US5674409A
Expired / Lapsed
US
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Nanolithographic method of forming fine lines
Assignee: International Business Machines Corp
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Filing: 1995-03-16
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Granted: 1997-10-07
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Expires: 2015-03-16
Abstract
Abstract A nanolithographic method for forming fine features is disclosed. A carrier layer, such as a photoresist, is deposited on a substrate. A relatively large pattern is imposed on the carrier layer by means of conventional photolithographic methods. The carrier layer is then exposed to a maskless etch, such as by ashing in oxygen, such that non-volatile materials within the carrier layer aggregate along the center line of the pattern, forming a residual pattern of significantly reduced width when compared to the original carrier layer pattern.
Inventors
- 👤 K. Paul Ludwig Muller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 05:51
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/40; H; H10; H10P; H10P76/00; H10P76/20; H10P76/204; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/947
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
75 words
A method of forming a residual pattern on a microelectronic substrate comprising the steps of: obtaining a carrier layer on the microelectronic substrate; patterning the carrier layer to form a carrier pattern centered on the location where the residual pattern is to be formed; and performing a maskless etch on the carrier pattern, whereby at least one non-volatile material within the carrier pattern aggregates at the center of the carrier pattern, forming the residual pattern.
Claim 2
Independent Claim
75 words
A method of forming a residual pattern on a microelectronic substrate comprising the steps of: obtaining a carrier layer on the microelectronic substrate; patterning the carrier layer to form a carrier pattern centered on the location where the residual pattern is to be formed; and performing a maskless etch on the carrier pattern, whereby at least one non-volatile material within the carrier pattern aggregates at the center of the carrier pattern, forming the residual pattern.
Claim 3
Dependent Claim
11 words
The method of claim 1 wherein the carrier layer comprises photoresist.
Claim 4
Dependent Claim
22 words
The method of claim 2 wherein the photoresist is selected from the group consisting of: deep-ultraviolet photoresist, mid-ultraviolet photoresist and g-line photoresist.
Claim 5
Dependent Claim
17 words
The method of claim 1 wherein the step of performing a maskless etch comprises oxygen plasma ashing.
Claim 6
Dependent Claim
47 words
The method of claim 4 wherein the oxygen plasma ashing step is performed with an oxygen pressure of approximately 200 mTorr to 3 Torr at a flow rate of approximately 500 to 5000 standard cubic centimeters/minute and a micro-wave power of approximately 500 watts to 2 kilowatts.
Claim 7
Dependent Claim
15 words
The method of claim 1 wherein the at least one non-volatile material is a metal.
Claim 8
Dependent Claim
23 words
The method of claim 6 wherein the metal is of the group consisting of: aluminum, tungsten, molybdenum, niobium, vanadium, tantalum and combinations thereof.
Claim 9
Dependent Claim
22 words
The method of claim 7 wherein a further step is performed, the further step comprising removing surface oxides from the residual pattern.
Claim 10
Dependent Claim
33 words
The method of claim 8 wherein the at least one non-volatile material is aluminum and the step of removing surface oxides from the residual pattern comprises dipping the microelectronic substrate in chromic-phosphoric acid.
Claim 11
Dependent Claim
33 words
The method of claim 8 wherein the at least one non-volatile material is tungsten and the step of removing surface oxides from the residual pattern comprises dipping the microelectronic substrate in hydrofluoric acid.
Claim 12
Independent Claim
92 words
A method of forming a residual pattern on a microelectronic substrate comprising the steps of: obtaining a layer of photoresist on the microelectronic substrate, the photoresist having a predetermined concentration of at least one non-volatile constituent; patterning the photoresist layer to form a resist pattern centered on the location where the residual pattern is to be formed; and performing a step of oxygen plasma ashing on the resist pattern whereby the at least one non-volatile constituent within the resist pattern aggregates at the center of the resist pattern, forming the residual pattern.
Claim 13
Independent Claim
92 words
A method of forming a residual pattern on a microelectronic substrate comprising the steps of: obtaining a layer of photoresist on the microelectronic substrate, the photoresist having a predetermined concentration of at least one non-volatile constituent; patterning the photoresist layer to form a resist pattern centered on the location where the residual pattern is to be formed; and performing a step of oxygen plasma ashing on the resist pattern whereby the at least one non-volatile constituent within the resist pattern aggregates at the center of the resist pattern, forming the residual pattern.
