Circuit member for semiconductor device, semiconductor device using the same, and method for manufacturing them

Claim 2

A circuit member for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, characterized in that at least a part of the conductive metal constituting the circuit section is provided by plating on at least one side of the conductive substrate after subjecting the one side of the conductive substrate to surface treatment to create irregularities and to release treatment to impart releasability.

Claim 3

The circuit member for a semiconductor device according to claim 1, characterized in that the circuit section comprises at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal for electrical connection to an external circuit and a plurality of sets of the lead and the external terminal section integrally connected to each other are provided independently of each other.

Claim 4

The circuit member for a semiconductor device according to claim 2, characterized in that the two-dimensionally formed circuit section in its entirety has been formed directly on one side of the conductive substrate by plating.

Claim 5

The circuit member for a semiconductor device according to claim 2, characterized in that only the die pad section and the external terminal section in the circuit section have been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist.

Claim 6

The circuit member for a semiconductor device according to claim 1, characterized in that the surface treatment is sand blasting.

Claim 7

The circuit member for a semiconductor device according to claim 1, characterized in that the release treatment is a treatment for forming an oxide film on the surface of the conductive substrate.

Claim 8

The circuit member for a semiconductor device according to claim 1, characterized in that a plurality of semiconductor devices can be mounted.

Claim 9

The circuit member for a semiconductor device according to claim 1, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating is either copper plating or copper plating using nickel as a substrate.

Claim 10

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (A) surface-treating at least one side of the conductive substrate to provide irregularities; (B) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (C) coating a resist on the conductive substrate on its one side subjected to the surface treatment and the release treatment and exposing only an area to be plated with a conductive metal to prepare a plate; and (D) plating the plate on its exposed area with a conductive metal.

Claim 11

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (A) surface-treating at least one side of the conductive substrate to provide irregularities; (B) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (C) coating a resist on the conductive substrate on its one side subjected to the surface treatment and the release treatment and exposing only an area to be plated with a conductive metal to prepare a plate; and (D) plating the plate on its exposed area with a conductive metal.

Claim 12

The process for producing a circuit member for a semiconductor device according to claim 9, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating is either copper plating or copper plating using nickel as a substrate.

Claim 13

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (G) surface-treating at least one side of the conductive substrate to provide irregularities; (H) subjecting the conductive substrate on its one side with irregularities provided thereon to release treatment for imparting releasability; (I) plating the conductive substrate on its whole surface subjected to the surface treatment and the release treatment with a conductive metal; (J) coating a resist on the surface of the plating and treating the coating so as to cover an area where a circuit section and the like are formed, thereby preparing a plate; and (K) performing etching so as to pass through the section plated with a conductive metal to form a circuit section and the like.

Claim 14

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (G) surface-treating at least one side of the conductive substrate to provide irregularities; (H) subjecting the conductive substrate on its one side with irregularities provided thereon to release treatment for imparting releasability; (I) plating the conductive substrate on its whole surface subjected to the surface treatment and the release treatment with a conductive metal; (J) coating a resist on the surface of the plating and treating the coating so as to cover an area where a circuit section and the like are formed, thereby preparing a plate; and (K) performing etching so as to pass through the section plated with a conductive metal to form a circuit section and the like.

Claim 15

The process for producing a circuit member for a semiconductor device according to claim 11, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating is copper plating.

Claim 16

The process for producing a circuit member for a semiconductor device according to claim 9, characterized in that the step of forming a jig hole for registration is carried out before the preparation of the plate.

Claim 17

The process for producing a circuit member for a semiconductor device according to claim 9, characterized in that the step of forming a jig hole is etching using a resist plate.

Claim 18

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the die pad section and the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (a) surface-treating one side of the conductive substrate to provide irregularities thereon; (b) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (c) coating a first insulating resist on the conductive substrate on its one side subjected to the surface treatment and the release treatment and exposing only a die pad section and external terminal section forming area by plating to prepare a plate; (d) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (e) coating a second insulating resist on the surface of the first plating and exposing only an area where a circuit section is to be prepared by plating; and (f) subjecting the plate on its exposed area to second plating with a conductive metal by electroplating or electroless plating.

