US6096615A
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Method of forming a semiconductor device having narrow gate electrode
Assignee: Advanced Micro Devices Inc
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Filing: 1998-04-29
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Granted: 2000-08-01
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Expires: 2018-04-29
Abstract
Abstract A semiconductor device having a narrow gate electrode and a process of fabricating such a device is disclosed. The semiconductor device is formed by forming a polysilicon block over a substrate and forming a nitride spacer adjacent at least one sidewall of the polysilicon block. A portion of the polysilicon block opposite the nitride spacer is selectively removed. The polysilicon block is then oxidized to form an oxide portion adjacent one side of the polysilicon block and to form a narrow polysilicon block, wherein the nitride spacer inhibits oxidation of another side of the polysilicon block. The narrow polysilicon block is used as a gate electrode.
Inventors
- 👤 Mark Gardner
- 👤 Derick J. Wristers
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 23:26
CPC Classifications
H; H10; H10D; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01332; H10D64/01336; H10D64/01344; H10D30/00; H10D30/01; H10D30/021; H10D30/0221; H10D30/0223; H10D30/0227; H10D64/01304; H10D64/01326; H10D64/60; H10D64/66; H10D64/68; H10D64/681; H10D64/685; H10D64/693; H10D64/01342
Claims Analysis
Total Claims: 34
Claim 1
Independent Claim
87 words
A process of fabricating a semiconductor device, comprising: forming a polysilicon block over a substrate; forming a nitride spacer adjacent at least one sidewall of the polysilicon block; selectively removing a portion of the polysilicon block opposite the nitride spacer; and oxidizing the polysilicon block to form an oxide portion adjacent one side of the polysilicon block and to form a narrow polysilicon block, the nitride spacer inhibiting oxidation of another side of the polysilicon block, wherein the narrow polysilicon block is used as a gate electrode.
Claim 2
Dependent Claim
87 words
A process of fabricating a semiconductor device, comprising: forming a polysilicon block over a substrate; forming a nitride spacer adjacent at least one sidewall of the polysilicon block; selectively removing a portion of the polysilicon block opposite the nitride spacer; and oxidizing the polysilicon block to form an oxide portion adjacent one side of the polysilicon block and to form a narrow polysilicon block, the nitride spacer inhibiting oxidation of another side of the polysilicon block, wherein the narrow polysilicon block is used as a gate electrode.
Claim 3
Dependent Claim
21 words
The process of claim 1, further including forming a first insulating layer over the substrate prior to forming the polysilicon block.
Claim 4
Dependent Claim
25 words
The process of claim 2, wherein forming the first insulating layer includes forming a bottom layer and forming a top layer over the bottom layer.
Claim 5
Dependent Claim
15 words
The process of claim 3, wherein forming the bottom layer includes forming an oxide layer.
Claim 6
Dependent Claim
15 words
The process of claim 3, wherein forming the top layer includes forming a nitride layer.
Claim 7
Dependent Claim
27 words
The process of claim 2, further including forming a second insulating layer over the first insulating layer and the polysilicon block prior to forming the nitride spacer.
Claim 8
Dependent Claim
16 words
The process of claim 6, wherein forming the second insulating layer includes forming an oxide layer.
Claim 9
Dependent Claim
29 words
The process of claim 7, wherein forming the oxide layer includes forming vertical oxide portions adjacent the polysilicon block having a thickness ranging from about 50 to 200 Å.
Claim 10
Dependent Claim
41 words
The process of claim 6, further including removing the second insulating layer from the portion of the polysilicon block and from the first insulating layer adjacent the portion of the polysilicon block before selectively removing the portion of the polysilicon block.
Claim 11
Dependent Claim
22 words
The process of claim 1, wherein selectively removing the portion of the polysilicon block includes etching the portion of the polysilicon block.
Claim 12
Dependent Claim
19 words
The process of claim 1, wherein the oxide portion has a thickness ranging from about 150 to 500 Å.
Claim 13
Dependent Claim
16 words
The process of claim 1, further including removing the nitride spacer after oxidizing the polysilicon block.
Claim 14
Dependent Claim
22 words
The process of claim 2, further including implanting a first dopant into an active region of the substrate adjacent the polysilicon block.
Claim 15
Dependent Claim
33 words
The process of claim 13, further including implanting a second dopant into the substrate adjacent the polysilicon block after selectively removing the portion of the polysilicon block and before oxidizing the polysilicon block.
Claim 16
Dependent Claim
19 words
The process of claim 14, wherein implanting the second dopant includes extending a lightly-doped region to the polysilicon block.
Claim 17
Dependent Claim
24 words
The process of claim 14, further including implanting a third dopant into the active region adjacent the polysilicon block after oxidizing the polysilicon block.
Claim 18
Dependent Claim
19 words
The process of claim 16, wherein implanting the third dopant includes forming a heavily-doped region in the active region.