Claim 14
Dependent Claim
48 words
The method in claim 11 wherein the step of oxygen plasma ashing is performed with an oxygen pressure of approximately 200 mTorr to 3 Torr at a flow rate of approximately 500 to 5000 standard cubic centimeters/minute and a micro-wave power of approximately 500 watts to 1 kilowatt.
Claim 15
Independent Claim
103 words
A method of forming semiconductor circuit sub-components on a microelectronic substrate comprising the steps of: obtaining a sub-component layer on the microelectronic substrate; obtaining a carrier layer on the sub-component layer; patterning the carrier layer to form a carrier pattern centered on the location where a residual pattern is to be formed; performing a maskless etch on the carrier pattern, whereby at least one non-volatile material within the carrier pattern aggregates at the center of the carrier pattern, forming a residual pattern; patterning the sub-component layer using the residual pattern as a mask; and removing the residual pattern to form completed circuit sub-components.
Claim 16
Independent Claim
103 words
A method of forming semiconductor circuit sub-components on a microelectronic substrate comprising the steps of: obtaining a sub-component layer on the microelectronic substrate; obtaining a carrier layer on the sub-component layer; patterning the carrier layer to form a carrier pattern centered on the location where a residual pattern is to be formed; performing a maskless etch on the carrier pattern, whereby at least one non-volatile material within the carrier pattern aggregates at the center of the carrier pattern, forming a residual pattern; patterning the sub-component layer using the residual pattern as a mask; and removing the residual pattern to form completed circuit sub-components.
Claim 17
Dependent Claim
13 words
The method of claim 13 wherein the sub-component layer material comprises a conductor.
Claim 18
Dependent Claim
13 words
The method of claim 13 wherein the sub-component layer material comprises an insulator.
Claim 19
Dependent Claim
12 words
The method of claim 15 wherein the sub-component layer is silicon dioxide.
Claim 20
Dependent Claim
12 words
The method of claim 13 wherein the carrier layer is a photoresist.
Claim 21
Dependent Claim
17 words
The method of claim 13 wherein the step of performing a maskless etch comprises oxygen plasma ashing.
Claim 22
Dependent Claim
47 words
The method of claim 18 wherein the oxygen plasma ashing step is performed with an oxygen pressure of approximately 200 mTorr to 3 Torr at a flow rate of approximately 500 to 5000 standard cubic centimeters/minute and a micro-wave power of approximately 500 watts to 2 kilowatts.
Claim 23
Dependent Claim
14 words
The method of claim 13 wherein the second patterning step comprises anisotropic dry etching.
Claim 24
Dependent Claim
13 words
The method of claim 13 wherein the residual pattern is removed by etching.
Claim 25
Independent Claim
113 words
A method of forming semiconductor circuit sub-components on a microelectronic substrate comprising the steps of: obtaining a sub-component layer on the microelectronic substrate; obtaining a layer of photoresist on the sub-component layer; patterning the carrier layer to form a carrier pattern centered on the location where a residual pattern is to be formed; performing a step of oxygen plasma ashing on the resists pattern whereby at least one non-volatile material within the carrier pattern aggregates at the center of the carrier pattern, forming a residual pattern; patterning the sub-component layer by anisotropic dry etching using the residual pattern as a mask; and removing the residual pattern by etching to form completed circuit sub-components.
Claim 26
Independent Claim
113 words
A method of forming semiconductor circuit sub-components on a microelectronic substrate comprising the steps of: obtaining a sub-component layer on the microelectronic substrate; obtaining a layer of photoresist on the sub-component layer; patterning the carrier layer to form a carrier pattern centered on the location where a residual pattern is to be formed; performing a step of oxygen plasma ashing on the resists pattern whereby at least one non-volatile material within the carrier pattern aggregates at the center of the carrier pattern, forming a residual pattern; patterning the sub-component layer by anisotropic dry etching using the residual pattern as a mask; and removing the residual pattern by etching to form completed circuit sub-components.
Claim 27
Dependent Claim
48 words
The method of claim 22 wherein the step of oxygen plasma ashing is performed with an oxygen pressure of approximately 200 mTorr to 3 Torr at a flow rate of approximately 500 to 5000 standard cubic centimeters/minute and a micro-wave power of approximately 500 watts to 2 kilowatts.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2000-10-06 | 2001-04-07 | 2001-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-10-06 | 2005-04-07 | 2005-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-10-06 | 2009-04-07 | 2009-10-07 | $7700.00 | Window Closed / Lapsed |