative to the article using the servo information.
Claim 7
Dependent Claim
35 words
The method of claim 1 , wherein the machine discernable pattern comprises servo information, and controlling abrasive product movement comprises controlling a direction of abrasive product movement relative to the article using the servo information.
Claim 8
Dependent Claim
34 words
The method of claim 1 , wherein the machine discernable pattern comprises alignment information, and controlling abrasive product movement comprises controlling alignment of the abrasive product relative to the article using the alignment information.
Claim 9
Dependent Claim
32 words
The method of claim 1 , wherein the machine discernable pattern comprises abrasive product identification information, the method further comprising verifying that the abrasive product is appropriate for abrasively processing the article.
Claim 10
Dependent Claim
36 words
The method of claim 8 , wherein controlling abrasive product movement comprises disabling movement of the abrasive product in response to a failure to verify that the abrasive product is appropriate for abrasively processing the article.
Claim 11
Dependent Claim
28 words
The method of claim 1 , wherein the machine discernable pattern comprises at least one of a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic.
Claim 12
Dependent Claim
33 words
The method of claim 1 , wherein the machine discernable pattern comprises one or more of indicia, protrusions, depressions, notches, holes, voids, color or pigment variations, bar codes, magnetic transitions or periodic markings.
Claim 13
Dependent Claim
57 words
The method of claim 1 , wherein reading the machine discernable pattern comprises information identifying a location of one or more defective regions of the abrasive product, and controlling the movement of the abrasive product comprises controlling abrasive product movement so as to avoid contact between the defective regions and the article using the defect identification information.
Claim 14
Dependent Claim
28 words
The method of claim 1 , wherein the abrasive product comprises one of a pad and an abrasive slurry, a lapping or burnishing film, or a textured web.
Claim 15
Dependent Claim
51 words
The method of claim 1 , wherein reading the machine discernable pattern further comprises reading the machine discernable pattern at a first reading location prior to the abrasive product contacting the article and reading the machine discernable pattern at a second reading location subsequent to the abrasive product contacting the article.
Claim 16
Dependent Claim
36 words
The method of claim 1 , wherein the article comprises a silicon article, a germanium article, a gallium arsenide article, a glass article, a ceramic article, a composite article, a wood article or a metallic article.
Claim 17
Dependent Claim
13 words
The method of claim 1 , wherein the article comprises a semiconductor wafer.
Claim 18
Dependent Claim
16 words
The method of claim 1 , further comprising optimizing a parameter of the abrasive processing method.
Claim 19
Dependent Claim
30 words
The method of claim 17 , wherein the parameter comprises one or more of abrasive product speed, temperature, tension or contact pressure defined between the abrasive product and the article.
Claim 20
Dependent Claim
65 words
An abrasive product for abrasively processing an article, comprising: a base layer having a first surface and a second surface; an abrasive material disposed on the first surface; and a machine discernable pattern provided on either one or both of the first surface or the second surface for use in generating a control signal for controlling movement of the abrasive material relative to the article.
Claim 21
Dependent Claim
65 words
An abrasive product for abrasively processing an article, comprising: a base layer having a first surface and a second surface; an abrasive material disposed on the first surface; and a machine discernable pattern provided on either one or both of the first surface or the second surface for use in generating a control signal for controlling movement of the abrasive material relative to the article.
Claim 22
Dependent Claim
24 words
The product of claim 19 , wherein the machine discernable pattern comprises a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic.
Claim 23
Dependent Claim
27 words
The product of claim 19 , wherein the machine discernable pattern comprises indicia provided on either one or both of the first surface or the second surface.
Claim 24
Dependent Claim
35 words
The product of claim 19 , wherein the machine discernable pattern comprises either one or more of protrusions, depressions or notches provided on either one or both of the first surface or the second surface.
Claim 25
Dependent Claim
14 words
The product of claim 19 , wherein the machine discernable pattern comprises bar coding.
Claim 26
Dependent Claim
14 words
The product of claim 19 , wherein the machine discernable pattern comprises servo information.
Claim 27
Dependent Claim
14 words
The product of claim 19 , wherein the machine discernable pattern comprises indexing information.
Claim 28
Dependent Claim
16 words
The product of claim 19 , wherein the machine discernable pattern comprises abrasive product identification information.
Claim 29
Dependent Claim
43 words
The product of claim 19 , wherein the machine discernable pattern comprises at least a first pattern portion and a second pattern portion, the first pattern exhibiting a machine discernable characteristic different from a machine discernable characteristic exhibited by the second pattern portion.
