Abstract A barrier for preventing water or oxygen from a source thereof from reaching a device that is sensitive to water or oxygen. The barrier is constructed by depositing a first polymer layer between the device and the source. An inorganic layer is deposited on the first polymer layer of the device by plasma enhanced chemical vapor deposition utilizing an electron cyclotron resonance source ECR-PECVD. A second polymer layer is then deposited on the inorganic layer. The inorganic layer is preferably an oxide or nitride. A second barrier layer having a compound that absorbs oxygen or water can be placed between the inorganic layer and the device to further retard the passage of oxygen or water. The present invention is particularly useful in encapsulating electroluminescent displays.
A method for preventing water or oxygen from a source thereof reaching a device, said method comprising the steps of: depositing a first polymer layer between said device and said source; depositing an inorganic layer on said first polymer layer of said device by ECR-PECVD; and depositing a second polymer layer on said inorganic layer.
Claim 2
Independent Claim
55 words
A method for preventing water or oxygen from a source thereof reaching a device, said method comprising the steps of: depositing a first polymer layer between said device and said source; depositing an inorganic layer on said first polymer layer of said device by ECR-PECVD; and depositing a second polymer layer on said inorganic layer.
Claim 3
Dependent Claim
12 words
The method of claim 1 wherein said inorganic layer comprises an oxide.
Claim 4
Dependent Claim
16 words
The method of claim 2 wherein said oxide comprises an aluminum oxide or a silicon oxide.
Claim 5
Dependent Claim
12 words
The method of claim 1 wherein said inorganic layer comprises a nitride.
Claim 6
Dependent Claim
16 words
The method of claim 4 wherein said nitride comprises an aluminum nitride or a silicon nitride.
Claim 7
Dependent Claim
12 words
The method of claim 1 wherein said inorganic layer comprises an oxynitride.
Claim 8
Dependent Claim
16 words
The method of claim 6 wherein said oxynitride comprises an aluminum oxynitride or a silicon oxynitride.
Claim 9
Dependent Claim
27 words
The method of claim 1 further comprising the step of depositing a layer of material that absorbs oxygen or water between said inorganic layer and said device.
Claim 10
Dependent Claim
19 words
The method of claim 8 wherein said absorbing material comprises a metal uniformly dispersed in an oxide or nitride.
Claim 11
Dependent Claim
18 words
The method of claim 1 wherein said inorganic layer further comprises a material that absorbs oxygen or water.
Claim 12
Dependent Claim
12 words
The method of claim 10 wherein said absorption material comprises a metal.