Claim 19

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the die pad section and the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (a) surface-treating one side of the conductive substrate to provide irregularities thereon; (b) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (c) coating a first insulating resist on the conductive substrate on its one side subjected to the surface treatment and the release treatment and exposing only a die pad section and external terminal section forming area by plating to prepare a plate; (d) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (e) coating a second insulating resist on the surface of the first plating and exposing only an area where a circuit section is to be prepared by plating; and (f) subjecting the plate on its exposed area to second plating with a conductive metal by electroplating or electroless plating.

Claim 20

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the die pad section and the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (g) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (h) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (i) coating a first insulating resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only a die pad section and external terminal section forming area by plating to prepare a first plate; (j) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (k) subjecting the whole surface on the first plating side to second plating with a conductive metal by electroless plating; (l) covering the plating, prepared by electroless plating, in its area where a circuit section is formed, thereby preparing a second plate; and (m) removing the area, exposed in the step of preparing the plate, by etching.

Claim 21

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the die pad section and the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (g) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (h) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (i) coating a first insulating resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only a die pad section and external terminal section forming area by plating to prepare a first plate; (j) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (k) subjecting the whole surface on the first plating side to second plating with a conductive metal by electroless plating; (l) covering the plating, prepared by electroless plating, in its area where a circuit section is formed, thereby preparing a second plate; and (m) removing the area, exposed in the step of preparing the plate, by etching.

Claim 22

The process for producing a circuit member for a semiconductor device according to claim 15, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating in the step of the first plating is either copper plating or copper plating using nickel as a substrate and the conductive metal plating in the step of the second plating is copper plating.

Claim 23

The process for producing a circuit member for a semiconductor device according to claim 9, characterized in that the surface treatment is sand blasting.

Claim 24

The process for producing a circuit member for a semiconductor device according to claim 9, characterized in that the release treatment is a treatment for forming an oxide film on the surface of the conductive substrate.

Claim 25

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the whole circuit section having been formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (i) mounting a semiconductor element, with the terminal facing upward, on a die pad provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (ii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (iii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 26

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the whole circuit section having been formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (i) mounting a semiconductor element, with the terminal facing upward, on a die pad provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (ii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (iii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 27

The process for producing a semiconductor device according to claim 20, characterized by further comprising, after the step of removing the substrate, (iv) the step of coating a solder resist on the surface, exposed by removing the substrate, of the circuit section remote from the surface, with the semiconductor element mounted thereon, so as to expose only the external terminal section of the circuit section and (v) the step of attaching a solder ball to the external terminal section exposed from the solder resist.

Claim 28

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the die pad section and the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (vi) mounting a semiconductor element, with the terminal facing upward, on a die pad provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (vii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (viii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 29

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a die pad section for mounting a semiconductor element thereon, a lead for electrical connection to a semiconductor element, and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the die pad section and the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (vi) mounting a semiconductor element, with the terminal facing upward, on a die pad provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (vii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (viii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 30

The process for producing a semiconductor device according to claim 22, characterized by further comprising, after the step of removing the substrate, (ix) the step of attaching a solder ball to the exposed external terminal section.

Claim 31

A semiconductor device characterized by being produced by the process for producing a semiconductor device according to claim 20.

Claim 32

A circuit member for a semiconductor device, characterized by comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, at least a part of the conductive metal constituting the circuit section and the like being provided by plating on at least one side of the conductive substrate after subjecting the one side of the conductive substrate to surface treatment to create irregularities and to release treatment to impart releasability.

Claim 33

A circuit member for a semiconductor device, characterized by comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, at least a part of the conductive metal constituting the circuit section and the like being provided by plating on at least one side of the conductive substrate after subjecting the one side of the conductive substrate to surface treatment to create irregularities and to release treatment to impart releasability.

Claim 34

A circuit member for a semiconductor device according to claim 25, characterized in that the two-dimensionally formed circuit section in its entirety has been formed directly on one side of the conductive substrate by plating.

Claim 35

The circuit member for a semiconductor device according to claim 25, characterized in that only the external terminal section in the circuit section has been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist.

Claim 36

The circuit member for a semiconductor device according to claim 25, characterized in that the surface treatment is sand blasting.

Claim 37

The circuit member for a semiconductor device according to claim 25, characterized in that the release treatment is a treatment for forming an oxide film on the surface of the conductive substrate.

Claim 38

The circuit member for a semiconductor device according to claim 25, characterized in that a plurality of semiconductor elements can be mounted.

