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US6124641A
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Semiconductor device organic insulator film
Assignee: Mitsubishi Electric Corp
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Filing: 1997-12-08
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Granted: 2000-09-26
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Expires: 2017-12-08
Abstract
Abstract An interlayer insulating film of a semiconductor device is made of a material in which silicon atoms are main elements, and each of the silicon atoms has an oxygen bond and a carbon bond, and further at least some of the silicon atoms have a hydrogen bond. The interlayer insulating film is formed by chemical vapor deposition employing a mixed gas of hydrogen peroxide and a reactive gas having a gas molecular structure in which silicon atoms have a hydrogen bond and a carbon bond.
Inventors
- 👤 Masazumi Matsuura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 03:30
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; H10P14/6902; H10P14/63; H10P14/6326; H10P14/6328; H10P14/6334; H10P14/6336; H10P14/6682; H10P14/6922
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
66 words
A semiconductor device comprising an interlayer insulating film that is made of a material having silicon atoms as main elements, substantially each of said silicon atoms having at least an oxygen bond and a carbon bond, at least some of said silicon atoms having a hydrogen bond, wherein said interlayer insulating film degasses less water than a film comprising silicon atoms having oxygen and methyl bonds.
Claim 2
Dependent Claim
66 words
A semiconductor device comprising an interlayer insulating film that is made of a material having silicon atoms as main elements, substantially each of said silicon atoms having at least an oxygen bond and a carbon bond, at least some of said silicon atoms having a hydrogen bond, wherein said interlayer insulating film degasses less water than a film comprising silicon atoms having oxygen and methyl bonds.
Claim 3
Dependent Claim
26 words
The semiconductor device according to claim 1, wherein said carbon bond is a bond with either a methyl radical, an ethyl radical, or a vinyl radical.
Claim 4
Dependent Claim
23 words
A semiconductor device according to claim 1, wherein said carbon bond in the interlayer insulating film is a bond with a vinyl radical.
Claim 5
Dependent Claim
57 words
A semiconductor device comprising an interlayer insulating film that is made of a material having silicon atoms as main elements, substantially each of said silicon atoms having at least an oxygen bond and a carbon bond, at least some of said silicon atoms having a hydrogen bond, wherein said insulating film is deposited by chemical vapor deposition.
Claim 6
Dependent Claim
57 words
A semiconductor device comprising an interlayer insulating film that is made of a material having silicon atoms as main elements, substantially each of said silicon atoms having at least an oxygen bond and a carbon bond, at least some of said silicon atoms having a hydrogen bond, wherein said insulating film is deposited by chemical vapor deposition.
Claim 7
Dependent Claim
24 words
A semiconductor device according to claim 4, wherein the chemical vapor deposition comprises mixing a gas of hydrogen peroxide with an organic silane gas.
Claim 8
Dependent Claim
55 words
The semiconductor device according to claim 5, wherein said insulating film is formed at a temperature of -20° C. to 20° C., a pressure of 500 to 2000 mTorr and a gas flow of 40 to 200 SCCM for the organic silane and a gas flow of 0.4 to 0.9 g/min for the hydrogen peroxide.
Claim 9
Dependent Claim
17 words
A semiconductor according to claim 4, wherein said carbon bond is a bond to a vinyl radical.
References Cited (Backward Citations)
US5656555A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-26 | 2004-03-27 | 2004-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-26 | 2008-03-27 | 2008-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-26 | 2012-03-27 | 2012-09-26 | $7700.00 | Window Closed / Lapsed |