US6096127A
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Tuneable dielectric films having low electrical losses
Assignee: Y DEVELOPMENT A COLORADO ENTITY LLC
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Filing: 1997-02-28
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Granted: 2000-08-01
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Expires: 2017-02-28
Abstract
Abstract The present invention is directed to a method for forming dielectric thin films having substantially reduced electrical losses at microwave and millimeter wave frequencies relative to conventional dielectric thin films. The reduction in losses is realized by dramatically increasing the grain sizes of the dielectric films, thereby minimizing intergranular scattering of the microwave signal due to grain boundaries and point defects. The increase in grain size is realized by heating the film to a temperature at which the grains experience regrowth. The grain size of the films can be further increased by first depositing the films with an excess of one of the compoents, such that a highly mobile grain boundary phase is formed.
Inventors
- 👤 Duane Brian Dimos
- 👤 Robert William Schwartz
- 👤 Mark Victor Raymond
- 👤 Husam Niman Al-Shareef
- 👤 Carl Mueller
- 👤 David Galt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 15:50
CPC Classifications
H; H01; H01P; H01P3/00; H01P3/003; C; C30; C30B; C30B29/00; C30B29/10; C30B29/16; C30B29/22; C30B29/32; C30B5/00; H01P1/00; H01P1/18; H01P1/181
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
151 words
A method for forming a thin film dielectric material, comprising: selecting a superstoichiometric ratio between two or more components of a selected thin film dielectric material to provide a superstoichiometric composition; forming the two or more components in the superstoichiometric ratio into the superstoichiometric composition; applying the superstoichiometric composition to a crystalline substrate to form a layer of the superstoichiometric composition having an initial mean grain size, wherein a lattice mismatch between the crystalline substrate and the layer of the superstoichiometric composition is sufficient to cause epitaxial growth of the superstoichiometric composition on the crystalline substrate; and heating the layer to a temperature below the eutectic temperature to form an annealed layer of the thin film dielectric material having a final mean grain size, wherein the final mean grain size is more than the initial mean grain size and wherein the temperature is at least about 70% of the eutectic temperature.
Claim 2
Independent Claim
151 words
A method for forming a thin film dielectric material, comprising: selecting a superstoichiometric ratio between two or more components of a selected thin film dielectric material to provide a superstoichiometric composition; forming the two or more components in the superstoichiometric ratio into the superstoichiometric composition; applying the superstoichiometric composition to a crystalline substrate to form a layer of the superstoichiometric composition having an initial mean grain size, wherein a lattice mismatch between the crystalline substrate and the layer of the superstoichiometric composition is sufficient to cause epitaxial growth of the superstoichiometric composition on the crystalline substrate; and heating the layer to a temperature below the eutectic temperature to form an annealed layer of the thin film dielectric material having a final mean grain size, wherein the final mean grain size is more than the initial mean grain size and wherein the temperature is at least about 70% of the eutectic temperature.
Claim 3
Dependent Claim
29 words
The method of claim 1, wherein the substrate is selected from the group consisting of lanthanum aluminate, magnesium oxide, neodynium gallate, and aluminum oxide, and mixtures and composites thereof.
Claim 4
Dependent Claim
17 words
The method of claim 1, wherein the eutectic temperature ranges from about 1200 to about 1450° C.
Claim 5
Dependent Claim
33 words
The method of claim 1, wherein the dielectric material is selected from the group consisting of strontium titanate, barium strontium titanate, barium titanate, potassium tantalate, potassium niobate, lead zirconium titanate, and mixtures thereof.
Claim 6
Dependent Claim
33 words
The method of claim 1, wherein in the dielectric material the molar ratio of Ti on the other hand to Ba and Sr on the other ranges from about 1.01 to about 1.10.
Claim 7
Dependent Claim
43 words
The method of claim 1, wherein in the forming step the deposition method for forming the layer of dielectric material is one of sputtering, laser ablation, sol-gel, metal-organic chemical vapor deposition, chemical vapor deposition, liquid phase epitaxy, electron beam evaporation, and thermal evaporation.