Claim 39

The circuit member for a semiconductor device according to claim 25, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating is either copper plating or copper plating using nickel as a substrate.

Claim 40

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, the circuit section having no die pad section for mounting a semiconductor element thereon, said process being characterized by comprising, in sequence, at least the steps of: (A) surface-treating at least one side of the conductive substrate to provide irregularities; (B) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (C) coating a resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only an area to be plated with a conductive metal to prepare a plate; and (D) plating the plate on its exposed area with a conductive metal.

Claim 41

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, the circuit section having no die pad section for mounting a semiconductor element thereon, said process being characterized by comprising, in sequence, at least the steps of: (A) surface-treating at least one side of the conductive substrate to provide irregularities; (B) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (C) coating a resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only an area to be plated with a conductive metal to prepare a plate; and (D) plating the plate on its exposed area with a conductive metal.

Claim 42

The process for producing a circuit member for a semiconductor device according to claim 32, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating is either copper plating or copper plating using nickel as a substrate.

Claim 43

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, the circuit section having no die pad section for mounting a semiconductor element thereon, said process being characterized by comprising, in sequence, at least the steps of: (G) surface-treating at least one side of the conductive substrate to provide irregularities; (H) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (I) plating the conductive substrate on its whole surface subjected to the surface treatment and the release treatment with a conductive metal; (J) coating a resist on the surface of the plating and treating the coating so as to cover only an area where a circuit section and the like are formed, thereby preparing a plate; and (K) performing etching so as to pass through the section plated with a conductive metal to form a circuit section and the like.

Claim 44

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section in its entirety two-dimensionally formed directly on one side of the conductive substrate by plating, the circuit section having no die pad section for mounting a semiconductor element thereon, said process being characterized by comprising, in sequence, at least the steps of: (G) surface-treating at least one side of the conductive substrate to provide irregularities; (H) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (I) plating the conductive substrate on its whole surface subjected to the surface treatment and the release treatment with a conductive metal; (J) coating a resist on the surface of the plating and treating the coating so as to cover only an area where a circuit section and the like are formed, thereby preparing a plate; and (K) performing etching so as to pass through the section plated with a conductive metal to form a circuit section and the like.

Claim 45

The process for producing a circuit member for a semiconductor device according to claim 34, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating is copper plating.

Claim 46

The process for producing a circuit member for a semiconductor device according to claim 32, characterized in that the step of forming a jig hole for registration is carried out before the preparation of the plate.

Claim 47

The process for producing a circuit member for a semiconductor device according to claim 32, characterized in that the step of forming a jig hole is etching using a resist plate.

Claim 48

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (a) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (b) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (c) coating a first insulating resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only an external terminal section forming area to prepare a plate; (d) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (e) coating a second insulating resist on the surface of the first plating and exposing only an area where a circuit section is prepared by plating; and (f) subjecting the plate on its exposed area to second plating with a conductive metal by electroplating or electroless plating.

Claim 49

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (a) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (b) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (c) coating a first insulating resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only an external terminal section forming area to prepare a plate; (d) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (e) coating a second insulating resist on the surface of the first plating and exposing only an area where a circuit section is prepared by plating; and (f) subjecting the plate on its exposed area to second plating with a conductive metal by electroplating or electroless plating.

Claim 50

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (g) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (h) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (i) coating a first insulating resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only an external terminal section forming area to prepare a first plate; (j) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (k) subjecting the whole surface on the first plating side to second plating with a conductive metal by electroless plating; (l) covering the plating, prepared by electroless plating, only in its area where a circuit section is formed, thereby preparing a second plate; and (m) removing the area, exposed in the step of preparing the plate, by etching.

Claim 51

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (g) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (h) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (i) coating a first insulating resist on the conductive substrate on its at least one side subjected to the surface treatment and the release treatment and exposing only an external terminal section forming area to prepare a first plate; (j) subjecting the plate on its exposed area to first plating with a conductive metal by electroplating; (k) subjecting the whole surface on the first plating side to second plating with a conductive metal by electroless plating; (l) covering the plating, prepared by electroless plating, only in its area where a circuit section is formed, thereby preparing a second plate; and (m) removing the area, exposed in the step of preparing the plate, by etching.

Claim 52

The process for producing a circuit member for a semiconductor device according to claim 38, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal and the conductive metal plating in the step of the first plating is either copper plating or copper plating using nickel as a substrate and the conductive metal plating in the step of the second plating is copper plating.