Claim 30
Dependent Claim
51 words
The product of claim 27 , further comprising one or more tabs affixed to the abrasive product, wherein the first pattern portion is provided on either one or both of the first surface or the second surface, and the second pattern portion is provided on one or more of the tabs.
Claim 31
Dependent Claim
18 words
The product of claim 19 , wherein the second surface is oriented substantially parallel to the first surface.
Claim 32
Dependent Claim
18 words
The product of claim 19 , wherein the second surface is oriented substantially orthogonal to the first surface.
Claim 33
Dependent Claim
23 words
The product of claim 19 , wherein the abrasive product has a continuous web configuration, a belt-type configuration or a discrete plate-like configuration.
Claim 34
Dependent Claim
28 words
The product of claim 19 , wherein the abrasive product comprises one of a pad and an abrasive slurry, a lapping or burnishing film, or a textured web.
Claim 35
Dependent Claim
30 words
The product of claim 19 , wherein the machine discernable pattern is provided on a label affixable to either one or both of the first surface or the second surface.
Claim 36
Independent Claim
100 words
An apparatus for abrasively processing an article, comprising: a support for supporting an abrasive product, the abrasive product comprising one of a pad and an abrasive slurry, a lapping or burnishing film, or a textured web, the abrasive product further comprising a machine discernable pattern; a mounting fixture for positioning the article into and out of contact with the abrasive product; an actuator for moving the abrasive product relative to the article; a detector that detects the machine discernable pattern; and a controller that controls the movement of the abrasive product relative to the article using the machine discernable pattern.
Claim 37
Independent Claim
100 words
An apparatus for abrasively processing an article, comprising: a support for supporting an abrasive product, the abrasive product comprising one of a pad and an abrasive slurry, a lapping or burnishing film, or a textured web, the abrasive product further comprising a machine discernable pattern; a mounting fixture for positioning the article into and out of contact with the abrasive product; an actuator for moving the abrasive product relative to the article; a detector that detects the machine discernable pattern; and a controller that controls the movement of the abrasive product relative to the article using the machine discernable pattern.
Claim 38
Dependent Claim
27 words
The apparatus of claim 34 , wherein the detector comprises one or more of an electrical detector, an optical detector, a mechanical detector or a magnetic detector.
Claim 39
Dependent Claim
31 words
The apparatus of claim 34 , wherein the detector detects one or more of indexing information, servo information, alignment information or abrasive product identification information provided in the machine discernable pattern.
Claim 40
Dependent Claim
37 words
The apparatus of claim 34 , wherein the machine discernable pattern comprises indexing information, and the controller computes a location of the abrasive product at which the abrasive product abrasively contacts the article using the indexing information.
Claim 41
Dependent Claim
34 words
The apparatus of claim 34 , wherein the machine discernable pattern comprises servo information, and the controller controls a rate at which the abrasive product moves relative to the article using the servo information.
Claim 42
Dependent Claim
32 words
The apparatus of claim 34 , wherein the machine discernable pattern comprises servo information, and the controller controls a direction of abrasive product movement relative to the article using the servo information.
Claim 43
Dependent Claim
31 words
The apparatus of claim 34 , wherein the machine discernable pattern comprises alignment information, and the controller controls alignment of the abrasive product relative to the article using the alignment information.
Claim 44
Dependent Claim
43 words
The apparatus of claim 34 , wherein the machine discernable pattern comprises abrasive product identification information, and the controller verifies that the abrasive product is appropriate for abrasively processing the article prior to moving the abrasive product so as to contact the article.
Claim 45
Dependent Claim
50 words
The apparatus of claim 34 , wherein the machine discernable pattern comprises information identifying a location of one or more defective regions of the abrasive product, and the controller controls abrasive product movement so as to avoid contact between the defective regions and the article using the defect identification information.
Claim 46
Dependent Claim
36 words
The apparatus of claim 34 , wherein the article comprises a silicon article, a germanium article, a gallium arsenide article, a glass article, a ceramic article, a composite article, a wood article or a metallic article.
Claim 47
Dependent Claim
13 words
The apparatus of claim 34 , wherein the article comprises a semiconductor wafer.
Claim 48
Independent Claim
99 words
A method of acquiring information associated with processing of an article by use of an abrasive processing apparatus, the method comprising: providing an abrasive product comprising a machine discernable pattern; reading the machine discernable pattern; obtaining, from a database, an identification of the abrasive product using the machine discernable pattern; producing data associated with processing of the article by use of the identified abrasive product; storing the data in the database; identifying the article to be processed using the abrasive processing apparatus; and verifying, using the database, the appropriateness of processing the identified article using the identified abrasive product.
