US6174818B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of patterning narrow gate electrode
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1999-11-19
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Granted: 2001-01-16
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Expires: 2019-11-19
Abstract
Abstract A process is described for forming very narrow polysilicon gate lines for use as gate electrodes in FETs. The process uses a consumable hard mask of silicon oxynitride covered by a thin layer of silicon oxide during the etching of the polysilicon. The thicknesses of the two layers that make up the hard mask are chosen so that the structure also serves as an ARC for the photoresist coating immediately above it. A relatively thin layer of the latter is used in order to improve resolution. After the photoresist has been patterned it may be trimmed or it may be removed and re-formed, since the silicon oxide layer provides protection for the underlying silicon oxynitride. After the hard mask has been formed, all photoresist is removed and the polysilicon is etched. During etching there is simultaneous removal of the silicon oxide layer and part of the silicon oxynitride as well.
Inventors
- 👤 Hun-Jan Tao
- 👤 Huan-Just Lin
- 👤 Hung-Chang Hsieh
- 👤 Chu-Yun Fu
- 👤 Ying-Ying Wang
- 👤 Chia-Shiung Tsai
- 👤 Fang-Cheng Chen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:36
CPC Classifications
H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; H10P76/2041; H10P76/2043; H10P50/00; H10P50/71; H10P76/40; H10P76/405; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01326
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
128 words
A process for etching a narrow line in polysilicon, comprising: providing a layer of polysilicon on a substrate; depositing a layer of silicon oxynitride on said layer of polysilicon; depositing a layer of silicon oxide on the layer of silicon oxynitride; coating the layer of silicon oxide with a layer of photoresist; patterning the photoresist to form a narrow line; using said photoresist pattern as a mask, etching all unprotected silicon oxide and silicon oxynitride, thereby forming a hard mask; removing all photoresist; using the hard mask, fully etching all unprotected polysilicon in a manner whereby all silicon oxide in the hard mask is removed and some thickness of silicon oxynitride in the hard mask remains; removing any polymer residue present; and then removing all remaining silicon oxynitride.
Claim 2
Dependent Claim
128 words
A process for etching a narrow line in polysilicon, comprising: providing a layer of polysilicon on a substrate; depositing a layer of silicon oxynitride on said layer of polysilicon; depositing a layer of silicon oxide on the layer of silicon oxynitride; coating the layer of silicon oxide with a layer of photoresist; patterning the photoresist to form a narrow line; using said photoresist pattern as a mask, etching all unprotected silicon oxide and silicon oxynitride, thereby forming a hard mask; removing all photoresist; using the hard mask, fully etching all unprotected polysilicon in a manner whereby all silicon oxide in the hard mask is removed and some thickness of silicon oxynitride in the hard mask remains; removing any polymer residue present; and then removing all remaining silicon oxynitride.
Claim 3
Dependent Claim
23 words
The process of claim 1 further comprising: after patterning the photoresist and before removing all photoresist, trimming the photoresist thereby reducing its width.
Claim 4
Dependent Claim
22 words
The process of claim 2 wherein trimming is achieved by using chlorine-oxygen or hydrogen bromide-oxygen to trim photoresist and reduce line width.
Claim 5
Dependent Claim
39 words
The process of claim 1 wherein the layer of silicon oxynitride is deposited to a thickness between about 250 and 350 Angstroms and the layer of silicon oxide is deposited to a thickness between about 100 and 200 Angstroms.
Claim 6
Dependent Claim
20 words
The process of claim 1 wherein the coating of photoresist is given a thickness between about 0.2 and 0.4 microns.
Claim 7
Dependent Claim
18 words
The process of claim 1 wherein the narrow line has a width between about 0.13 and 0.15 microns.
Claim 8
Dependent Claim
54 words
The process of claim 1 wherein the step of etching all unprotected polysilicon in a manner whereby all silicon oxide in the hard mask is removed and some thickness of silicon oxynitride remains is achieved by using a chlorine/hydrogen bromide/helium oxygen mixture in combination with a high density plasma source when etching the polysilicon.
