Patent US5469094A successfully refreshed from Google Patents.
US5290992A
Expired / Lapsed
US
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Apparatus for maximizing light beam utilization
Assignee: International Business Machines Corp
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Filing: 1992-10-07
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Granted: 1994-03-01
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Expires: 2012-10-07
Abstract
Abstract The present invention is an apparatus and method for maximizing light beam utilization in patterning applications by positioning a plurality of mask mirrors in the light beam path to form patterned light onto a plurality of work pieces. Each mask mirror is designed so that a portion of the light beam area needed for exposing a work piece to patterned light is reflected from the mask mirror, while the remainder is passed through the mask mirror to another mask mirror. Alternatively, each mask mirror can be designed so that a portion of the light beam area needed for exposing a work piece to patterned light is passed through the mask mirror, while the remainder is reflected to another mask mirror.
Inventors
- 👤 How T. Lin
- 👤 Mark V. Pierson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 02:48
CPC Classifications
B; B23; B23K; B23K26/00; B23K26/02; B23K26/06; B23K26/067; B23K26/0673; B23K26/064; B23K26/066; G; G03; G03F; G03F7/00; G03F7/20; G03F7/2002; G03F7/70; G03F7/70216; G03F7/70283; G03F7/70291; G03F7/708; G03F7/70991
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
104 words
An apparatus for exposing a plurality of work pieces to patterned light, comprising: a) a light source for generating a light beam; b) a plurality of mask mirrors, each mask mirror having at least one reflective region and at least one transparent region, each mask mirror is positioned so that a portion of said light beam is transmitted thereby and another portion of said light beam is reflected thereby, and c) a plurality of pattern defining masks, each pattern defining mask associated with a respective mask mirror, for receiving light from said associated mask mirror to form patterned light on a respective work piece.
Claim 2
Independent Claim
104 words
An apparatus for exposing a plurality of work pieces to patterned light, comprising: a) a light source for generating a light beam; b) a plurality of mask mirrors, each mask mirror having at least one reflective region and at least one transparent region, each mask mirror is positioned so that a portion of said light beam is transmitted thereby and another portion of said light beam is reflected thereby, and c) a plurality of pattern defining masks, each pattern defining mask associated with a respective mask mirror, for receiving light from said associated mask mirror to form patterned light on a respective work piece.
Claim 3
Independent Claim
146 words
An apparatus for exposing a plurality of work pieces to patterned light, comprising: a) a light source for generating a light beam; b) a plurality of mask mirrors, each mask mirror having one or more reflective regions located within a transparent region, said plurality of mask mirrors positioned so that the light beam impinging on the mask mirror is divided into a patterning portion that is reflected from said plurality of reflective regions and a transparent portion that passes through said transparent region toward the next mask mirror of the plurality of mask mirrors; and c) a plurality of pattern defining masks, each pattern defining mask associated with a respective mask mirror and positioned so that said patterning portion reflected from said reflective regions of said associated mask mirror impinges on said pattern defining mask so as to form patterned light onto a respective work piece.
Claim 4
Independent Claim
146 words
An apparatus for exposing a plurality of work pieces to patterned light, comprising: a) a light source for generating a light beam; b) a plurality of mask mirrors, each mask mirror having one or more reflective regions located within a transparent region, said plurality of mask mirrors positioned so that the light beam impinging on the mask mirror is divided into a patterning portion that is reflected from said plurality of reflective regions and a transparent portion that passes through said transparent region toward the next mask mirror of the plurality of mask mirrors; and c) a plurality of pattern defining masks, each pattern defining mask associated with a respective mask mirror and positioned so that said patterning portion reflected from said reflective regions of said associated mask mirror impinges on said pattern defining mask so as to form patterned light onto a respective work piece.
Claim 5
Dependent Claim
26 words
The apparatus as defined in claim 2, wherein the light source includes beam forming optics for forming a light beam with light from said light source.
Claim 6
Dependent Claim
14 words
The apparatus as defined in claim 2 wherein the light source is a laser.
Claim 7
Dependent Claim
27 words
The apparatus as defined in claim 4, wherein the light source includes a beam homogenizer for forming a homogenized light beam with light from said light source.
