US6177296B1
Expired / Lapsed
US
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Method for forming vertical interconnect process for silicon segments with thermally conductive epoxy preform
Assignee: VERTICAL CIRCUITS SOLUTIONS Inc
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Filing: 1999-03-22
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Granted: 2001-01-23
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Expires: 2019-03-22
Abstract
Abstract A method for vertically interconnecting stacks of silicon segments. Each segment includes a plurality of adjacent die on a semiconductor wafer. The plurality of die on a segment are interconnected on the segment using one or more layers of metal interconnects which extend to all four sides of the segment to provide edge bonding pads for external electrical connection points. After the die are interconnected, each segment is cut from the backside of the wafer using a bevel cut to provide four inwardly sloping edge walls on each of the segments. After the segments are cut from the wafer, the segments are placed on top of one another to form a stack. Vertically adjacent segments in the stack are electrically interconnected by applying electrically conductive epoxy to one or more sides of the stack. The inwardly sloping edge walls of each of the segments in the stack provide a recess which allows the electrically conductive epoxy to access the edge bonding pads and lateral circuits on each of the segments once the segments are stacked. A thermally conductive epoxy preform is provided between the stack of segments so that the stack of segments are epoxied together. In one embodiment, the thermally conductive epoxy preform includes a plurality of glass spheres randomly distributed within the preform to maintain a distance between the stack of segments.
Inventors
- 👤 Alfons Vindasius
- 👤 Kenneth M. Sautter
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 22:22
CPC Classifications
H; H10; H10W; H10W90/00; H01; H01R; H01R29/00; H01R4/00; H01R4/04; H05; H05K; H05K3/00; H05K3/30; H05K3/303; H05K3/305; H05K3/32; H05K3/321; H05K7/00; H05K7/02; H05K7/023; H10D; H10D62/00; H10D62/10; H10D62/117; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4473; H10W20/482; H10W20/484; H10W20/49; H10W20/493; H10W40/00; H10W40/20; H10W40/25; H10W40/251; H10W70/00; H10W70/60; H10W70/611; H10W70/62; H10W70/641; H10W72/00; H10W72/20; H10W90/401; H05K2201/00; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09472; H05K2201/10; H05K2201/10431; H05K2201/10439; H05K2201/10477; H05K2201/10613; H05K2201/10621; H05K2201/10674; H05K2201/10719; H05K2201/10727; H10W46/00; H10W72/01; H10W72/071; H10W72/0711; H10W72/07178; H10W72/072; H10W72/07231; H10W72/07236; H10W72/073; H10W72/07331; H10W72/251; H10W72/30; H10W72/321; H10W72/325; H10W72/351; H10W72/353; H10W72/354; H10W72/834; H10W90/20; H10W90/22; H10W90/284; H10W90/701; H10W90/721; H10W90/722; H10W90/731; H10W90/732; H10W90/751; H10W90/754; Y; Y02; Y02P; Y02P70/00; Y02P70/50
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
147 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: vertically placing a stack of segments on top of one another, each of said segments including a plurality of edges, a plurality of die having circuitry therein, and electrically conductive contact points; interconnecting said plurality of die on each of said segments and connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; providing access to said electrically conductive contact points on each of said segments; electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 2
Independent Claim
147 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: vertically placing a stack of segments on top of one another, each of said segments including a plurality of edges, a plurality of die having circuitry therein, and electrically conductive contact points; interconnecting said plurality of die on each of said segments and connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; providing access to said electrically conductive contact points on each of said segments; electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 3
Dependent Claim
20 words
The method as in claim 1 including the step of randomly distributing a plurality of glass spheres within said preform.
Claim 4
Dependent Claim
28 words
The method as in claim 2 including the step of locating said electrically conductive contact points along one or more of said edges on each of said segments.
Claim 5
Dependent Claim
18 words
The method as in claim 3 including the step of providing on or more layers of metal traces.
Claim 6
Dependent Claim
24 words
The method as in claim 4 including the step of providing said layer of metal traces including a sandwich of chrome, titanium-tungsten, and gold.
Claim 7
Dependent Claim
23 words
The method as in claim 5 including the step of providing inwardly sloping edge walls along each of said edges of said segments.
Claim 8
Dependent Claim
14 words
The method as in claim 6 including the step of providing electrically conductive epoxy.
Claim 9
Dependent Claim
47 words
The method as in claim 7 including the step of providing each of said segments with control bond pads and wherein said segments are made unique with respect to one another by having a unique pattern formed onto said control bond pads on each of said segments.
Claim 10
Dependent Claim
56 words
The method as in claim 8 including the step of providing each of said segments with interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die.
Claim 11
Independent Claim
148 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of segments placed on top of one another, each of said segments having at least three edges defining each one of said segments; providing a plurality of die on each of said segments, each of said die including a plurality of first bond pads; providing a plurality of edge bond pads located on one or more of said edges of each of said segments for external electrical connections; connecting a layer of metal traces between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections and disposing a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 12
Independent Claim
148 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of segments placed on top of one another, each of said segments having at least three edges defining each one of said segments; providing a plurality of die on each of said segments, each of said die including a plurality of first bond pads; providing a plurality of edge bond pads located on one or more of said edges of each of said segments for external electrical connections; connecting a layer of metal traces between said plurality of first bond pads to interconnect said die, said metal traces further connected between said plurality of edge bond pads and said plurality of first bond pads to connect said die to said external connections and disposing a thermally conductive epoxy preform disposed between each of said segments for epoxying said segments together.
Claim 13
Dependent Claim
20 words
The method as in claim 10 including the step of randomly distributing a plurality of glass spheres within said preform.