Claim 19
Dependent Claim
21 words
The process of claim 1, wherein oxidizing the polysilicon block leaves the width of the polysilicon block less than 1000 Å.
Claim 20
Dependent Claim
80 words
The process of claim 1, further including: implanting a first dopant into the substrate, after forming the polysilicon block, to form a first lightly doped region adjacent a first side of the polysilicon block and a second lightly doped region adjacent a second side of the polysilicon block, wherein the removed portion of the polysilicon block includes the second side; and extending the second lightly doped region to the polysilicon block after selectively removing the portion of the polysilicon block.
Claim 21
Dependent Claim
45 words
The process of claim 19, further including implanting a second dopant into the substrate, with the oxide portion in place, to form a first heavily doped region adjacent the first lightly doped region and a second heavily doped region adjacent the second lightly doped region.
Claim 22
Dependent Claim
20 words
The process of claim 19, wherein extending the second lightly doped region includes implanting a third dopant into the substrate.
Claim 23
Dependent Claim
22 words
The process of claim 19, wherein extending the second lightly doped region includes diffusing the second lightly doped region through heat treatment.
Claim 24
Dependent Claim
37 words
The process of claim 1, further including, forming a nitride layer over the substrate prior to forming the polysilicon block, wherein, while oxidizing the polysilicon block, portions of the nitride layer extend outward from the polysilicon block.
Claim 25
Dependent Claim
19 words
The process of claim 23, further including forming an oxide layer over the substrate before forming the nitride layer.
Claim 26
Dependent Claim
28 words
The process of claim 1, further including removing the nitride spacer after oxidizing the polysilicon block and implanting a dopant into the substrate after removing the nitride spacer.
Claim 27
Dependent Claim
88 words
The process of claim 1, further including: forming an oxide layer on the sidewall of the polysilicon block before forming the nitride spacer; removing the nitride spacer after oxidizing the polysilicon block; and implanting, with the oxide layer and the oxide portion in place, a dopant into the substrate after removing the nitride spacer to form source/drain regions adjacent the narrow polysilicon block; wherein the oxide layer has a different thickness than the oxide portion, thereby spacing the source/drain regions from the narrow polysilicon block by different amounts.
Claim 28
Dependent Claim
33 words
The process of claim 26, wherein the oxide layer has a thickness ranging from about 50 to 200 Å and the oxide portion has a thickness ranging from about 150 to 500 Å.
Claim 29
Dependent Claim
24 words
The process of claim 1, wherein oxidizing the polysilicon block includes forming the oxide portion to a thickness of at least about 150 angstroms.
Claim 30
Dependent Claim
24 words
The process of claim 1, wherein oxidizing the polysilicon block includes forming the oxide portion to a thickness of at least about 200 angstroms.
Claim 31
Dependent Claim
24 words
The process of claim 1, wherein oxidizing the polysilicon block includes forming the oxide portion to a thickness of at least about 300 angstroms.
Claim 32
Dependent Claim
134 words
A process of fabricating a semiconductor device, comprising: depositing a gate insulating layer over a substrate; forming a polysilicon block over the gate insulating layer; implanting a first dopant into substrate regions adjacent the polysilicon block to form lightly-doped regions; forming a nitride spacer adjacent at least one sidewall of the polysilicon block; etching a portion of the polysilicon block opposite the nitride spacer to form an etched polysilicon block; oxidizing the etched polysilicon block to form an oxide spacer adjacent one side of a remaining narrower polysilicon block, the nitride spacer inhibiting oxidation of another side of the remaining narrower polysilicon block; and implanting a second dopant into substrate regions adjacent the remaining narrower polysilicon block to form heavily-doped source/drain regions, wherein the remaining narrower polysilicon block is used as a gate electrode.
Claim 33
Dependent Claim
134 words
A process of fabricating a semiconductor device, comprising: depositing a gate insulating layer over a substrate; forming a polysilicon block over the gate insulating layer; implanting a first dopant into substrate regions adjacent the polysilicon block to form lightly-doped regions; forming a nitride spacer adjacent at least one sidewall of the polysilicon block; etching a portion of the polysilicon block opposite the nitride spacer to form an etched polysilicon block; oxidizing the etched polysilicon block to form an oxide spacer adjacent one side of a remaining narrower polysilicon block, the nitride spacer inhibiting oxidation of another side of the remaining narrower polysilicon block; and implanting a second dopant into substrate regions adjacent the remaining narrower polysilicon block to form heavily-doped source/drain regions, wherein the remaining narrower polysilicon block is used as a gate electrode.
Claim 34
Dependent Claim
31 words
The process of claim 31, further including implanting a third dopant, after etching and before oxidizing the polysilicon block, to extend one of the lightly-doped regions to the etched polysilicon block.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-08-01 | 2004-01-31 | 2004-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-01 | 2008-01-31 | 2008-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-01 | 2012-01-31 | 2012-08-01 | $7700.00 | Window Closed / Lapsed |