Claim 8
Dependent Claim
32 words
The apparatus as defined in claim 5, further comprising a plurality of miscellaneous optics, each associated with a respective pattern defining mask for forming a light pattern onto a respective work piece.
Claim 9
Dependent Claim
32 words
The apparatus as defined in claim 5, further comprising a plurality of miscellaneous optics, each associated with a respective pattern defining mask for focusing the patterned light onto a respective work piece.
Claim 10
Dependent Claim
32 words
The apparatus as defined in claim 5, further comprising a plurality of miscellaneous optics, each associated with a respective pattern defining mask for scaling the patterned light onto a respective work piece.
Claim 11
Dependent Claim
24 words
The apparatus as defined in claim 5 wherein the plurality of pattern defining masks form an identical light pattern onto each respective work piece.
Claim 12
Dependent Claim
25 words
The apparatus as defined in claim 5 wherein each pattern defining mask has programmable shutters for forming a light pattern onto each respective work piece.
Claim 13
Dependent Claim
28 words
The apparatus as defined in claim 5 wherein each pattern defining mask is attached to the work piece for forming a light pattern onto each respective work piece.
Claim 14
Independent Claim
144 words
An apparatus for exposing a plurality of work pieces to patterned light, comprising: a) a light source for generating a light beam; b) a plurality of mask mirrors, each mask mirror having one or more transparent regions located within a reflective region, said plurality of mask mirrors arranged so that a light beam impinging on the mask mirror is divided into a patterning portion that passes through said plurality of transparent regions and a reflected portion that is reflected from said reflective region toward the next mirror of the plurality; and c) a plurality of pattern defining masks, each pattern defining mask associated with a respective mask mirror and arranged so that said patterning portion of light passing through said transparent region of said associated mask mirror impinges on said pattern defining mask so as to form patterned light onto a respective work piece.
Claim 15
Independent Claim
144 words
An apparatus for exposing a plurality of work pieces to patterned light, comprising: a) a light source for generating a light beam; b) a plurality of mask mirrors, each mask mirror having one or more transparent regions located within a reflective region, said plurality of mask mirrors arranged so that a light beam impinging on the mask mirror is divided into a patterning portion that passes through said plurality of transparent regions and a reflected portion that is reflected from said reflective region toward the next mirror of the plurality; and c) a plurality of pattern defining masks, each pattern defining mask associated with a respective mask mirror and arranged so that said patterning portion of light passing through said transparent region of said associated mask mirror impinges on said pattern defining mask so as to form patterned light onto a respective work piece.
Claim 16
Dependent Claim
26 words
The apparatus as defined in claim 12, wherein the light source includes beam forming optics for forming a light beam with light from said light source.
Claim 17
Dependent Claim
14 words
The apparatus as defined in claim 12 wherein the light source is a laser.
Claim 18
Dependent Claim
27 words
The apparatus as defined in claim 14, wherein the light source includes a beam homogenizer for forming a homogenized light beam with light from said light source.
Claim 19
Dependent Claim
32 words
The apparatus as defined in claim 15, further comprising a plurality of miscellaneous optics, each associated with a respective pattern defining mask for forming a light pattern onto a respective work piece.
Claim 20
Dependent Claim
32 words
The apparatus as defined in claim 15, further comprising a plurality of miscellaneous optics, each associated with a respective pattern defining mask for focusing the patterned light onto a respective work piece.
Claim 21
Dependent Claim
32 words
The apparatus as defined in claim 15, further comprising a plurality of miscellaneous optics, each associated with a respective pattern defining mask for scaling the patterned light onto a respective work piece.
Claim 22
Dependent Claim
24 words
The apparatus as defined in claim 15 wherein the plurality of pattern defining masks form an identical light pattern onto each respective work piece.
Claim 23
Dependent Claim
25 words
The apparatus as defined in claim 15 wherein each pattern defining mask has programmable shutters for forming a light pattern onto each respective work piece.
Claim 24
Dependent Claim
28 words
The apparatus as defined in claim 15 wherein each pattern defining mask is attached to the work piece for forming a light pattern onto each respective work piece.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-28 | 1997-08-30 | 1998-03-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-28 | 2001-08-30 | 2002-03-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-28 | 2005-08-30 | 2006-03-01 | $7700.00 | Window Closed / Lapsed |