US6108472A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for re-directing light from optical waveguide
Assignee: Mellanox Technologies Silicon Photonics Inc
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Filing: 1998-02-06
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Granted: 2000-08-22
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Expires: 2018-02-06
Abstract
Abstract The device is formed on a silicon-on-insulator chip (which comprises a layer of silicon (1) separated from a substrate (3) by an insulator layer (2)) and comprises an integrated waveguide (4) formed in the silicon layer (1) and a reflective facet (6) formed in a recess in the silicon layer (1). The facet (6) is positioned to redirect light in a desired direction. The waveguide (4) and facet (6) are both formed in the silicon layer (1) so their positions can be defined by the same lithographic steps so they are automatically aligned with each other.
Inventors
- 👤 Andrew George Rickman
- 👤 Arnold Peter Roscoe Harpin
- 👤 Robin Jeremy Richard Morris
- 👤 Stephen Gorton
- 👤 Mehdi Asghari
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 00:29
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/42; G02B6/4201; G02B6/4204; G02B6/4214; H; H10; H10F; H10F77/00; H10F77/40; H10F77/407; H01; H01S; H01S5/00; H01S5/02
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
94 words
A device for re-directing light from an optical waveguide on a silicon-on-insulator chip which comprises a layer of silicon separated from a substrate by an insulator layer, the device comprising an integrated waveguide formed in the silicon layer and a reflective facet formed in a recess in the silicon layer, the facet being positioned to receive light from the waveguide and angled so as to re-direct the light in a desired direction, the waveguide and facet both being formed in the silicon layer so their locations can be defined by the same lithographic step.
Claim 2
Independent Claim
94 words
A device for re-directing light from an optical waveguide on a silicon-on-insulator chip which comprises a layer of silicon separated from a substrate by an insulator layer, the device comprising an integrated waveguide formed in the silicon layer and a reflective facet formed in a recess in the silicon layer, the facet being positioned to receive light from the waveguide and angled so as to re-direct the light in a desired direction, the waveguide and facet both being formed in the silicon layer so their locations can be defined by the same lithographic step.
Claim 3
Dependent Claim
23 words
A device as claimed in claim 1 in which the facet is angled to direct light out of the plane of the chip.
Claim 4
Dependent Claim
27 words
A device as claimed in claim 2 in which the facet is angled to direct light in a direction substantially perpendicular to the plane of the chip.
Claim 5
Dependent Claim
32 words
A device as claimed in claim 2 in which the facet is angled to direct light out of the plane of the chip at an angle to the normal of the chip.
Claim 6
Dependent Claim
26 words
A device as claimed in claim 4 in which the facet is angled so its edges do not lie perpendicular to light received from the waveguide.
Claim 7
Dependent Claim
23 words
A device as claimed in claim 1 arranged to direct light received from the optical fiber to a photodiode mounted on the chip.
Claim 8
Dependent Claim
22 words
A device as claimed in claim 6 in which the photodiode is mounted over the recess in which the facet is formed.
Claim 9
Dependent Claim
26 words
A device as claimed in claim 1 in which a laser or light emitting diode is mounted over the recess in which the facet is formed.
Claim 10
Dependent Claim
31 words
A device as claimed in claim 1 in which the distance between the end of the waveguide and the facet is less than 15 microns, and preferably less than 10 microns.
Claim 11
Dependent Claim
99 words
An integrated optical circuit including a device for re-directing light from an optical waveguide on a silicon-on-insulator chip which comprises a layer of silicon separated from a substrate by an insulator layer, the device comprising an integrated waveguide formed in the silicon layer and a reflective facet formed in a recess in the silicon layer, the facet being positioned to receive light from the waveguide and angled so as to re-direct the light in a desired direction, the waveguide and facet both being formed in the silicon layer so their locations can be defined by the same lithographic step.
Claim 12
Dependent Claim
99 words
An integrated optical circuit including a device for re-directing light from an optical waveguide on a silicon-on-insulator chip which comprises a layer of silicon separated from a substrate by an insulator layer, the device comprising an integrated waveguide formed in the silicon layer and a reflective facet formed in a recess in the silicon layer, the facet being positioned to receive light from the waveguide and angled so as to re-direct the light in a desired direction, the waveguide and facet both being formed in the silicon layer so their locations can be defined by the same lithographic step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-22 | 2004-02-21 | 2004-08-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-22 | 2008-02-21 | 2008-08-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-22 | 2012-02-21 | 2012-08-22 | $7700.00 | Window Closed / Lapsed |