Claim 49
Independent Claim
99 words
A method of acquiring information associated with processing of an article by use of an abrasive processing apparatus, the method comprising: providing an abrasive product comprising a machine discernable pattern; reading the machine discernable pattern; obtaining, from a database, an identification of the abrasive product using the machine discernable pattern; producing data associated with processing of the article by use of the identified abrasive product; storing the data in the database; identifying the article to be processed using the abrasive processing apparatus; and verifying, using the database, the appropriateness of processing the identified article using the identified abrasive product.
Claim 50
Dependent Claim
18 words
The method of claim 45 , wherein identifying the article comprises accessing the database to identify the article.
Claim 51
Dependent Claim
21 words
The method of claim 46 , wherein identifying the article comprises manually or electronically inputting the article identification into the database.
Claim 52
Dependent Claim
38 words
The method of claim 45 , further comprising disabling processing of the identified article by use of the identified abrasive product in response to unsuccessfully verifying the appropriateness of processing the identified article using the identified abrasive product.
Claim 53
Dependent Claim
27 words
The method of claim 45 , wherein producing data comprises producing data associated with a location of the identified abrasive product at which the article was processed.
Claim 54
Dependent Claim
26 words
The method of claim 45 , wherein producing data comprises producing inventory data associated with one or both of the identified abrasive product or the article.
Claim 55
Dependent Claim
25 words
The method of claim 45 , wherein producing data comprises producing statistics associated with processing of one or more articles using the identified abrasive product.
Claim 56
Dependent Claim
24 words
The method of claim 45 , wherein producing data comprises producing data associated with a throughput of articles processed using the identified abrasive product.
Claim 57
Dependent Claim
20 words
The method of claim 45 , further comprising communicating processing data stored in the database to a remotely located processor.
Claim 58
Independent Claim
100 words
A system for acquiring information concerning processing of an article by use of an abrasive processing apparatus, comprising: a controller coupled to the abrasive processing apparatus; a detector, coupled to the controller, that detects a machine discernable pattern provided on an abrasive product used by the abrasive processing apparatus to abrasively process the article; a host processor coupled to memory; and an interface that couples the host processor to the controller of the abrasive processing apparatus, the host processor receiving identification information associated with the abrasive product from the controller and storing the abrasive product identification information in the memory.
Claim 59
Independent Claim
100 words
A system for acquiring information concerning processing of an article by use of an abrasive processing apparatus, comprising: a controller coupled to the abrasive processing apparatus; a detector, coupled to the controller, that detects a machine discernable pattern provided on an abrasive product used by the abrasive processing apparatus to abrasively process the article; a host processor coupled to memory; and an interface that couples the host processor to the controller of the abrasive processing apparatus, the host processor receiving identification information associated with the abrasive product from the controller and storing the abrasive product identification information in the memory.
Claim 60
Dependent Claim
31 words
The system of claim 54 , wherein either the host processor or the controller converts the machine discernable pattern to a corresponding abrasive product identity using the abrasive product identification information.
Claim 61
Dependent Claim
18 words
The system of claim 55 , wherein the host processor is situated remotely with respect to the controller.
Claim 62
Dependent Claim
36 words
The system of claim 54 , wherein the memory comprises a plurality of physical or virtual memory devices, each of the memory devices situated proximately or remotely with respect to other ones of the memory devices.
Claim 63
Dependent Claim
51 words
The system of claim 54 , wherein an identity of the article to be processed using the abrasive processing apparatus is stored in the memory, and the host processor associates the article identity with the abrasive product identification information to verify the appropriateness of processing the article using the abrasive product.
Claim 64
Dependent Claim
45 words
The system of claim 58 , wherein the host processor communicates a disable signal to the controller in response to unsuccessfully verifying the appropriateness of processing the article using the abrasive product, the controller disabling processing of the article in response to the disable signal.
Claim 65
Dependent Claim
23 words
The system of claim 54 , further comprising an input device, the article identity being input into the memory using the input device.
Claim 66
Dependent Claim
26 words
The system of claim 60 , where the input device comprises a keyboard, a voice recognition device, an optical scanning device, or a bar code reader.
Claim 67
Independent Claim
35 words
The system of claims 54 , wherein the controller produces data associated with a location of the identified abrasive product at which the article was processed, the controller communicating the data to the host processor.
Claim 68
Dependent Claim
25 words
The system of claim 54 , wherein the controller produces inventory data associated with one or both of the identified abrasive product or the article.
Claim 69
Dependent Claim
23 words
The system of claim 54 , wherein the controller produces statistics associated with processing of one or more articles using the abrasive product.
Claim 70
Dependent Claim
22 words
The system of claim 54 , wherein the controller produces data associated with a throughput of articles processed using the abrasive product.
