US6150681A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Monolithic flow sensor and pressure sensor
Assignee: Silicon Microstructures Inc
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Filing: 1998-07-24
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Granted: 2000-11-21
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Expires: 2018-07-24
Abstract
Abstract A monolithic, integrated circuit sensor combining both a differential pressure sensor and a flow sensor on the same silicon chip. The integrated circuit has a diaphragm with a number of piezo-resistive elements placed on it in the normal manner for a pressure sensor. In addition, a channel is provided between the spaces on the two sides of the diaphragm. The channel has a cross-section which is a fraction of the size of the diaphragm. In one embodiment, the channel is a hole in the diaphragm. In another embodiment, the channel is an etched groove in the frame supporting the diaphragm.
Inventors
- 👤 Henry V. Allen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:40
CPC Classifications
G; G01; G01L; G01L19/00; G01L19/14; G01L19/148; G01F; G01F1/00; G01F1/05; G01F1/20; G01F1/28; G01F1/34; G01F1/36; G01F1/38; G01F1/383; G01L19/0007; G01L19/0038; G01L19/0092; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0055; G01L9/02; G01L9/06; G01L9/065
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
59 words
An integrated circuit sensor comprising: a diaphragm having first and second sides in contact with first and second spaces, respectively; a sensing element on said diaphragm; and a channel extending from said first space to a position providing gas flow to said second space, said channel having a cross-section which is a fraction of an area of said diaphragm.
Claim 2
Dependent Claim
59 words
An integrated circuit sensor comprising: a diaphragm having first and second sides in contact with first and second spaces, respectively; a sensing element on said diaphragm; and a channel extending from said first space to a position providing gas flow to said second space, said channel having a cross-section which is a fraction of an area of said diaphragm.
Claim 3
Dependent Claim
15 words
The integrated circuit of claim 1 wherein said channel comprises a hole in said diaphragm.
Claim 4
Dependent Claim
24 words
The integrated circuit of claim 1 further comprising: a frame supporting said diaphragm; and wherein said channel comprises a groove etched in said frame.
Claim 5
Dependent Claim
11 words
The integrated circuit of claim 3 wherein said groove is V-shaped.
Claim 6
Dependent Claim
15 words
The integrated circuit of claim 1 wherein said integrated circuit is formed from <100> silicon.
Claim 7
Dependent Claim
29 words
The integrated circuit of claim 1 further comprising a temperature compensation circuit of the type designed for pressure sensors, coupled to said sensing element, for compensation for flow measurements.
Claim 8
Dependent Claim
16 words
The integrated circuit of claim 1 wherein said sensing element is a plurality of piezoresistive elements.
Claim 9
Dependent Claim
14 words
The integrated circuit of claim 1 wherein said sensing element is a capacitive element.
Claim 10
Dependent Claim
101 words
An integrated circuit sensor comprising: a diaphragm having first and second sides in contact with first and second spaces, respectively; a plurality of piezoresistive elements on said diaphragm; a channel extending from said first space to a position providing gas flow to said second space, said channel having a cross-section which is a fraction of an area of said diaphragm; a frame supporting said diaphragm; and a temperature compensation circuit, coupled to said piezoresistive elements, for compensation for flow measurements; wherein said channel comprises a V-shaped groove etched in said frame; and wherein said integrated circuit is formed from <100> silicon.
Claim 11
Dependent Claim
101 words
An integrated circuit sensor comprising: a diaphragm having first and second sides in contact with first and second spaces, respectively; a plurality of piezoresistive elements on said diaphragm; a channel extending from said first space to a position providing gas flow to said second space, said channel having a cross-section which is a fraction of an area of said diaphragm; a frame supporting said diaphragm; and a temperature compensation circuit, coupled to said piezoresistive elements, for compensation for flow measurements; wherein said channel comprises a V-shaped groove etched in said frame; and wherein said integrated circuit is formed from <100> silicon.
Claim 12
Dependent Claim
30 words
The integrated circuit sensor of claim 9 wherein said diaphragm has multiple edges and said V-shaped groove extends along most of at least two of said edges of said diaphragm.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-11-21 | 2004-05-22 | 2004-11-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-11-21 | 2008-05-22 | 2008-11-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-11-21 | 2012-05-22 | 2012-11-21 | $7700.00 | Window Closed / Lapsed |