US6127908A
Expired / Lapsed
US
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Microelectro-mechanical system actuator device and reconfigurable circuits utilizing same
Assignee: Massachusetts Institute of Technology
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Filing: 1997-11-17
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Granted: 2000-10-03
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Expires: 2017-11-17
Abstract
Abstract A microelectro-mechanical device which includes a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode. The device includes first and second electrically conductive regions which are isolated from one another by the fixed electrode. The moveable electrode moves to cover the fixed electrode and to electrically couple to the second conductive region, thus electrically coupling the first and second conductive regions, in response to a potential being applied across the fixed and moveable electrodes. The fixed electrode is transparent to electromagnetic signals or waves and the moveable electrode impedes or allows transmission of electromagnetic signals or waves. In one embodiment of the invention, the fixed and moveable electrodes are configured within an array of similar devices, and each device or groups of devices in the array are individually addressable to actuate the moveable electrodes. In another embodiment of the invention, there is provided a reconfigurable circuit including an array of actuatable devices which are addressed individually or in selected groups, each of the actuatable devices having a fixed electrode formed on a substrate, the fixed electrode including a transparent, high resistance layer, and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent the fixed electrode.
Inventors
- 👤 Carl O. Bozler
- 👤 Richard G. Drangmeister
- 👤 Robert J. Parr
- 👤 Lawrence J. Kushner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:52
CPC Classifications
B; B81; B81B; B81B3/00; B81B3/0018; B81B3/0021; B81C; B81C1/00; B81C1/00015; B81C1/00214; H; H01; H01G; H01G5/00; H01G5/16; H01G5/18; H01G5/40; H01P; H01P1/00; H01P1/10; H01P1/12; H01P1/20; H01P1/201; H01P1/203; H01P1/20327; H01P1/20354; H01P1/20363; H01P1/20381; H01P1/2039; H01P5/00; H01P5/04; B81B2201/00; B81B2201/01; B81B2201/012; B81B2201/014; B81B2203/00; B81B2203/01; B81B2203/0118; H01H; H01H59/00; H01H59/0009; H01H2059/0081
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
57 words
A microelectro-mechanical device comprising: a fixed electrode formed on a substrate, said fixed electrode including an electrically conducting transparent, high resistance layer; a moveable electrode disposed adjacent said fixed electrode; first and second electrically conductive regions which are isolated from one another by said fixed electrode, said moveable electrode being electrically coupled to said first conductive region.
Claim 2
Dependent Claim
57 words
A microelectro-mechanical device comprising: a fixed electrode formed on a substrate, said fixed electrode including an electrically conducting transparent, high resistance layer; a moveable electrode disposed adjacent said fixed electrode; first and second electrically conductive regions which are isolated from one another by said fixed electrode, said moveable electrode being electrically coupled to said first conductive region.
Claim 3
Dependent Claim
19 words
The device of claim 1, wherein said fixed and moveable electrodes are configured within an array of similar devices.
Claim 4
Dependent Claim
23 words
The device of claim 2, wherein each device or groups of devices in said array are individually addressable to actuate said moveable electrodes.
Claim 5
Dependent Claim
46 words
The device of claim 1, wherein said moveable electrode moves to cover said fixed electrode and to electrically couple to said second conductive region, thus electrically coupling said first and second conductive regions, in response to a potential being applied across said fixed and moveable electrodes.
Claim 6
Dependent Claim
26 words
The device of claim 4, wherein said potential is applied directly to said fixed electrode and capacitively to said moveable electrode via a second fixed electrode.
Claim 7
Dependent Claim
16 words
The device of claim 5, wherein said second fixed electrode comprises a transparent, high resistance layer.
Claim 8
Dependent Claim
23 words
The device of claim 4, wherein the electrical coupling between said moveable electrode and said second conductive region comprises a low resistance contact.
Claim 9
Dependent Claim
16 words
The device of claim 3, wherein said fixed electrode is transparent to electromagnetic signals or waves.
Claim 10
Dependent Claim
16 words
The device of claim 8, wherein said moveable electrode impedes transmission of electromagnetic signals or waves.
Claim 11
Dependent Claim
17 words
The device of claim 4, wherein said potential is applied directly to said fixed and moveable electrodes.
Claim 12
Dependent Claim
58 words
A reconfigurable circuit comprising: an array of actuatable devices which are addressed individually or in selected groups, each of said actuatable devices including: a fixed electrode formed on a substrate, said fixed electrode including a transparent, high resistance layer; and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent said fixed electrode.
Claim 13
Dependent Claim
58 words
A reconfigurable circuit comprising: an array of actuatable devices which are addressed individually or in selected groups, each of said actuatable devices including: a fixed electrode formed on a substrate, said fixed electrode including a transparent, high resistance layer; and a moveable electrode formed with an anisotropic stress in a predetermined direction and disposed adjacent said fixed electrode.
Claim 14
Dependent Claim
14 words
The circuit of claim 11, wherein said circuit comprises a variable output power amplifier.
Claim 15
Dependent Claim
40 words
The circuit of claim 11, wherein each of said actuatable devices comprises a first and second electrically conductive regions which are isolated from one another by said fixed electrode, said moveable electrode being electrically coupled to said first conductive region.
Claim 16
Dependent Claim
46 words
The circuit of claim 13, wherein said moveable electrode moves to cover said fixed electrode and to electrically couple to said second conductive region, thus electrically coupling said first and second conductive regions, in response to a potential being applied across said fixed and moveable electrodes.
Claim 17
Dependent Claim
16 words
The circuit of claim 14, wherein said fixed electrode is transparent to electromagnetic signals or waves.
Claim 18
Dependent Claim
16 words
The circuit of claim 15, wherein said moveable electrode impedes transmission of electromagnetic signals or waves.
Claim 19
Dependent Claim
13 words
The circuit of claim 11, wherein said circuit comprises a tunable RF filter.
Claim 20
Dependent Claim
13 words
The circuit of claim 11, wherein said circuit comprises a microwave tuning element.
Claim 21
Dependent Claim
12 words
The circuit of claim 11, wherein said circuit comprises a variable resistor.
Claim 22
Dependent Claim
12 words
The circuit of claim 11, wherein said circuit comprises a variable capacitor.
Claim 23
Dependent Claim
13 words
The circuit of claim 11, wherein said circuit comprises a variable spiral inductor.
Claim 24
Dependent Claim
14 words
The circuit of claim 11, wherein said circuit comprises a MMIC with variable interconnects.
Claim 25
Dependent Claim
13 words
The circuit of claim 11, wherein said circuit comprises a binary switched circuit.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-03 | 2004-04-03 | 2004-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-03 | 2008-04-03 | 2008-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-03 | 2012-04-03 | 2012-10-03 | $7700.00 | Window Closed / Lapsed |