US6190508B1
Expired / Lapsed
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Method of oxidizing nitride material enhanced by illumination with UV light at room temperature
Assignee: Industrial Technology Research Institute
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Filing: 1999-04-07
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Granted: 2001-02-20
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Expires: 2019-04-07
Abstract
Abstract A method of forming oxide from nitride, in which the oxidation is enhanced by illuminating the nitride material with UV light. This method produces a rapid growth of oxide and allows for the monitoring of the oxide thickness in situ. The method comprises the steps of (i) placing the nitride material on an illuminating holder; (ii) dipping the nitride material and the illuminating holder in an electrolyte; and (iii) illuminating the nitride material with a light having an energy larger than the energy gap of the nitride material. The nitride material can be connected to a conductive electrode located in the electrolyte via a galvanometer to monitor a photo current generated by the oxidation of the nitride material so as to monitor the thickness of the oxide formed on the nitride material in situ. A metal coating can be coated on the nitride material to define the oxide forming region. The pH value of the electrolyte is in a range of approximately 3 to 10, and is preferably about 3.5.
Inventors
- 👤 Lung-Han Peng
- 👤 Yi-Chien Hsu
- 👤 Chin-Yuan Chen
- 👤 Jin-Kuo Ho
- 👤 Chao-Nien Huang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 17:40
CPC Classifications
C; C01; C01G; C01G1/00; C01G1/02; C01B; C01B13/00; C01B13/14; C01B13/32; C01B13/322; C01B13/324; C01P; C01P2002/00; C01P2002/70; C01P2002/72
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
66 words
A method of oxidizing a nitride material at room temperature comprising the steps of: (i) placing the nitride material on an illuminating holder; (ii) dipping the nitride material and the illuminating holder in an electrolyte having a pH value approximately ranged from 3 to 10; and (iii) illuminating the nitride material with a light having an energy larger than the energy gap of the nitride material.
Claim 2
Independent Claim
66 words
A method of oxidizing a nitride material at room temperature comprising the steps of: (i) placing the nitride material on an illuminating holder; (ii) dipping the nitride material and the illuminating holder in an electrolyte having a pH value approximately ranged from 3 to 10; and (iii) illuminating the nitride material with a light having an energy larger than the energy gap of the nitride material.
Claim 3
Dependent Claim
36 words
A method of oxidizing a nitride material as claimed in claim 1 further comprising a step of coating a metal coating on the nitride material to define a region of forming oxide prior to step (i).
Claim 4
Dependent Claim
63 words
A method of oxidizing a nitride material as claimed in claim 1 further comprising a step of connecting the nitride material to a conductive electrode located in the electrolyte via a galvanometer after step (iii) to monitor a photo current generated by oxidation of the nitride material so as to monitor a thickness of the oxide formed on the nitride material in situ.
Claim 5
Dependent Claim
19 words
A method of oxidizing a nitride material as claimed in claim 1 wherein the nitride material is gallium nitride.
Claim 6
Dependent Claim
22 words
A method of oxidizing a nitride material as claimed in claim 1 wherein the light illuminating the nitride material is UV light.
Claim 7
Dependent Claim
43 words
A method of oxidizing a nitride material as claimed in claim 2 wherein the metal coating is dual-layer including an inner layer and an outer layer, in which a work function of the outer layer is larger than that of the inner layer.
Claim 8
Dependent Claim
34 words
A method of oxidizing a nitride material as claimed in claim 1 wherein the electrolyte is one of KOH, H 2 O 2 , H 2 SO 4 or H 3 PO 4 .
Claim 9
Dependent Claim
19 words
A method of oxidizing a nitride material as claimed in claim 1 wherein the pH value is around 3.5.
Claim 10
Dependent Claim
59 words
A method of oxidizing a nitride material as claimed in claim 5 wherein the light source is one of a 308-nm XeCl excimer laser, a 248-nm KrF excimer laser, a 193-nm ArF excimer laser, a 157-nm F 2 excimer laser, a N 2 molecular laser, He—Cd molecular laser, a quarter-wavelength YAG laser, a deuterium lamp or a xenon lamp.
Claim 11
Dependent Claim
36 words
A method of oxidizing a nitride material as claimed in claim 6 wherein the outer layer of the dual-layer metal coating is one of Re, Pt, Ru, Rh, Pd, Au, Ir, Ni or a composition thereof.
Claim 12
Dependent Claim
35 words
A method of oxidizing a nitride material as claimed in claim 6 wherein the inner layer of dual-layer metal coating is one of Ti, V, Cr, Zr, Mo, Hf, Ta, W or a composition thereof.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-02-20 | 2004-08-21 | 2005-02-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-02-20 | 2008-08-21 | 2009-02-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-02-20 | 2012-08-21 | 2013-02-20 | $7700.00 | Window Closed / Lapsed |