US6184490B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Material irradiation apparatus with a beam source that produces a processing beam for a workpiece, and a process for operation thereof
Assignee: Carl Zeiss AG
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Filing: 1997-04-09
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Granted: 2001-02-06
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Expires: 2017-04-09
Abstract
Abstract A material irradiation apparatus with a beam source produces a processing beam. The apparatus has a beam splitting device following the beam source, by which the processing beam is divided into several partial beams. Each partial beam can be deflected by a deflecting device discretely associated with it to different places on at least one workpiece to be processed, independently of the other partial beams. The workpiece to be processed is situated on a workpiece movement device that is movable in at least one axis. The machining beam is successively incident on a plurality of beam splitter devices that are movably arranged in the axis of the machining beam that is incident on them. The partial beams emerging from the beam splitter devices are simultaneously incident on the workpiece movement device. The workpiece movement device is arranged to be movable in at least one coordinate direction that deviates from the movement axis of the beam splitter devices. In a process for the operation of the material irradiation apparatus, the deflecting devices of the partial beams can deflect at least two, preferably at least four, partial beams simultaneously to at least one point on the surface of the workpiece.
Inventors
- 👤 Jürgen Schweizer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 18:10
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/064; B23K26/067; B23K26/0673; G; G02; G02B; G02B27/00; G02B27/10; G02B27/106; G02B27/108; G02B27/14; G02B27/145; H; H05; H05K; H05K3/00; H05K3/0011; H05K3/0017
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
327 words
A material irradiation apparatus comprising: a beam source ( 1 , 21 , 31 ) for producing a machining beam ( 2 , 22 , 32 , 42 , 52 ), a beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A)positioned following said beam source ( 1 , 21 , 31 ) for dividing said machining beam ( 2 , 32 , 42 , 52 ) into a plurality of partial beams ( 12 A, 12 B, 12 C, 12 D), a plurality of deflecting devices ( 11 A, 11 B, 11 C, 11 D) each associated with a different one of said partial beams ( 12 A, 12 B, 12 C, 12 D) for deflecting said partial beams individually to different places on at least one workpiece to be machined ( 13 A, 13 B, 13 C, 13 D, 213 A, 313 A), independently of other said partial beams ( 12 A, 12 B, 12 C, 12 D), and at least one workpiece movement device ( 14 A, 14 B, 14 C, 14 D, 214 A, 314 A) for supporting said at least one workpiece ( 13 A, 13 B, 13 C, 13 D), said beam splitter is movably arranged on an axis of said machining beam ( 2 , 22 , 32 , 42 , 52 ) incident on said beam splitter, said partial beams ( 12 A, 12 B, 12 C, 12 D) emerging from each said beam splitter ( 10 A, 10 B, 10 C, 310 A) are simultaneously incident on a surface of said at least one workpiece ( 13 A, 13 B, 13 C, 13 D), and said at least one workpiece movement device ( 14 A, 14 B, 14 C, 14 D, 214 A, 314 A) is arranged to be movable in at least one coordinate direction that deviates from a movement axis of said beam splitter ( 10 A, 10 B, 10 C, 10 D).
Claim 2
Dependent Claim
327 words
A material irradiation apparatus comprising: a beam source ( 1 , 21 , 31 ) for producing a machining beam ( 2 , 22 , 32 , 42 , 52 ), a beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A)positioned following said beam source ( 1 , 21 , 31 ) for dividing said machining beam ( 2 , 32 , 42 , 52 ) into a plurality of partial beams ( 12 A, 12 B, 12 C, 12 D), a plurality of deflecting devices ( 11 A, 11 B, 11 C, 11 D) each associated with a different one of said partial beams ( 12 A, 12 B, 12 C, 12 D) for deflecting said partial beams individually to different places on at least one workpiece to be machined ( 13 A, 13 B, 13 C, 13 D, 213 A, 313 A), independently of other said partial beams ( 12 A, 12 B, 12 C, 12 D), and at least one workpiece movement device ( 14 A, 14 B, 14 C, 14 D, 214 A, 314 A) for supporting said at least one workpiece ( 13 A, 13 B, 13 C, 13 D), said beam splitter is movably arranged on an axis of said machining beam ( 2 , 22 , 32 , 42 , 52 ) incident on said beam splitter, said partial beams ( 12 A, 12 B, 12 C, 12 D) emerging from each said beam splitter ( 10 A, 10 B, 10 C, 310 A) are simultaneously incident on a surface of said at least one workpiece ( 13 A, 13 B, 13 C, 13 D), and said at least one workpiece movement device ( 14 A, 14 B, 14 C, 14 D, 214 A, 314 A) is arranged to be movable in at least one coordinate direction that deviates from a movement axis of said beam splitter ( 10 A, 10 B, 10 C, 10 D).
