US6197672B1
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US
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Method for forming polycide dual gate
Assignee: United Microelectronics Corp
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Filing: 1998-12-08
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Granted: 2001-03-06
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Expires: 2018-12-08
Abstract
Abstract A method for forming a dual polycide gate. A substrate that has an isolation structure is provided, a polysilicon layer (or an α-Si layer) is deposited over the substrate, N-type and P-type dopants are implanted into the polysilicon layer to form a dual gate having an N-type gate and a P-type gate. An annealing step is performed to restore the surface crystal structure of the polysilicon layer, an oxide layer is deposited on the doped polysilicon layer, and a silicide layer is formed over the oxide layer. The silicide layer, the oxide layer and the polysilicon layer are defined to form a polycide gate, a lightly doped source/drain region is formed beside the gate in the substrate. A spacer is formed on the sidewall of the gate, and a heavily doped source/drain region is formed beside the spacer in the substrate.
Inventors
- 👤 Yung-Chang Lin
- 👤 Tung-Po Chen
- 👤 Jacob Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:22
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/01312; H10D64/60; H10D64/66; H10D64/661; H10D64/662; H10D64/664
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
122 words
A manufacturing method for a polycide dual gate, wherein a substrate having a gate oxide layer and a polysilicon layer is provided, comprising the steps of: implanting first conductive type ions and second conductive type ions into the polysilicon layer to form a first conductive region of the polysilicon layer and a second conductive region of the polysilicon layer; forming an oxide layer on the polysilicon layer; forming a silicide layer on the oxide layer, wherein the silicide layer is a titanium silicide layer; and defining the titanium silicide layer, the oxide layer and the first conductive region of the polysilicon layer and the second conductive region of the polysilicon layer, so as to form a first gate and a second gate.
Claim 2
Dependent Claim
122 words
A manufacturing method for a polycide dual gate, wherein a substrate having a gate oxide layer and a polysilicon layer is provided, comprising the steps of: implanting first conductive type ions and second conductive type ions into the polysilicon layer to form a first conductive region of the polysilicon layer and a second conductive region of the polysilicon layer; forming an oxide layer on the polysilicon layer; forming a silicide layer on the oxide layer, wherein the silicide layer is a titanium silicide layer; and defining the titanium silicide layer, the oxide layer and the first conductive region of the polysilicon layer and the second conductive region of the polysilicon layer, so as to form a first gate and a second gate.
Claim 3
Dependent Claim
14 words
The method of claim 1 wherein the first conductive type ions include N-type ions.
Claim 4
Dependent Claim
15 words
The method of claim 1 , wherein the second conductive type ions include P-type ions.
Claim 5
Dependent Claim
15 words
The method of claim 2 , wherein the N-type ions include arsenic and phosphorus ions.
Claim 6
Dependent Claim
13 words
The method of claim 3 , wherein the P-type ions include boron ions.
Claim 7
Dependent Claim
15 words
The method of claim 2 , wherein the first conductive type ions include P-type ions.
Claim 8
Dependent Claim
15 words
The method of claim 3 , wherein the second conductive type ions include N-type ions.
Claim 9
Dependent Claim
20 words
The method of claim 1 , wherein the step of forming the oxide layer includes using a chemical oxidation process.
Claim 10
Dependent Claim
16 words
The method of claim 1 , wherein the silicide layer further includes a cobalt silicide layer.
Claim 11
Dependent Claim
210 words
A manufacturing method for polycide dual gate, comprising the steps of: providing a substrate; forming a gate oxide layer on the substrate; forming a polysilicon layer on the gate oxide layer; performing a first ion implantation step for implanting a first conductive type ions and a second conductive type ions into the polysilicon layer, so as to form a first conductive region of the polysilicon layer and a second conductive region of the polysilicon layer; forming an oxide layer by using a chemical oxidation process on the polysilicon layer; forming a silicide layer on the oxide layer, wherein the silicide layer is a titanium silicide layer; defining the titanium silicide layer, the oxide layer and the first conductive region of the polysilicon layer and the second conductive region of the polysilicon layer, so as to form a first gate and a second gate; performing a second ion implantation step with the gates serving as masks, so as to form a lightly doped source/drain region beside the gate in the substrate; forming a spacer on the sidewall of the gate; and performing a third ion implantation step with the spacer and the gates serving as masks, so as to form a heavily doped source/drain region beside the gate in the substrate.
Claim 12
Dependent Claim
210 words
A manufacturing method for polycide dual gate, comprising the steps of: providing a substrate; forming a gate oxide layer on the substrate; forming a polysilicon layer on the gate oxide layer; performing a first ion implantation step for implanting a first conductive type ions and a second conductive type ions into the polysilicon layer, so as to form a first conductive region of the polysilicon layer and a second conductive region of the polysilicon layer; forming an oxide layer by using a chemical oxidation process on the polysilicon layer; forming a silicide layer on the oxide layer, wherein the silicide layer is a titanium silicide layer; defining the titanium silicide layer, the oxide layer and the first conductive region of the polysilicon layer and the second conductive region of the polysilicon layer, so as to form a first gate and a second gate; performing a second ion implantation step with the gates serving as masks, so as to form a lightly doped source/drain region beside the gate in the substrate; forming a spacer on the sidewall of the gate; and performing a third ion implantation step with the spacer and the gates serving as masks, so as to form a heavily doped source/drain region beside the gate in the substrate.
Claim 13
Dependent Claim
16 words
The method of claim 10 , wherein the silicide layer further includes a cobalt silicide layer.
Claim 14
Dependent Claim
20 words
The method of claim 10 , wherein the step of forming the lightly doped source/drain region includes using ion implantation.
Claim 15
Dependent Claim
19 words
The method of claim 10 wherein the step of forming the heavily doped source/drain region includes using ion implantation.
Claim 16
Dependent Claim
16 words
The method of claim 8 , wherein the chemical oxidation process includes chemical vapor deposition (CVD).
Claim 17
Dependent Claim
14 words
The method of claim 8 , wherein the chemical oxidation process includes thermal oxidation.
Claim 18
Dependent Claim
13 words
The method of claim 10 , wherein the chemical oxidation process includes CVD.
Claim 19
Dependent Claim
14 words
The method of claim 10 , wherein the chemical oxidation process includes thermal oxidation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-03-05 | 2004-09-04 | 2005-03-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-03-05 | 2008-09-04 | 2009-03-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-03-05 | 2012-09-04 | 2013-03-06 | $7700.00 | Window Closed / Lapsed |