US6126848A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Indirect endpoint detection by chemical reaction and chemiluminescence
Assignee: GlobalFoundries Inc
•
Filing: 1998-05-06
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Granted: 2000-10-03
•
Expires: 2018-05-06
Abstract
Abstract Detection of the endpoint for removal of a target film overlying a stopping film by removing the target film with a process that selectively generates a chemical reaction product (for example ammonia when polishing a wafer with a nitride film in a slurry containing KOH) with one of the stopping film and the target film, converting the chemical reaction product to a separate product, producing excited molecules from the separate product, and monitoring the level of light emitted from the excited molecules as the target film is removed.
Inventors
- 👤 Leping Li
- 👤 James Albert Gilhooly
- 👤 Clifford Owen Morgan, III
- 👤 William Joseph Surovic
- 👤 Cong Wei
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 22:46
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/12; G; G01; G01N; G01N21/00; G01N21/75; G01N21/76; G01N21/766; H; H10; H10P; H10P52/00; H10P52/40; H10P52/402; Y; Y10; Y10T; Y10T436/00; Y10T436/17; Y10T436/173845; Y10T436/175383
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
84 words
A method for detecting the endpoint for removal of a target film overlying a stopping film, comprising the steps of: (a) removing the target film with a process that selectively generates a chemical reaction product with one of the stopping film and the target film; (b) converting the chemical reaction product present to a separate product; (c) producing excited gas molecules from the separate product; and (d) monitoring the level of light emitted from the excited gas molecules as the target film is removed.
Claim 2
Independent Claim
84 words
A method for detecting the endpoint for removal of a target film overlying a stopping film, comprising the steps of: (a) removing the target film with a process that selectively generates a chemical reaction product with one of the stopping film and the target film; (b) converting the chemical reaction product present to a separate product; (c) producing excited gas molecules from the separate product; and (d) monitoring the level of light emitted from the excited gas molecules as the target film is removed.
Claim 3
Dependent Claim
13 words
The method of claim 1 wherein the film is removed by dry etching.
Claim 4
Dependent Claim
13 words
The method of claim 1 wherein the film is removed by chemical-mechanical polishing.
Claim 5
Dependent Claim
24 words
The method of claim 3 wherein the chemical reaction product is contained in a slurry that has been used in the chemical mechanical polishing.
Claim 6
Dependent Claim
21 words
The method of claim 4, further comprising the step of extracting the chemical reaction product as a gas from the slurry.
Claim 7
Dependent Claim
54 words
The method of claim 5 wherein the extraction step comprises: contacting a first side of a hydrophobic membrane with the slurry; contacting a second side of the hydrophobic membrane with a gas stream; and allowing the chemical reaction product to pass through the membrane as a gas and become entrained in the gas stream.
Claim 8
Dependent Claim
12 words
The method of claim 6 wherein the converting step uses catalytic conversion.
Claim 9
Dependent Claim
14 words
The method of claim 1 wherein the emitted light is monitored by using photomultiplication.
Claim 10
Dependent Claim
20 words
The method of claim 1 further comprising the step of stopping the removal process when the endpoint has been reached.
Claim 11
Dependent Claim
18 words
The method of claim 1 wherein the process selectively generates a chemical reaction product with the stopping film.
Claim 12
Dependent Claim
19 words
The method of claim 10 wherein the level of chemical reaction product increases as the target film is removed.
Claim 13
Dependent Claim
18 words
The method of claim 1 wherein the process selectively generates a chemical reaction product with the target film.
Claim 14
Dependent Claim
19 words
The method of claim 12 wherein the level of chemical reaction product decreases as the target film is removed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-03 | 2004-04-03 | 2004-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-03 | 2008-04-03 | 2008-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-03 | 2012-04-03 | 2012-10-03 | $7700.00 | Window Closed / Lapsed |