US6124197A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Adjusting the size of conductive lines based upon contact size
Assignee: Advanced Micro Devices Inc
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Filing: 1999-10-01
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Granted: 2000-09-26
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Expires: 2019-10-01
Abstract
Abstract The present invention is directed to a method of forming conductive interconnections in an integrated circuit device to optimize or at least maintain the speed at which signals propagate throughout the integrated circuit device. In one embodiment, the method comprises determining any variation in the size of a contact, as compared to its design size, and varying the size of a conductive line to be coupled to the contact based upon the variation in the size of the contact.
Inventors
- 👤 H. Jim Fulford
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:37
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/40; H10W20/41; H10W20/42
Claims Analysis
Total Claims: 50
Claim 1
Independent Claim
49 words
A method, comprising: determining a variation in a size of a contact as compared to a design size for said contact; and determining if a size of a conductive line to be coupled to said contact needs to be varied based upon the determined size variation of said contact.
Claim 2
Independent Claim
49 words
A method, comprising: determining a variation in a size of a contact as compared to a design size for said contact; and determining if a size of a conductive line to be coupled to said contact needs to be varied based upon the determined size variation of said contact.
Claim 3
Dependent Claim
29 words
The method of claim 1, further comprising varying the size of said conductive line to be coupled to said contact based upon said determined variation in said contact size.
Claim 4
Dependent Claim
27 words
The method of claim 2, further comprising increasing the size of said conductive line if said contact size is less than the design size of said contact.
Claim 5
Dependent Claim
27 words
The method of claim 2, further comprising increasing a height of a conductive line if said contact size is less than the design size of said contact.
Claim 6
Dependent Claim
48 words
The method of claim 1, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a size of a contact as compared to a design size for said contact after said contact is formed.
Claim 7
Dependent Claim
48 words
The method of claim 1, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a size of a contact as compared to a design size for said contact before said contact is formed.
Claim 8
Dependent Claim
43 words
The method of claim 1, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a diameter of a contact as compared to a design diameter for said contact.
Claim 9
Dependent Claim
42 words
The method of claim 1, determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a height of a contact as compared to a design height for said contact.
Claim 10
Dependent Claim
51 words
The method of claim 1, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a diameter of a via in which a contact is to be formed as compared to a design diameter of said via.
Claim 11
Dependent Claim
54 words
The method of claim 1, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a thickness of a dielectric layer in which a plurality of contacts will be formed as compared to a design thickness of said dielectric layer.
Claim 12
Independent Claim
71 words
A method, comprising: determining a variation in a size of a contact as compared to a design size for said contact; determining if a size of a conductive line to be coupled to said contact needs to be varied based upon the determined size variation of said contact; and varying the size of said conductive line to be coupled to said contact based upon said determined variation in said contact size.
Claim 13
Independent Claim
71 words
A method, comprising: determining a variation in a size of a contact as compared to a design size for said contact; determining if a size of a conductive line to be coupled to said contact needs to be varied based upon the determined size variation of said contact; and varying the size of said conductive line to be coupled to said contact based upon said determined variation in said contact size.
Claim 14
Dependent Claim
48 words
The method of claim 11, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a size of a contact as compared to a design size for said contact after said contact is formed.
Claim 15
Dependent Claim
48 words
The method of claim 11, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a size of a contact as compared to a design size for said contact before said contact is formed.
Claim 16
Dependent Claim
43 words
The method of claim 11, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a diameter of a contact as compared to a design diameter for said contact.
Claim 17
Dependent Claim
42 words
The method of claim 11, determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a height of a contact as compared to a design height for said contact.
Claim 18
Dependent Claim
51 words
The method of claim 11, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a variation in a diameter of a via in which a contact is to be formed as compared to a design diameter of said via.
Claim 19
Dependent Claim
51 words
The method of claim 11, wherein determining a variation in a size of a contact as compared to a design size for said contact comprises determining a thickness of a dielectric layer in which a plurality of contacts will be formed as compared to a design thickness of said dielectric layer.
Claim 20
Dependent Claim
27 words
The method of claim 11, further comprising increasing the size of said conductive line if said contact size is less than the design size of said contact.
Claim 21
Dependent Claim
27 words
The method of claim 11, further comprising increasing a height of a conductive line if said contact size is less than the design size of said contact.
Claim 22
Independent Claim
65 words
A method, comprising: forming a via for a contact in a dielectric layer; determining a variation in a size of said via as compared to a design size for said via; and determining if a size of a conductive line to be coupled to a contact to be formed in said via needs to be varied based upon the determined size variation of said via.
Claim 23
Independent Claim
65 words
A method, comprising: forming a via for a contact in a dielectric layer; determining a variation in a size of said via as compared to a design size for said via; and determining if a size of a conductive line to be coupled to a contact to be formed in said via needs to be varied based upon the determined size variation of said via.
Claim 24
Dependent Claim
29 words
The method of claim 20, further comprising varying the size of the conductive line to be coupled to said contact based upon the determined size variation of said via.
Claim 25
Dependent Claim
27 words
The method of claim 20, wherein forming a via for a contact in a dielectric layer comprises etching a via for a contact in a dielectric layer.
Claim 26
Dependent Claim
45 words
The method of claim 20, wherein determining a variation in a size of said via as compared to a design size for said via comprises determining a variation in a physical dimension of said via as compared to a design physical dimension for said via.