Claim 14
Independent Claim
191 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of segments on top of one another, where each of said segments include at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; interconnecting said plurality of die on each of said segments and connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; providing access to said electrically conductive contact points on each of said segments; electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 15
Independent Claim
191 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of segments on top of one another, where each of said segments include at least three edges, a plurality of die having circuitry therein, and electrically conductive contact points; interconnecting said plurality of die on each of said segments and connecting one or more of said plurality of die to one or more of said electrically conductive contact points on each of said segments; providing access to said electrically conductive contact points on each of said segments; electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and providing a lateral electrical connection to said plurality of die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 16
Dependent Claim
20 words
The method as in claim 12 including the step of randomly distributing a plurality of glass spheres within said preform.
Claim 17
Independent Claim
186 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of segments on top of one another, where each of said segments include a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; interconnecting said die on each of said segments and connecting at least one of said die to at least one of said electrically conductive contact points on each of said segments; providing access to said electrically conductive contact points on each of said segments; and electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and providing a lateral electrical connection to said die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 18
Independent Claim
186 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of segments on top of one another, where each of said segments include a plurality of edges, at least one die having circuitry therein, and electrically conductive contact points; interconnecting said die on each of said segments and connecting at least one of said die to at least one of said electrically conductive contact points on each of said segments; providing access to said electrically conductive contact points on each of said segments; and electrically interconnecting said electrically conductive contact points on each of said segments in said stack, and providing a lateral electrical connection to said die located in each of said segments in said stack, wherein said segments include interconnected functioning die and non-functioning die, and wherein said non-functioning die are disconnected from said functioning die, and said metal traces on each of said segments are routed so that particular ones of said functioning die replace said non-functioning die and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 19
Independent Claim
118 words
A method for forming a stack of segments, comprising the steps of: providing a wafer having a plurality of die; creating a plurality of segments, each one of said plurality of segments formed by grouping a plurality of adjacent ones of said die on said wafer; interconnecting said plurality of adjacent die on said each one of said plurality of segments; separating said each one of said plurality of segments from said wafer; placing said plurality of segments on top of one another to create a stack of segments, said stack having external vertical sides; electrically interconnecting said stack of segments, and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 20
Independent Claim
118 words
A method for forming a stack of segments, comprising the steps of: providing a wafer having a plurality of die; creating a plurality of segments, each one of said plurality of segments formed by grouping a plurality of adjacent ones of said die on said wafer; interconnecting said plurality of adjacent die on said each one of said plurality of segments; separating said each one of said plurality of segments from said wafer; placing said plurality of segments on top of one another to create a stack of segments, said stack having external vertical sides; electrically interconnecting said stack of segments, and disposing a thermally conductive epoxy preform between each of said segments for epoxying said segments together.
Claim 21
Dependent Claim
20 words
The method as in claim 15 including the step of randomly distributing a plurality of glass spheres within said preform.
Claim 22
Dependent Claim
145 words
A method for forming a stack of segments as in claim 16 further including the steps of: providing internal electrically conductive contact points on each of said plurality of die; providing external electrically conductive contact points on said each one of said plurality of segments; providing a layer of metal traces on said each one of said plurality of segments, said metal traces extending between said internal electrically conductive contact points on said plurality of die and said external electrically conductive contact points on said each one of said plurality of segments; applying electrically conductive epoxy to more than one of said external vertical sides of said stack such that said electrically conductive epoxy is in contact with said external electrically conductive contact points on said each one of said segments in said stack, to thereby electrically interconnect said plurality of segments in said stack.
Claim 23
Dependent Claim
70 words
A method for forming a stack of segments as in claim 17 further including the steps of: providing control bond pads on each of said segments; providing control signals to said stack from an external source for access to said segments in said stack; and making said control signals for each of said segments unique by burning a unique pattern into said control bond pads on each of said segments.
Claim 24
Dependent Claim
83 words
A method for forming a stack of segments as in claim 18 wherein said stack includes a top segment, said method further comprising the steps of: providing a signal carrying substrate having circuitry and a hole therein; affixing said stack of segments in said hole; and electrically connecting said stack of segments to said signal carrying substrate by applying traces of electrically conductive epoxy between said signal carrying substrate and said external electrically conductive contact points on said top segment of said stack.
Claim 25
Dependent Claim
26 words
A method for forming a stack of segments as in claim 19 wherein said top segment is coplaner with the surface of said signal carrying substrate.
Claim 26
Dependent Claim
30 words
A method for forming a stack of segments as in claim 20 wherein said traces of electrically conductive epoxy lie in substantially the same plane as said signal carrying substrate.
Claim 27
Independent Claim
81 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of die on top of one another wherein each of said die include one or more edges and electrically conductive contact points; electrically interconnecting at least one of said die to at least one of said electrically conductive contact points; and disposing a thermally conductive epoxy preform sheet between each of said die in said stack of die for epoxying said die together.
Claim 28
Independent Claim
81 words
A method of forming a stack of electrical circuitry, the method comprising the steps of: placing a stack of die on top of one another wherein each of said die include one or more edges and electrically conductive contact points; electrically interconnecting at least one of said die to at least one of said electrically conductive contact points; and disposing a thermally conductive epoxy preform sheet between each of said die in said stack of die for epoxying said die together.
Claim 29
Dependent Claim
21 words
The method as in claim 22 including the step of randomly distributing a plurality of glass spheres within said preform sheet.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-01-23 | 2004-07-24 | 2005-01-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-01-23 | 2008-07-24 | 2009-01-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-01-23 | 2012-07-24 | 2013-01-23 | $7700.00 | Window Closed / Lapsed |