Claim 9
Dependent Claim
26 words
The process of claim 1 wherein the step of removing any polymer residue present is achieved by using HF and a buffered oxide etch wet dip.
Claim 10
Dependent Claim
28 words
The process of claim 4 wherein the layer of silicon oxynitride remaining after the polysilicon has been fully etched has a thickness between about 150 and 200 Angstroms.
Claim 11
Dependent Claim
201 words
A process for forming a field effect transistor having a narrow gate, comprising: providing a silicon substrate; forming a layer of gate oxide on said silicon substrate; depositing a layer of polysilicon on the layer of gate oxide; depositing a layer of silicon oxynitride, having a thickness between about 300 and 350 Angstroms, on said layer of polysilicon; depositing a layer of silicon oxide, having a thickness between about 100 and 200 Angstroms, on the layer of silicon oxynitride; coating the layer of silicon oxide with a layer of photoresist; patterning the photoresist into a narrow gate shape, having a width between about 0.13 and 0.15 microns; using said photoresist pattern as a mask, etching all unprotected silicon oxide and silicon oxynitride, thereby forming a hard mask; removing all photoresist; using the hard mask, fully etching all unprotected polysilicon and gate oxide in a manner whereby all silicon oxide in the hard mask is removed and some thickness of silicon oxynitride in the hard mask remains, thereby forming the gate; removing any polymer residue present; then removing all remaining silicon oxynitride; and using the gate as a mask, ion implanting material into the silicon substrate to form source and drain regions.
Claim 12
Dependent Claim
201 words
A process for forming a field effect transistor having a narrow gate, comprising: providing a silicon substrate; forming a layer of gate oxide on said silicon substrate; depositing a layer of polysilicon on the layer of gate oxide; depositing a layer of silicon oxynitride, having a thickness between about 300 and 350 Angstroms, on said layer of polysilicon; depositing a layer of silicon oxide, having a thickness between about 100 and 200 Angstroms, on the layer of silicon oxynitride; coating the layer of silicon oxide with a layer of photoresist; patterning the photoresist into a narrow gate shape, having a width between about 0.13 and 0.15 microns; using said photoresist pattern as a mask, etching all unprotected silicon oxide and silicon oxynitride, thereby forming a hard mask; removing all photoresist; using the hard mask, fully etching all unprotected polysilicon and gate oxide in a manner whereby all silicon oxide in the hard mask is removed and some thickness of silicon oxynitride in the hard mask remains, thereby forming the gate; removing any polymer residue present; then removing all remaining silicon oxynitride; and using the gate as a mask, ion implanting material into the silicon substrate to form source and drain regions.
Claim 13
Dependent Claim
23 words
The process of claim 10 further comprising: after patterning the photoresist and before removing all photoresist, trimming the photoresist thereby reducing its width.
Claim 14
Dependent Claim
20 words
The process of claim 10 wherein the coating of photoresist is given a thickness between about 0.2 and 0.4 microns.
Claim 15
Dependent Claim
54 words
The process of claim 10 wherein the step of etching all unprotected polysilicon in a manner whereby all silicon oxide in the hard mask is removed and some thickness of silicon oxynitride remains is achieved by using a chlorine/hydrogen bromide/helium oxygen mixture in combination with a high density plasma source when etching the polysilicon.
Claim 16
Dependent Claim
26 words
The process of claim 10 wherein the step of removing any polymer residue present is achieved by using HF and a buffered oxide etch wet dip.
Claim 17
Dependent Claim
28 words
The process of claim 10 wherein the layer of silicon oxynitride remaining after the polysilicon has been fully etched has a thickness between about 150 and 200 Angstroms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2004-01-16 | 2004-07-17 | 2005-01-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-01-16 | 2008-07-17 | 2009-01-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-01-16 | 2012-07-17 | 2013-01-16 | $7700.00 | Window Closed / Lapsed |