Claim 71
Independent Claim
68 words
A method of abrasively processing an article, comprising: providing an abrasive product comprising a machine discernable pattern, the abrasive product comprising one of a pad and an abrasive slurry, a lapping or burnishing film, or a textured web; moving the abrasive product relative to the article; reading the machine discernable pattern; and controlling the movement of the abrasive product relative to the article using the machine discernable pattern.
Claim 72
Independent Claim
68 words
A method of abrasively processing an article, comprising: providing an abrasive product comprising a machine discernable pattern, the abrasive product comprising one of a pad and an abrasive slurry, a lapping or burnishing film, or a textured web; moving the abrasive product relative to the article; reading the machine discernable pattern; and controlling the movement of the abrasive product relative to the article using the machine discernable pattern.
Claim 73
Dependent Claim
27 words
The method of claim 66 , wherein reading the machine discernable pattern comprises one or more of electrically, optically, mechanically or magnetically reading the machine discernable pattern.
Claim 74
Dependent Claim
27 words
The method of claim 66 , wherein the machine discernable pattern comprises one or more of indexing information, servo information, alignment information or abrasive product identification information.
Claim 75
Dependent Claim
40 words
The method of claim 66 , wherein the machine discernable pattern comprises indexing information, and controlling abrasive product movement comprises computing a location of the abrasive product at which the abrasive product abrasively contacts the article using the indexing information.
Claim 76
Dependent Claim
37 words
The method of claim 66 , wherein the machine discernable pattern comprises servo information, and controlling abrasive product movement comprises controlling a rate at which the abrasive product moves relative to the article using the servo information.
Claim 77
Dependent Claim
35 words
The method of claim 66 , wherein the machine discernable pattern comprises servo information, and controlling abrasive product movement comprises controlling a direction of abrasive product movement relative to the article using the servo information.
Claim 78
Dependent Claim
34 words
The method of claim 66 , wherein the machine discernable pattern comprises alignment information, and controlling abrasive product movement comprises controlling alignment of the abrasive product relative to the article using the alignment information.
Claim 79
Dependent Claim
32 words
The method of claim 66 , wherein the machine discernable pattern comprises abrasive product identification information, the method further comprising verifying that the abrasive product is appropriate for abrasively processing the article.
Claim 80
Dependent Claim
36 words
The method of claim 73 , wherein controlling abrasive product movement comprises disabling movement of the abrasive product in response to a failure to verify that the abrasive product is appropriate for abrasively processing the article.
Claim 81
Dependent Claim
28 words
The method of claim 66 , wherein the machine discernable pattern comprises at least one of a machine discernable electrical characteristic, optical characteristic, topographic characteristic or magnetic characteristic.
Claim 82
Dependent Claim
33 words
The method of claim 66 , wherein the machine discernable pattern comprises one or more of indicia, protrusions, depressions, notches, holes, voids, color or pigment variations, bar codes, magnetic transitions or periodic markings.
Claim 83
Dependent Claim
44 words
The method of claim 66 , wherein the machine discernable pattern comprises at least a first pattern portion and a second pattern portion, the first pattern portion exhibiting a machine discernable characteristic different from a machine discernable characteristic exhibited by the second pattern portion.
Claim 84
Dependent Claim
57 words
The method of claim 66 , wherein reading the machine discernable pattern comprises information identifying a location of one or more defective regions of the abrasive product, and controlling the movement of the abrasive product comprises controlling abrasive product movement so as to avoid contact between the defective regions and the article using the defect identification information.
Claim 85
Dependent Claim
51 words
The method of claim 66 , wherein reading the machine discernable pattern further comprises reading the machine discernable pattern at a first reading location prior to the abrasive product contacting the article and reading the machine discernable pattern at a second reading location subsequent to the abrasive product contacting the article.
Claim 86
Dependent Claim
36 words
The method of claim 66 , wherein the article comprises a silicon article, a germanium article, a gallium arsenide article, a glass article, a ceramic article, a composite article, a wood article or a metallic article.
Claim 87
Dependent Claim
13 words
The method of claim 66 , wherein the article comprises a semiconductor wafer.
Claim 88
Dependent Claim
16 words
The method of claim 66 , further comprising optimizing a parameter of the abrasive processing method.
Claim 89
Dependent Claim
30 words
The method of claim 82 , wherein the parameter comprises one or more of abrasive product speed, temperature, tension or contact pressure defined between the abrasive product and the article.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-07-23 | 2005-01-22 | 2005-07-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-07-23 | 2009-01-22 | 2009-07-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-07-23 | 2013-01-22 | 2013-07-24 | $7700.00 | Window Closed / Lapsed |