Claim 53

The process for producing a circuit member for a semiconductor device according to claim 32, characterized in that the surface treatment is sand blasting.

Claim 54

The process for producing a circuit member for a semiconductor device according to claim 32, characterized in that the release treatment is a treatment for forming an oxide film on the surface of the conductive substrate.

Claim 55

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the whole circuit section having been formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (i) mounting a semiconductor element, with the terminal facing upward, on a circuit section provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (ii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (iii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 56

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the whole circuit section having been formed directly on one side of the conductive substrate by plating, said process being characterized by comprising, in sequence, at least the steps of: (i) mounting a semiconductor element, with the terminal facing upward, on a circuit section provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (ii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (iii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 57

The process for producing a semiconductor device according to claim 43, characterized by further comprising, after the step of removing the substrate, (iv) the step of coating a solder resist on the surface, exposed by removing the substrate, of the circuit section remote from the surface, with the semiconductor element mounted thereon, so as to expose only the external terminal section of the circuit section and (v) the step of attaching a solder ball to the external terminal section exposed from the solder resist.

Claim 58

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (vi) mounting a semiconductor element, with the terminal facing upward, on a circuit section provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (vii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (viii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 59

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, the circuit section having no die pad section for mounting a semiconductor element thereon, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating resist, said process being characterized by comprising, in sequence, at least the steps of: (vi) mounting a semiconductor element, with the terminal facing upward, on a circuit section provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (vii) subjecting one side of the lead member, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (viii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 60

The process for producing a semiconductor device according to claim 45, characterized by further comprising, after the step of removing the substrate, (ix) the step of attaching a solder ball to the exposed external terminal section.

Claim 61

A semiconductor device characterized by being produced by the process according claim 19.

Claim 62

A circuit member, for a semiconductor device, characterized by comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by electroplating, the lead in the circuit section having been formed on an insulating epoxy resin layer, the insulating epoxy resin layer having been provided directly on the conductive substrate excluding the external terminal section forming area by transfer molding.

Claim 63

A circuit member, for a semiconductor device, characterized by comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by electroplating, the lead in the circuit section having been formed on an insulating epoxy resin layer, the insulating epoxy resin layer having been provided directly on the conductive substrate excluding the external terminal section forming area by transfer molding.

Claim 64

The circuit member for a semiconductor device according to claim 48, characterized in that the conductive substrate on its side having the circuit section has been surface-treated to create irregularities and the conductive substrate on its side subjected to surface treatment for creating irregularities thereon has been subjected to release treatment to impart releasability.

Claim 65

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the external terminal section in the circuit section having been formed directly on at least one side of the conductive substrate by electroplating, the lead in the circuit section having been formed on an insulating epoxy resin layer, the insulating epoxy resin layer having been provided directly on the conductive substrate excluding the external terminal section forming area by transfer molding, said process being characterized by comprising, in sequence, at least the steps of: (a) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (b) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (c) providing an insulating epoxy resin layer by transfer molding on the conductive substrate in its at least one side subjected to the surface treatment and the release treatment so as to expose only the external terminal section forming area; (d) electroplating the conductive substrate on its exposed area, not covered with the insulating epoxy resin layer, with a conductive metal to a plating thickness approximately equal to the thickness of the insulating epoxy resin layer; (e) coating an insulating resist on the surface of the plating and exposing only a circuit section forming area to prepare a plate; and (f) imparting electrical conductivity to only the exposed area, where a circuit section is to be formed, by plating or coating of a conductive paint or the like to form a circuit section.

Claim 66

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the external terminal section in the circuit section having been formed directly on at least one side of the conductive substrate by electroplating, the lead in the circuit section having been formed on an insulating epoxy resin layer, the insulating epoxy resin layer having been provided directly on the conductive substrate excluding the external terminal section forming area by transfer molding, said process being characterized by comprising, in sequence, at least the steps of: (a) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (b) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (c) providing an insulating epoxy resin layer by transfer molding on the conductive substrate in its at least one side subjected to the surface treatment and the release treatment so as to expose only the external terminal section forming area; (d) electroplating the conductive substrate on its exposed area, not covered with the insulating epoxy resin layer, with a conductive metal to a plating thickness approximately equal to the thickness of the insulating epoxy resin layer; (e) coating an insulating resist on the surface of the plating and exposing only a circuit section forming area to prepare a plate; and (f) imparting electrical conductivity to only the exposed area, where a circuit section is to be formed, by plating or coating of a conductive paint or the like to form a circuit section.

