US6120609A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Self-aligning lift mechanism
Assignee: Applied Materials Inc
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Filing: 1997-07-14
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Granted: 2000-09-19
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Expires: 2017-07-14
Abstract
Abstract An improved lift mechanism includes a configuration having two sections of bellows welded to a central flange. The central flange provides support for a precisely aligned lift pin support structure. The efficient utilization of space provides space for an enlarged stem while minimizing the interaction between pieces within the processing chamber. Outside the vacuum limits of the processing chamber, a catch arrangement is provided as part of a linkage that allows a single vertical drive to be utilized to manipulate both the vertical motion of lift pins and vertical motion of the pedestal supporting a substrate in a processing chamber. In one configuration a unitized lift mechanism can be replaced as a unit. Particular orientations for utilizing a lift pin support plate with ceramic inserts is disclosed to reduce particle generation within the processing chamber.
Inventors
- 👤 Leonid Selyutin
- 👤 Talex Sajoto
- 👤 Jun Zhao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:30
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; H; H10; H10P; H10P72/00; H10P72/50; H10P72/70; H10P72/76; H10P72/7604; H10P72/7612; H10P72/7626
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
238 words
A substrate processing apparatus comprising: a substrate support plate having a stem supported by a driven carrier member, a series of lift pins which when configured in a raised position support a substrate separated from said substrate support plate at first position at a first distance from said substrate support plate, said series of lift pins when configured in a lowered position cause the substrate to be supported in a second position at a second distance from said substrate support plate, said second distance being less than said first distance; a lift pin support structure configured to contact said series of lift pins to cause said series of lift pins to move from said lowered position to said raised position and support said series of pins in said raised position, said lift pin support structure being fixed to a floating carrier member, and a catch member fixed to said floating carrier member, said catch member being configured to allow said floating carrier member to move relative to said driven carrier member when said floating carrier member and said driven carrier member are less than a catch distance apart, said catch member being configured to prevent said floating carrier member and said driven carrier member from separating from each other greater than a catch distance; wherein said substrate is processed in a vacuum processing chamber and said catch member is located outside a vacuum limit of said processing chamber.
Claim 2
Dependent Claim
238 words
A substrate processing apparatus comprising: a substrate support plate having a stem supported by a driven carrier member, a series of lift pins which when configured in a raised position support a substrate separated from said substrate support plate at first position at a first distance from said substrate support plate, said series of lift pins when configured in a lowered position cause the substrate to be supported in a second position at a second distance from said substrate support plate, said second distance being less than said first distance; a lift pin support structure configured to contact said series of lift pins to cause said series of lift pins to move from said lowered position to said raised position and support said series of pins in said raised position, said lift pin support structure being fixed to a floating carrier member, and a catch member fixed to said floating carrier member, said catch member being configured to allow said floating carrier member to move relative to said driven carrier member when said floating carrier member and said driven carrier member are less than a catch distance apart, said catch member being configured to prevent said floating carrier member and said driven carrier member from separating from each other greater than a catch distance; wherein said substrate is processed in a vacuum processing chamber and said catch member is located outside a vacuum limit of said processing chamber.
Claim 3
Dependent Claim
39 words
The substrate processing apparatus as in claim 1, wherein the lift pin support structure includes a bellows central flange between two elastic bellows sections, the elastic bellows sections being welded in a gas tight connection to said central flange.
Claim 4
Dependent Claim
22 words
The substrate processing apparatus as in claim 2, wherein a lift pin structure support tube is fixed to the bellows central flange.
Claim 5
Dependent Claim
22 words
The substrate processing apparatus as in claim 2, where the lift pin support structure tube is welded to the bellows central flange.
Claim 6
Dependent Claim
38 words
The substrate processing apparatus as in claim 1, where a lift pin plate which is part of said lift pin support structure is attached to the rest of said lift pin support structure tube through a screw connection.
Claim 7
Dependent Claim
25 words
The substrate processing apparatus as in claim 1, where lift pin plate is attached to said lift pin support tube through a twist lock connection.
Claim 8
Dependent Claim
32 words
The substrate processing apparatus as in claims 5 or 6, where space between the bellows and the lift pin support structure tube is linearly accessible upon removal of said lift pin plate.
Claim 9
Dependent Claim
190 words
A substrate processing apparatus comprising: a substrate support plate having a stem supported by a driven carrier member, a series of lift pins which when configured in a raised position support a substrate separated from said substrate support plate at first position at a first distance from said substrate support plate, said series of lift pins when configured in a lowered position cause the substrate to be supported in a second position at a second distance from said substrate support plate, said second distance being less than said first distance; and a lift pin support structure configured to contact said series of lift pins to cause said series of lift pins to move from said lowered position to said raised position and support said series of pins in said raised position, said lift pin support structure being fixed to a floating carrier member, where an opening in the processing chamber through which the lift mechanism passes is larger than the diameter of the substrate support plate, such that the substrate lifting mechanism can be pre-assembled outside the processing chamber prior to being attached to the processing chamber as a unit.
Claim 10
Dependent Claim
190 words
A substrate processing apparatus comprising: a substrate support plate having a stem supported by a driven carrier member, a series of lift pins which when configured in a raised position support a substrate separated from said substrate support plate at first position at a first distance from said substrate support plate, said series of lift pins when configured in a lowered position cause the substrate to be supported in a second position at a second distance from said substrate support plate, said second distance being less than said first distance; and a lift pin support structure configured to contact said series of lift pins to cause said series of lift pins to move from said lowered position to said raised position and support said series of pins in said raised position, said lift pin support structure being fixed to a floating carrier member, where an opening in the processing chamber through which the lift mechanism passes is larger than the diameter of the substrate support plate, such that the substrate lifting mechanism can be pre-assembled outside the processing chamber prior to being attached to the processing chamber as a unit.
Claim 11
Dependent Claim
76 words
A substrate processing apparatus comprising: a lift pin support plate of a lift pin support structure in a substrate processing chamber including a set of inserts specifically located in said lift pin support plate opposite ends of a series of lift pins, wherein a progressive movement to raise a substrate in said processing chamber causes said set of inserts to contact the ends of said series of lift pins to raise said series of lift pins.
Claim 12
Dependent Claim
76 words
A substrate processing apparatus comprising: a lift pin support plate of a lift pin support structure in a substrate processing chamber including a set of inserts specifically located in said lift pin support plate opposite ends of a series of lift pins, wherein a progressive movement to raise a substrate in said processing chamber causes said set of inserts to contact the ends of said series of lift pins to raise said series of lift pins.
Claim 13
Dependent Claim
75 words
A substrate processing apparatus comprising: a lift pin support plate of a lift pin support structure in a substrate processing chamber including an annular insert specifically located in said lift pin support plate opposite ends of a series of lift pins, wherein a progressive movement to raise a substrate in said processing chamber causes said set of inserts to contact the ends of said series of lift pins to raise said series of lift pins.
Claim 14
Dependent Claim
75 words
A substrate processing apparatus comprising: a lift pin support plate of a lift pin support structure in a substrate processing chamber including an annular insert specifically located in said lift pin support plate opposite ends of a series of lift pins, wherein a progressive movement to raise a substrate in said processing chamber causes said set of inserts to contact the ends of said series of lift pins to raise said series of lift pins.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-19 | 2004-03-20 | 2004-09-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-19 | 2008-03-20 | 2008-09-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-19 | 2012-03-20 | 2012-09-19 | $7700.00 | Window Closed / Lapsed |