US5367136A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Non-contact two position microeletronic cantilever switch
Assignee: Northrop Grumman Systems Corp
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Filing: 1993-07-26
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Granted: 1994-11-22
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Expires: 2013-07-26
Abstract
Abstract A microelectrostatic cantilever switch that has a thin impermeable oxide layer on the surface of a contact pad which is engaged by an unsupported portion of a cantilever beam when the switch is in a closed position. The switch in the open position exhibits a capacitance between the cantilever beam and contact pad of 0.8 Pf and a capacitance of 0.001 to 0.01 Pf in the closed position.
Inventors
- 👤 Daniel C. Buck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 16:36
CPC Classifications
H; H03; H03K; H03K17/00; H03K17/94; H03K17/965; H03K17/975; H01; H01H; H01H59/00; H01H59/0009
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
135 words
A microelectronic cantilever switch, comprising a substrate; a conductive cantilever beam fixed at one end to the substrate and having an elongate unsupported portion overhanging the substrate, said unsupported portion terminating at a free end; a pull down electrode, attached through a switch to a voltage source, for attracting the cantilever beam toward the substrate, and fixed to the substrate between the substrate and the cantilever beam; a metallic contact pad fixed to the substrate between the substrate and the cantilever beam, the cantilever beam being spaced from the contact pad when the switch is in the open position; and an insulative layer deposited on an opposing surface of one of the cantilever beam and contact pad, the cantilever beam being in engagement with the insulative layer when the switch is in the closed position.
Claim 2
Dependent Claim
135 words
A microelectronic cantilever switch, comprising a substrate; a conductive cantilever beam fixed at one end to the substrate and having an elongate unsupported portion overhanging the substrate, said unsupported portion terminating at a free end; a pull down electrode, attached through a switch to a voltage source, for attracting the cantilever beam toward the substrate, and fixed to the substrate between the substrate and the cantilever beam; a metallic contact pad fixed to the substrate between the substrate and the cantilever beam, the cantilever beam being spaced from the contact pad when the switch is in the open position; and an insulative layer deposited on an opposing surface of one of the cantilever beam and contact pad, the cantilever beam being in engagement with the insulative layer when the switch is in the closed position.
Claim 3
Dependent Claim
31 words
The switch of claim 1 wherein opposing surfaces of the cantilever beam and the contact pad are parallel to one another at times when the switch is in the closed position.
Claim 4
Dependent Claim
18 words
The switch of claim 2 wherein the insulative layer is deposited on the surface of the contact pad.
Claim 5
Dependent Claim
14 words
The switch of claim 2 wherein the insulative layer is an impermeable oxide surface.
Claim 6
Dependent Claim
35 words
The switch of claim 1 wherein the space between an opposing surface of the overhanging free end and the insulative layer in the open position is in the range of between one and twenty-five microns.
Claim 7
Dependent Claim
20 words
The switch of claim 1 wherein the insulative layer is approximately in the range of 0.1 to 2 microns thick.
Claim 8
Dependent Claim
13 words
The switch of claim 4 wherein the insulative layer is an alumina layer.
Claim 9
Dependent Claim
23 words
The switch of claim 4 wherein the insulative layer is a material selected from one of the group consisting of aluminum and chrome.
Claim 10
Dependent Claim
51 words
The switch of claim 1 wherein the unsupported portion of cantilever beam is in the ranges of one to two mils long, one to five microns thick and five to ten microns wide, and opposing surfaces of the beam and insulated contact pad are each approximately ten by ten microns square.
References Cited (Backward Citations)
US3539705A
Cited
US3681134A
Cited
US3796976A
Cited
US4922253A
Cited
US5258591A
Cited
US5268696A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-11-21 | 1998-05-23 | 1998-11-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-21 | 2002-05-23 | 2002-11-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-21 | 2006-05-23 | 2006-11-22 | $7700.00 | Window Closed / Lapsed |