Claim 67

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by electroplating, the lead in the circuit section having been formed on an insulating epoxy resin layer, the insulating epoxy resin layer having been provided directly on the conductive substrate excluding the external terminal section forming area by transfer molding, said process being characterized by comprising, in sequence, at least the steps of: (g) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (h) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (i) providing an insulating epoxy resin layer by transfer molding on the conductive substrate in its at least one side subjected to the surface treatment and the release treatment so as to expose only the external terminal section forming area; (j) subjecting the conductive substrate on its exposed area, not covered with the insulating epoxy resin layer, to first plating with a conductive metal by electroplating to a plating thickness approximately equal to the thickness of the insulating epoxy resin layer; (k) subjecting the whole surface of the first plating to second plating either by electroless plating alone or by electroless plating followed by electroplating, thereby forming a plating of a conductive metal on the whole surface of the first plating; (l) coating an insulating resist on the surface of the electroless plating and preparing a plate in such a manner that only an area, where a circuit section is to be formed, is covered; and (m) etching the electroless plating using the resist as an etching-resistant mask.

Claim 68

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by electroplating, the lead in the circuit section having been formed on an insulating epoxy resin layer, the insulating epoxy resin layer having been provided directly on the conductive substrate excluding the external terminal section forming area by transfer molding, said process being characterized by comprising, in sequence, at least the steps of: (g) surface-treating at least one side of the conductive substrate to provide irregularities thereon; (h) subjecting the conductive substrate on its at least one side with irregularities provided thereon to release treatment for imparting releasability; (i) providing an insulating epoxy resin layer by transfer molding on the conductive substrate in its at least one side subjected to the surface treatment and the release treatment so as to expose only the external terminal section forming area; (j) subjecting the conductive substrate on its exposed area, not covered with the insulating epoxy resin layer, to first plating with a conductive metal by electroplating to a plating thickness approximately equal to the thickness of the insulating epoxy resin layer; (k) subjecting the whole surface of the first plating to second plating either by electroless plating alone or by electroless plating followed by electroplating, thereby forming a plating of a conductive metal on the whole surface of the first plating; (l) coating an insulating resist on the surface of the electroless plating and preparing a plate in such a manner that only an area, where a circuit section is to be formed, is covered; and (m) etching the electroless plating using the resist as an etching-resistant mask.

Claim 69

The process for producing a circuit member for a semiconductor device according to claim 50, characterized in that the step of forming a jig hole for registration is carried out before the preparation of the plate.

Claim 70

The process for producing a circuit member for a semiconductor device according to claim 50, characterized in that the surface treatment is sand blasting.

Claim 71

The process for producing a circuit member for a semiconductor device according to claim 50, characterized in that the release treatment is a treatment for forming an oxide film on the surface of the conductive substrate.

Claim 72

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating epoxy resin layer provided by transfer molding, said process being characterized by comprising, in sequence, at least the steps of: (i) mounting a semiconductor element, with the terminal facing upward, on a circuit section provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (ii) subjecting one side of the lead section, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (iii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 73

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, the circuit section comprising at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other being provided independently of each other, only the external terminal section in the circuit section having been formed directly on one side of the conductive substrate by plating with the other sections in the circuit section having been formed through an insulating epoxy resin layer provided by transfer molding, said process being characterized by comprising, in sequence, at least the steps of: (i) mounting a semiconductor element, with the terminal facing upward, on a circuit section provided on a conductive substrate and wire-bonding the terminal of the semiconductor element to a lead; (ii) subjecting one side of the lead section, for a semiconductor device, to plastic molding so as to cover the semiconductor element, the wire, and the circuit section of the lead member for a semiconductor device in their entirety; and (iii) removing the conductive substrate in the lead member for a semiconductor device.

Claim 74

The process for producing a semiconductor device according to claim 55, characterized by further comprising, after the step of removing the substrate, (iv) the step of attaching a solder ball to the exposed external terminal section.

Claim 75

A semiconductor device characterized by being produced by the process according to claim 55.

Claim 76

A circuit member for a semiconductor device, characterized by comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal layer provided by plating on the conductive substrate, at least a part of the circuit section having been provided directly on one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device.