Claim 27
Dependent Claim
43 words
The method of claim 20, wherein determining a variation in a size of said via as compared to a design size for said via comprises determining a variation in a diameter of said via as compared to a design diameter for said via.
Claim 28
Dependent Claim
52 words
The method of claim 20, wherein determining a variation in a size of said via as compared to a design size for said via comprises determining a variation in a thickness of a dielectric layer in which said via will be formed as compared to a design thickness for said dielectric layer.
Claim 29
Independent Claim
65 words
A method, comprising: forming a via for a contact in a dielectric layer; determining a variation in a size of said via as compared to a design size for said via; and determining if a size of a conductive line to be coupled to a contact to be formed in said via needs to be varied based upon the determined size variation of said via.
Claim 30
Independent Claim
65 words
A method, comprising: forming a via for a contact in a dielectric layer; determining a variation in a size of said via as compared to a design size for said via; and determining if a size of a conductive line to be coupled to a contact to be formed in said via needs to be varied based upon the determined size variation of said via.
Claim 31
Dependent Claim
29 words
The method of claim 26, further comprising varying the size of the conductive line to be coupled to said contact based upon the determined size variation of said via.
Claim 32
Dependent Claim
27 words
The method of claim 26, wherein forming a via for a contact in a dielectric layer comprises etching a via for a contact in a dielectric layer.
Claim 33
Dependent Claim
45 words
The method of claim 26, wherein determining a variation in a size of said via as compared to a design size for said via comprises determining a variation in a physical dimension of said via as compared to a design physical dimension for said via.
Claim 34
Dependent Claim
43 words
The method of claim 26, wherein determining a variation in a size of said via as compared to a design size for said via comprises determining a variation in a diameter of said via as compared to a design diameter for said via.
Claim 35
Dependent Claim
52 words
The method of claim 26, wherein determining a variation in a size of said via as compared to a design size for said via comprises determining a variation in a thickness of a dielectric layer in which said via will be formed as compared to a design thickness for said dielectric layer.
Claim 36
Independent Claim
42 words
A method, comprising: determining at least one dimension of a contact; determining a size of a conductive line to be electrically coupled to said contact based upon said determined dimension of said contact; and forming a conductive line of said determined size.
Claim 37
Independent Claim
42 words
A method, comprising: determining at least one dimension of a contact; determining a size of a conductive line to be electrically coupled to said contact based upon said determined dimension of said contact; and forming a conductive line of said determined size.
Claim 38
Dependent Claim
21 words
The method of claim 32, wherein determining at least one dimension of a contact comprises measuring a diameter of said contact.
Claim 39
Dependent Claim
21 words
The method of claim 32, wherein determining at least one dimension of a contact comprises measuring a height of said contact.
Claim 40
Dependent Claim
30 words
The method of claim 32, wherein determining at least one dimension of a contact comprises measuring a thickness of a dielectric layer in which said contact is to be formed.
Claim 41
Dependent Claim
28 words
The method of claim 32, wherein determining at least one dimension of a contact comprises measuring a dimension of a via in which said contact will be formed.
Claim 42
Dependent Claim
43 words
The method of claim 32, wherein determining a size of a conductive line to be electrically coupled to said contact based upon said determined dimension of said contact comprises calculating a size of a conductive line to be electrically coupled to said contact.
Claim 43
Dependent Claim
45 words
The method of claim 32, wherein determining a size of a conductive line to be electrically coupled to said contact based upon said determined dimension of said contact comprises selecting a conductive line of a preselected size based upon said determined dimension of said contact.
Claim 44
Independent Claim
50 words
A method, comprising: determining a variation in a physical dimension of a contact; determining a physical dimension of a conductive line to be electrically coupled to said contact based upon said determined variation of a physical dimension of said contact; and forming a conductive line having said determined physical dimension.
Claim 45
Independent Claim
50 words
A method, comprising: determining a variation in a physical dimension of a contact; determining a physical dimension of a conductive line to be electrically coupled to said contact based upon said determined variation of a physical dimension of said contact; and forming a conductive line having said determined physical dimension.
Claim 46
Dependent Claim
36 words
The method of claim 39, wherein determining a variation in a physical dimension of a contact comprises determining at least one of a height, a width, a length, a thickness, and a diameter of said contact.
Claim 47
Dependent Claim
31 words
The method of claim 39, wherein determining a variation in a physical dimension of a contact comprises measuring a thickness of a dielectric layer in which said contact will be formed.
Claim 48
Dependent Claim
30 words
The method of claim 39, wherein determining a variation in a physical dimension of a contact comprises measuring a dimension of a via in which said contact will be formed.
Claim 49
Dependent Claim
49 words
The method of claim 39, wherein determining a physical dimension of a conductive line to be electrically coupled to said contact based upon said determined variation of a physical dimension of said contact comprises calculating a physical size of a conductive line to be electrically coupled to said contact.
Claim 50
Dependent Claim
52 words
The method of claim 39, wherein determining a physical dimension of a conductive line to be electrically coupled to said contact based upon said determined variation of a physical dimension of said contact comprises selecting a conductive line of a preselected physical dimension based upon said determined physical dimension of said contact.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-26 | 2004-03-27 | 2004-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-26 | 2008-03-27 | 2008-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-26 | 2012-03-27 | 2012-09-26 | $7700.00 | Window Closed / Lapsed |