Claim 8
Dependent Claim
24 words
The method of claim 1, wherein the resistivity of the annealed layer of thin film dielectric material is at least about 1×10 9 ohm-cm.
Claim 9
Dependent Claim
23 words
The method of claim 1, wherein the dielectric constant of the annealed layer of thin film dielectric material is at least about 2,000.
Claim 10
Dependent Claim
25 words
The method of claim 1, wherein the dielectric loss of the annealed layer of thin film dielectric material is no more than about tan δ=0.02.
Claim 11
Dependent Claim
26 words
The method of claim 1, wherein the annealed layer has a thickness and the final mean grain size is at least about 60% of the thickness.
Claim 12
Dependent Claim
15 words
The method of claim 1, wherein the lattice mismatch is no more than about 8%.
Claim 13
Dependent Claim
46 words
The method of claim 1, wherein the thin film dielectric material is (Ba x Sr 1-x ) y TiO 3 , where 0≦x≦1 and y<1 such that the ratio between titanium on the one hand and strontium and barium on the other is more than one.
Claim 14
Dependent Claim
29 words
The method of claim 1, wherein the dielectric constant of the crystalline substrate is no more than about 1.5% of the dielectric constant of the thin film dielectric material.
Claim 15
Dependent Claim
83 words
The method of claim 1, wherein the thin film dielectric material has the chemical formula, (Ba x Sr 1-x ) y TiO 3 , where x ranges from about 0 to about 1 and y is less than 1 and comprises a plurality of interconnected grains, the grains being separated by grain boundaries, wherein Ti has an initial concentration at the grain boundaries and a final concentration at the interiors of the grains and the first concentration is more than the second concentration.
Claim 16
Dependent Claim
57 words
The method of claim 1, wherein the thin film dielectric material includes a plurality of interconnected grains separated by grain boundaries, wherein an initial ratio between two components of the thin film dielectric material at the grain boundaries is superstoichiometric and a final ratio between the two components at the interiors of the grains is substantially stoichiometric.
Claim 17
Dependent Claim
39 words
The method of claim 15, wherein the thin film dielectric material has a thickness and the plurality of interconnected grains have a mean grain size and wherein the mean grain size is at least about 60% of the thickness.
Claim 18
Independent Claim
89 words
A method for forming a thin film dielectric material, comprising: epitaxially growing a thin film dielectric material on a substrate having an initial mean grain size, wherein the thin film dielectric material is a eutectic composition and has a eutectic temperature, and heating the thin film dielectric material to a temperature that is at least about 70% of the eutectic temperature to form an annealed thin film dielectric material having a final mean grain size, wherein the second mean grain size is larger than the first mean grain size.
Claim 19
Independent Claim
89 words
A method for forming a thin film dielectric material, comprising: epitaxially growing a thin film dielectric material on a substrate having an initial mean grain size, wherein the thin film dielectric material is a eutectic composition and has a eutectic temperature, and heating the thin film dielectric material to a temperature that is at least about 70% of the eutectic temperature to form an annealed thin film dielectric material having a final mean grain size, wherein the second mean grain size is larger than the first mean grain size.
Claim 20
Dependent Claim
24 words
The method of claim 17, wherein a lattice mismatch between the thin film dielectric material and the substrate is no more than about 5.5%.
Claim 21
Dependent Claim
41 words
The method of claim 17, wherein the heating step is performed in the presence of a flux selected from the group consisting of titanium dioxide, tungsten oxide, tantalum oxide, niobium oxide, and mixtures thereof and in the presence of molecular oxygen.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2003-08-01 | 2004-01-31 | 2004-08-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-08-01 | 2008-01-31 | 2008-08-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-08-01 | 2012-01-31 | 2012-08-01 | $7700.00 | Window Closed / Lapsed |