Claim 77

A circuit member for a semiconductor device, characterized by comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal layer provided by plating on the conductive substrate, at least a part of the circuit section having been provided directly on one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device.

Claim 78

The circuit member for a semiconductor device according to claim 58, characterized in that the circuit section comprises at least a lead for electrical connection to a semiconductor element and an external terminal section for electrical connection to an external circuit, a plurality of sets of the lead and the external terminal section integrally connected to each other are provided independently of each other and at least a part of the circuit section has been provided directly on one side of the conductive substrate by plating.

Claim 79

The circuit member for a semiconductor device according to claim 59, characterized in that the external terminal section in the circuit section has been formed directly on the conductive substrate by plating and the lead in the circuit section has been formed on an insulating layer provided directly on the conductive substrate excluding the external terminal forming area.

Claim 80

The circuit member for a semiconductor device according to claim 58, characterized in that the circuit section comprises a plurality of external terminal sections, for electrical connection to an external circuit, provided independently of each other and the external terminal sections have been formed directly on one side of the conductive substrate by plating.

Claim 81

The circuit member for a semiconductor device according to claim 61, characterized in that the external terminal sections in the circuit section have been formed in such a manner that the cross section perpendicular to the substrate face has an approximately U shape.

Claim 82

The circuit member for a semiconductor device according to claim 61, characterized in that the external terminal comprises a laminated plating of palladium, nickel, silver, and gold or a plating of an alloy of said metals.

Claim 83

The circuit member for a semiconductor device according to claim 61, characterized in that the separating metal plating is a metal plating selected from the group consisting of copper, nickel, chromium, zinc, and a group of alloys of said metals.

Claim 84

The circuit member for a semiconductor device according to claim 58, characterized in that the circuit section and the like have been formed so that a plurality of semiconductor elements are mounted thereon.

Claim 85

The circuit member for a semiconductor device according to claim 58, characterized in that the conductive substrate is made of an iron-nickel-chromium-base metal, an iron-nickel-base metal, or an iron-carbon-base metal.

Claim 86

A process for producing a circuit member for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on at least one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, using a conductive substrate having a separating metal plating on at least one side thereof, at least the steps of: (a) coating a resist on at least one side of the conductive substrate and exposing only an area to be plated with a conductive metal to prepare a plate; and (b) plating the plate on its exposed area with a conductive metal.

Claim 87

A process for producing a circuit member for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on at least one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, using a conductive substrate having a separating metal plating on at least one side thereof, at least the steps of: (a) coating a resist on at least one side of the conductive substrate and exposing only an area to be plated with a conductive metal to prepare a plate; and (b) plating the plate on its exposed area with a conductive metal.

Claim 88

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on at least one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, using a conductive substrate having a separating metal plating on at least one side thereof, at least the steps of: (d) providing an insulating layer on at least one side of the conductive substrate so as to expose at least the external terminal section in the circuit section and to cover a lead forming area; (e) electrolessly plating the conductive substrate on its whole surface provided with the insulating layer to form a first conductive layer, thereby covering said whole surface; (f) providing a resist so as to expose an external terminal section forming area and a lead section forming area in the circuit section of the conductive substrate on its side provided with the first conductive layer; (g) plating the exposed area to form a second conductive layer, thereby simultaneously forming the external terminal section and the lead section; (h) separating and removing the resist alone; and (i) removing the exposed first conductive layer by etching.

Claim 89

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on at least one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, using a conductive substrate having a separating metal plating on at least one side thereof, at least the steps of: (d) providing an insulating layer on at least one side of the conductive substrate so as to expose at least the external terminal section in the circuit section and to cover a lead forming area; (e) electrolessly plating the conductive substrate on its whole surface provided with the insulating layer to form a first conductive layer, thereby covering said whole surface; (f) providing a resist so as to expose an external terminal section forming area and a lead section forming area in the circuit section of the conductive substrate on its side provided with the first conductive layer; (g) plating the exposed area to form a second conductive layer, thereby simultaneously forming the external terminal section and the lead section; (h) separating and removing the resist alone; and (i) removing the exposed first conductive layer by etching.

Claim 90

The process for producing a circuit member for a semiconductor device according to claim 68, characterized in that the first conductive layer is provided by electroless nickel plating and the second conductive layer comprises a gold layer, a copper layer, a nickel layer, and a gold layer provided in that order by electroplating on the first conductive layer.