Claim 3
Dependent Claim
58 words
The material irradiation device according to claim 1 , further comprising an optical device ( 23 , 39 , 41 A, 41 B, 41 C, 41 D) discretely associated with each said partial beam ( 12 A, 12 B, 12 C, 12 D) for focusing each said partial beam ( 12 A, 12 B, 12 C, 12 d).
Claim 4
Dependent Claim
31 words
The material irradiation apparatus according to claim 2 , wherein each said partial beam ( 12 A, 12 B, 12 c , 12 D) is discretely focused following each beam division.
Claim 5
Dependent Claim
60 words
The material irradiation apparatus according to claim 2 , wherein said optical device ( 20 ′, 23 , 39 , 41 A, 41 B, 41 C, 41 D) associated with each said partial beam ( 12 A, 12 B, 12 C, 12 D) is movably coupled to a respective beam splitter ( 10 A, 10 B, 10 C, 310 A).
Claim 6
Dependent Claim
19 words
The material irradiation apparatus according to claim 4 , wherein said optical device ( 39 ) comprises an objective.
Claim 7
Dependent Claim
54 words
The material irradiation apparatus according to claim 5 , wherein said objective ( 39 ) is arranged to change a focus diameter of each said partial beam ( 12 A, 12 B, 12 C, 12 D) on said least one workpiece ( 13 A, 13 B, 13 C, 13 D, 213 A, 313 A).
Claim 8
Dependent Claim
19 words
The material irradiation apparatus according to claim 5 , wherein said objective ( 39 ) comprises a zoom objective.
Claim 9
Dependent Claim
70 words
The material irradiation apparatus according to claim 1 , further comprising a control ( 16 ) for controlling movement of at least one of said workpiece movement devices ( 14 A, 14 B, 14 C, 14 D, 214 A, 314 A), said beam splitter ( 10 A, 10 B, 10 C, 310 A), said beam deflecting device, and power of said beam source ( 1 , 21 , 31 ).
Claim 10
Dependent Claim
40 words
The material irradiation apparatus according to claim 8 , wherein said control ( 16 ) is arranged for movement of said opnical device ( 23 , 39 , 20 ′, 20 ; 41 A, 41 B, 41 C, 41 D).
Claim 11
Dependent Claim
41 words
The material irradiation apparatus according to claim 8 , wherein said control ( 16 ) is arranged for internal control of said optical device ( 18 , 39 , 20 ′, 20 ; 41 A, 41 B, 41 C, 41 D).
Claim 12
Dependent Claim
31 words
The material irradiation apparatus according to claim 1 , wherein a plurality of said beam splitters ( 10 A, 10 B, 10 C, 310 A) are arranged on one beam axis.
Claim 13
Dependent Claim
57 words
The material irradiation apparatus according to claim 11 wherein an axis of movement of each said beam splitter ( 10 A, 10 B, 10 C, 310 A) is perpendicular to a main axis of movement of each said at least one workpiece movement device ( 14 A, 14 B, 14 C, 14 D, 14 A, 314 A).
Claim 14
Dependent Claim
28 words
The material irradiation apparatus according to claim 1 , wherein said beam source ( 1 , 21 , 31 ) comprises a laser for producing a laser beam.
Claim 15
Dependent Claim
60 words
The material irradiation apparatus according to claim 1 , wherein each said partial beam ( 12 A, 12 B, 12 C, 12 D) has an optical axis that deviates from an optical axis ( 3 , 33 , 42 , 42 ′, 52 , 52 ′) incident on said beam splitter ( 10 A, 10 B, 10 C, 310 A).
Claim 16
Dependent Claim
45 words
The material irradiation apparatus according to claim 1 , wherein said beam splitter ( 10 A, 10 B, 10 C, 310 A) comprises at least one partially transparent beam splitter ( 11 A, 11 B, 11 C, 211 A, 311 A, 411 A, 511 A).
Claim 17
Dependent Claim
60 words
The material irradiation apparatus according to claim 1 further comprising beam cross-section adjusting optics ( 4 , 5 ; 6 , 7 ; 18 ; 24 , 25 ; 34 , 35 ) arranged following said beam source ( 1 , 21 , 31 ) and before each said beam splitter ( 10 A, 10 B, 10 C, 310 A).
