US6090647A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Capacitor for a semiconductor device
Assignee: Micron Technology Inc
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Filing: 1998-02-27
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Granted: 2000-07-18
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Expires: 2018-02-27
Abstract
Abstract A semiconductor device comprises a substrate such as a semiconductor wafer having a major surface, a first conductive layer formed over the major surface, and a second conductive layer formed over the first conductive layer with the first and second conductive layers having a capacitance therebetween. A semiconductor layer is formed over the first and second conductive layer, the semiconductor layer having a diffusion region such as a transistor source, drain, and/or channel. An inventive method for forming the inventive structure comprises the steps of forming a first conductive layer over a substrate and forming a second conductive layer over the first conductive layer. Next, a semiconductor layer is formed over the second conductive layer and a transistor diffusion region, such as a source, drain, and/or channel is formed in the semiconductor layer.
Inventors
- 👤 Anthony Grass
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:25
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/811; H10D1/00; H10D1/60; H10D1/68; H10D64/00; H10D64/20; H10D64/23; H10D64/251; H10D64/254; H10D84/201; H10D84/204; H10D84/212; H10D84/40; H10D84/401; H10D84/403; H10D84/60; H10D84/611; H10D84/613; H10D84/615; H10W; H10W20/00; H10W20/40; H10W20/495; H10W44/00; H10W44/601
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
114 words
A method for forming a filter for use with a semiconductor device comprising the following steps: providing a semiconductor substrate having a major surface; forming a first conductive layer over essentially all of said substrate; forming a second conductive layer over said first conductive layer; connecting one of said first and second conductive layers to a power signal and connecting one of said first and second conductive layers to a ground signal; forming a semiconductor layer over said second conductive layer; and forming at least first and second doped regions in said semiconductor layer, wherein each of said first and second doped regions is connected to one of said first and second conductive layers.
Claim 2
Independent Claim
114 words
A method for forming a filter for use with a semiconductor device comprising the following steps: providing a semiconductor substrate having a major surface; forming a first conductive layer over essentially all of said substrate; forming a second conductive layer over said first conductive layer; connecting one of said first and second conductive layers to a power signal and connecting one of said first and second conductive layers to a ground signal; forming a semiconductor layer over said second conductive layer; and forming at least first and second doped regions in said semiconductor layer, wherein each of said first and second doped regions is connected to one of said first and second conductive layers.
Claim 3
Dependent Claim
21 words
The method of claim 1 wherein said step of forming said semiconductor layer comprises the step of forming an epitaxial layer.
Claim 4
Dependent Claim
68 words
The method of claim 1 further comprising the following steps: forming a first oxide layer prior to said step of forming said first conductive layer, said first oxide layer separating said semiconductor substrate from said first conductive layer; and forming a second oxide layer prior to said step of forming said second conductive layer, said second oxide layer separating said first conductive layer from said second conductive layer.
Claim 5
Independent Claim
119 words
A method of forming a semiconductor device comprising the following steps: forming a power plane, a ground plane, and an oxide layer interposed therebetween over a semiconductor substrate such that said power and ground planes and said oxide layer form at least part of a capacitor; forming a semiconductor layer over said power and ground planes; and forming at least first, second, third, and fourth doped regions in said semiconductor layer, wherein said first and second doped regions have a channel region therebetween and said third and fourth regions have a channel region therebetween, and wherein said first doped region is electrically coupled with said ground plane and said fourth doped region is electrically coupled with said power plane.
Claim 6
Independent Claim
119 words
A method of forming a semiconductor device comprising the following steps: forming a power plane, a ground plane, and an oxide layer interposed therebetween over a semiconductor substrate such that said power and ground planes and said oxide layer form at least part of a capacitor; forming a semiconductor layer over said power and ground planes; and forming at least first, second, third, and fourth doped regions in said semiconductor layer, wherein said first and second doped regions have a channel region therebetween and said third and fourth regions have a channel region therebetween, and wherein said first doped region is electrically coupled with said ground plane and said fourth doped region is electrically coupled with said power plane.
Claim 7
Dependent Claim
19 words
The method of claim 4 further comprising the step of electrically coupling said second and said third doped regions.
Claim 8
Dependent Claim
25 words
The method of claim 4 wherein said step of forming said power and ground planes each comprise the step of forming a polycrystalline silicon layer.
Claim 9
Dependent Claim
36 words
The method of claim 4 further comprising the step of electrically coupling said first doped region and said ground plane using a substantially vertical layer of polycrystalline silicon extending along a sidewall of said semiconductor layer.
Claim 10
Dependent Claim
36 words
The method of claim 7 further comprising the step of electrically coupling said fourth doped region and said power plane using a substantially vertical layer of polycrystalline silicon extending along a sidewall of said semiconductor layer.
Claim 11
Independent Claim
106 words
A method used during the formation of a semiconductor device comprising the following steps: providing a semiconductor substrate comprising a semiconductor wafer having a first dielectric layer formed thereover; forming a first metal layer over said first dielectric layer and a second dielectric layer over said metal layer; forming a second metal layer over said second dielectric layer; providing a power signal and a ground signal wherein one of said metal layers is electrically coupled with said power signal and the other of said metal layers is electrically coupled with said ground signal; and forming an epitaxial silicon layer over said first and second metal layers.
Claim 12
Independent Claim
106 words
A method used during the formation of a semiconductor device comprising the following steps: providing a semiconductor substrate comprising a semiconductor wafer having a first dielectric layer formed thereover; forming a first metal layer over said first dielectric layer and a second dielectric layer over said metal layer; forming a second metal layer over said second dielectric layer; providing a power signal and a ground signal wherein one of said metal layers is electrically coupled with said power signal and the other of said metal layers is electrically coupled with said ground signal; and forming an epitaxial silicon layer over said first and second metal layers.
Claim 13
Dependent Claim
68 words
The method of claim 9 further comprising the following steps: doping said epitaxial silicon layer with a dopant having a first type conductivity; and doping a first region of said doped epitaxial silicon layer with a dopant having a second type conductivity different from said first type conductivity wherein a second region of said doped epitaxial silicon layer remains undoped with said dopant having said second type conductivity.
Claim 14
Dependent Claim
22 words
The method of claim 9 further comprising the step of forming a transistor base, emitter, and collector within said epitaxial silicon layer.
Claim 15
Dependent Claim
34 words
The method of claim 10 further comprising the following steps: forming a transistor source and a transistor drain in said first region and a transistor source and a transistor drain in said second region.
Claim 16
Dependent Claim
27 words
The method of claim 12 further comprising the step of electrically coupling said first and second regions of said doped epitaxial silicon layer with a metal layer.
Claim 17
Dependent Claim
22 words
The method of claim 13 wherein said step of electrically coupling said first and second regions forms a portion of an inverter.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-07-18 | 2004-01-17 | 2004-07-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-07-18 | 2008-01-17 | 2008-07-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-07-18 | 2012-01-17 | 2012-07-18 | $7700.00 | Window Closed / Lapsed |