Claim 91

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, using a conductive substrate having a separating metal plating on one side thereof, at least the steps of: (k) providing an insulating layer on one side of the conductive substrate so as to expose at least the external terminal section in the circuit section and to cover a lead forming area; (l) covering the conductive substrate on its whole surface, provided with the insulating layer, with a resist, subjecting the surface of the resist to water repellent treatment, and treating the resist so as to expose the external terminal section forming area and the lead section forming section in the circuit section of the conductive substrate; (m) providing and activating a catalyst and then providing a first conductive layer by electroless plating on the exposed areas; (n) providing a second conductive layer by electroplating on the first conductive layer to simultaneously form an external terminal section and a lead section; and (o) separating and removing the resist alone.

Claim 92

A process for producing a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, using a conductive substrate having a separating metal plating on one side thereof, at least the steps of: (k) providing an insulating layer on one side of the conductive substrate so as to expose at least the external terminal section in the circuit section and to cover a lead forming area; (l) covering the conductive substrate on its whole surface, provided with the insulating layer, with a resist, subjecting the surface of the resist to water repellent treatment, and treating the resist so as to expose the external terminal section forming area and the lead section forming section in the circuit section of the conductive substrate; (m) providing and activating a catalyst and then providing a first conductive layer by electroless plating on the exposed areas; (n) providing a second conductive layer by electroplating on the first conductive layer to simultaneously form an external terminal section and a lead section; and (o) separating and removing the resist alone.

Claim 93

The process for producing a circuit member for a semiconductor device according to claim 70, characterized in that the first conductive layer is provided by electroless nickel plating and the second conductive layer comprises a gold layer, a copper layer, a nickel layer, and a gold layer provided in that order by electroplating on the first conductive layer.

Claim 94

The process for producing a circuit member for a semiconductor device according to claim 67, characterized in that the circuit section comprises a plurality of external terminal sections, for electrical connection to an external circuit, provided independently of each other and the external terminal sections are formed directly on one side of the conductive substrate by plating.

Claim 95

The process for producing a circuit member for a semiconductor device according to claim 67, characterized in that the step of forming a jig hole for registration is carried out at lest before the preparation of the plate.

Claim 96

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, at least the steps of: (A) conducting die attachment by mounting a semiconductor element on the circuit member for a semiconductor device in its place excluding an external terminal section area; (B) wirebonding the terminal of the semiconductor element to the circuit section to electrically connect the terminal of the semiconductor element to the external terminal section; (C) subjecting one side of the circuit member for a semiconductor device to plastic molding so as to cover the semiconductor element, the wire, and the circuit section in their entirety; and (D) dissolving and removing the separating metal plating section in the conductive substrate to separate the conductive substrate alone.

Claim 97

A process for producing a semiconductor device using a circuit member, for a semiconductor device, comprising: a conductive substrate; and a circuit section and the like at least two-dimensionally formed using a conductive metal by plating on the conductive substrate, at least a part of the circuit section having been provided directly on one side of the conductive substrate by plating, said conductive substrate on its one side having a circuit section being provided with a separating metal plating serving to separate the conductive substrate from the circuit section in the production of a semiconductor device, said process being characterized by comprising, in sequence, at least the steps of: (A) conducting die attachment by mounting a semiconductor element on the circuit member for a semiconductor device in its place excluding an external terminal section area; (B) wirebonding the terminal of the semiconductor element to the circuit section to electrically connect the terminal of the semiconductor element to the external terminal section; (C) subjecting one side of the circuit member for a semiconductor device to plastic molding so as to cover the semiconductor element, the wire, and the circuit section in their entirety; and (D) dissolving and removing the separating metal plating section in the conductive substrate to separate the conductive substrate alone.

Claim 98

The process for producing a semiconductor device according to claim 74, characterized in that the circuit section in the circuit member for a semiconductor device comprises a plurality of external terminal sections, for electrical connection to an external circuit, provided independently of each other and the external terminal sections are formed directly on one side of the conductive substrate by plating.

Claim 99

The process for producing a semiconductor device according to claim 74, characterized by further comprising, after the step of removing the conductive substrate, (e) the step of attaching a solder ball to the exposed external terminal section.

Claim 100

A semiconductor device characterized by being produced by the process according to claim 74.