Claim 18
Dependent Claim
47 words
The material irradiation apparatus according to claim 16 , further comprising a divergence filter ( 8 , 9 , 28 , 38 ) arranged in said beam cross-section adjusting optics ( 4 , 5 ; 6 , 7 ; 24 , 25 ; 34 , 35 ).
Claim 19
Dependent Claim
30 words
The material irradiation apparatus according to claim 17 , further comprising a control ( 16 ) for controlling said divergence falter ( 8 , 9 , 28 , 38 ).
Claim 20
Dependent Claim
37 words
The material irradiation apparatus according to claim 1 further comprising a beam stopping-down device ( 36 , 41 B, 41 D) arranged in or following said beam splitter ( 10 A, 10 B, 10 C, 310 A).
Claim 21
Dependent Claim
32 words
The material irradiation apparatus according to claim 1 wherein said at least one workpiece ( 13 A, 13 B, 13 C, 13 D, 213 A, 313 A) comprises a printed circuit board.
Claim 22
Dependent Claim
29 words
The material irradiation apparatus according to claim 1 , wherein said beam source ( 1 , 21 , 31 , 60 ) comprises a pulsed or continuous wave laser.
Claim 23
Dependent Claim
20 words
The material irradiation apparatus according to claim 21 , wherein said laser has a wavelength between 190 and 3,000 μm.
Claim 24
Dependent Claim
26 words
The material irradiation apparatus according to claim 21 , wherein said beam source ( 1 , 21 , 31 , 60 ) comprises an excimer laser.
Claim 25
Dependent Claim
31 words
The material irradiation apparatus according to claim 21 , wherein said radiation source ( 1 , 21 , 31 , 50 ) comprises a frequency tripled or frequency quadrupled neodymium-YAG laser.
Claim 26
Dependent Claim
50 words
The material irradiation apparatus according to claim 1 , wherein said radiation source ( 1 , 21 , 31 , 60 ) comprises a CO 2 laser and optical components of said material irradiation source are comprised of materials that are suitable for a wavelength of said CO 2 laser.
Claim 27
Dependent Claim
51 words
The material irradiation apparatus according to claim wherein the diameter of said machining beam before said beam splitter ( 10 A, 10 B, 10 C, 310 A) is equal to the diameter of a partial beam following said beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A).
Claim 28
Dependent Claim
44 words
The material irradiation apparatus according to claim 1 , wherein said machining beam ( 2 , 22 , 32 , 42 , 52 ) is successively incident on a plurality of beam splitters ( 10 A, 10 B, 10 C, 211 A, 311 A).
Claim 29
Dependent Claim
262 words
Process for operation of a material irradiation apparatus ( 56 ) having a beam source ( 60 ) that produces a machining beam ( 62 ), comprising: dividing said machining beam ( 62 . 1 ) into several partial beams ( 62 - 11 , 62 . 12 , 62 . 13 , 62 . 14 ) by a beam splitter ( 62 . x 0 , 57 ) positioned following said beam source ( 60 ), in one of two steps deflecting each partial beam ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) independently of each other partial beam by a deflecting device ( 62 . x 11 , 62 . x 12 , 62 . 13 , 62 . x 14 ) discretely associated with each partial beam, to different places on at least one workpiece to be machined ( 67 ), situated on a workpiece movement device ( 68 ) that is movable in at least one axis, and in the other of two steps deflecting at least two partial beams ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) by said deflecting devices simultaneously to at least one common point, wherein said at least one common point of all said partial beams ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) that are to be united is part of a working area ( 69 ) on said surface of said workpiece,( 67 ).
Claim 30
Dependent Claim
262 words
Process for operation of a material irradiation apparatus ( 56 ) having a beam source ( 60 ) that produces a machining beam ( 62 ), comprising: dividing said machining beam ( 62 . 1 ) into several partial beams ( 62 - 11 , 62 . 12 , 62 . 13 , 62 . 14 ) by a beam splitter ( 62 . x 0 , 57 ) positioned following said beam source ( 60 ), in one of two steps deflecting each partial beam ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) independently of each other partial beam by a deflecting device ( 62 . x 11 , 62 . x 12 , 62 . 13 , 62 . x 14 ) discretely associated with each partial beam, to different places on at least one workpiece to be machined ( 67 ), situated on a workpiece movement device ( 68 ) that is movable in at least one axis, and in the other of two steps deflecting at least two partial beams ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) by said deflecting devices simultaneously to at least one common point, wherein said at least one common point of all said partial beams ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) that are to be united is part of a working area ( 69 ) on said surface of said workpiece,( 67 ).
Claim 31
Dependent Claim
27 words
Process according to claim 28 , comprising deflecting at least four partial beams simultaneously to at least one point on surface of said workpiece ( 67 ).
Claim 32
Dependent Claim
57 words
Process according to claim 28 , wherein said at least one point on said surface of said workpiece ( 67 ) lies in a flat working region ( 69 ) of all said partial beams ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) that are to be united.
Claim 33
Dependent Claim
253 words
A material irradiation apparatus comprising: a beam source ( 1 , 21 , 31 ) for producing a machining beam ( 2 , 22 , 32 , 42 , 52 ), a beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A) positioned following said beam source ( 1 , 21 , 31 ) for dividing said machining beam ( 2 , 32 , 42 , 52 ) into a plurality of partial beams ( 12 A, 12 B, 12 C, 12 D), and a plurality of deflecting devices ( 11 A, 11 B, 11 C, 11 D) each associated with a different one of said partial beams for deflecting said partial beams individually to different places on at least one workpiece to be machined ( 13 A, 13 B, 13 C, 13 D, 213 A, 313 A), independently of other said partial beams, wherein the diameter of said machining beam before said beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A), is equal to the diameter of a partial beam following said beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A), said beam splitter is movably arranged on an axis of said machining beam ( 2 , 22 , 32 , 42 , 52 ) incident on said beam splitter, and said partial beams emerging from each said beam splitter ( 10 A, 10 B, 10 C, 310 A) are simultaneously incident on a surface of said at least one workpiece.
Claim 34
Dependent Claim
253 words
A material irradiation apparatus comprising: a beam source ( 1 , 21 , 31 ) for producing a machining beam ( 2 , 22 , 32 , 42 , 52 ), a beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A) positioned following said beam source ( 1 , 21 , 31 ) for dividing said machining beam ( 2 , 32 , 42 , 52 ) into a plurality of partial beams ( 12 A, 12 B, 12 C, 12 D), and a plurality of deflecting devices ( 11 A, 11 B, 11 C, 11 D) each associated with a different one of said partial beams for deflecting said partial beams individually to different places on at least one workpiece to be machined ( 13 A, 13 B, 13 C, 13 D, 213 A, 313 A), independently of other said partial beams, wherein the diameter of said machining beam before said beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A), is equal to the diameter of a partial beam following said beam splitter ( 10 A, 10 B, 10 C, 10 D, 310 A), said beam splitter is movably arranged on an axis of said machining beam ( 2 , 22 , 32 , 42 , 52 ) incident on said beam splitter, and said partial beams emerging from each said beam splitter ( 10 A, 10 B, 10 C, 310 A) are simultaneously incident on a surface of said at least one workpiece.
Claim 35
Dependent Claim
43 words
A material irradiation apparatus according to claim 31 , wherein said beam splitter is movable at least in a direction of said axis of said machining beam ( 2 , 22 , 32 , 42 , 52 ) incident on said beam splitter.
Claim 36
Dependent Claim
147 words
Process for operation of a material irradiation apparatus ( 56 ) having a beam source ( 60 ) that produces a machining beam ( 62 ), comprising: dividing said machining beam ( 62 . 1 ) into several partial beams ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) by a beam splitter ( 62 . x 0 , 57 ) positioned following said beam source ( 60 ), in one of two steps providing a deflecting device discretely associated with each of said partial beams for deflecting each partial beam independently of each other partial beam to different places on at least one workpiece to be machined, and in the other of two steps controlling said deflecting device so that at least two partial beams are simultaneously deflected to a common point on said surface of said workpiece.
Claim 37
Dependent Claim
147 words
Process for operation of a material irradiation apparatus ( 56 ) having a beam source ( 60 ) that produces a machining beam ( 62 ), comprising: dividing said machining beam ( 62 . 1 ) into several partial beams ( 62 . 11 , 62 . 12 , 62 . 13 , 62 . 14 ) by a beam splitter ( 62 . x 0 , 57 ) positioned following said beam source ( 60 ), in one of two steps providing a deflecting device discretely associated with each of said partial beams for deflecting each partial beam independently of each other partial beam to different places on at least one workpiece to be machined, and in the other of two steps controlling said deflecting device so that at least two partial beams are simultaneously deflected to a common point on said surface of said workpiece.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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