← Back to Patent Explorer
US6084284A Expired / Lapsed US ⏱️ 0.0 years remaining

Integrated circuit including inverted dielectric isolation

Assignee: Individual
•
Filing: 1999-10-26
•
Granted: 2000-07-04
•
Expires: 2019-10-26
📄 Original PDF 🌐 Google Patents 🔄 Sync Now

Abstract

Abstract A method of semiconductor fabrication includes the steps of forming a dielectric layer on a first surface of a semiconductor wafer having a plurality of laterally distributed semiconductor devices selectively interconnected on the first surface and bonding a support substrate to the first surface of the semiconductor wafer on the dielectric layer to form a composite structure. A portion of the semiconductor wafer from a second surface which is opposite the first surface is removed and the second surface of the semiconductor wafer is processed. Processing of the second surface optionally includes the formation of isolation trenches electrically isolating the laterally distributed semiconductor devices.

Inventors

  • 👤 Fred W. Adamic, Jr.

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 05:07
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/20; H10D; H10D12/00; H10D12/411; H10D12/441; H10D12/461; H10D10/00; H10D10/40; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10W10/00; H10W10/01; H10W10/061; H10W10/10; H10W10/181; H10W20/01; H10W20/021; H10W20/023; H10W20/0234; H10W20/0242; H10P90/1914; H10W10/011; H10W10/014; H10W10/021; H10W10/041; H10W10/17; H10W10/20; H10W10/40; H10W72/00; H10W72/071; H10W72/075; H10W72/20; H10W72/29; H10W72/50; H10W72/531; H10W72/536; H10W72/59; H10W72/90; H10W72/931; H10W72/934; H10W72/951; Y; Y10; Y10S; Y10S438/00; Y10S438/977

Claims Analysis

Total Claims: 3
Claim 1
Independent Claim 193 words
An integrated-circuit (IC) chip of the type including a semiconductor section with a plurality of devices contained in corresponding respective device regions laterally disposed throughout the section; a first layer of insulating material underlying the semiconductor section; an interconnect section underlying the semiconductor section and selectively connecting ones of the plurality of devices with a plurality of conductive traces; a second layer of insulating material underlying the interconnect section, a bonding layer underlying the second insulating layer and supporting the first and second insulating layers, the interconnect section, and the device regions; the semiconductor section being formed with a plurality of first trenches between at least certain of the device regions and extending from the IC surface down through the semiconductor section to the first layer of insulating material; at least one additional trench formed in the IC and arranged to extend down through the semiconductor section and through the underlying first insulating layer to penetrate the interconnect section exposing at least one of the conductive traces of the interconnect section; and a metallization layer overlying a portion of the surface of at least one of the device regions of the semiconductor section.
Claim 2
Dependent Claim 193 words
An integrated-circuit (IC) chip of the type including a semiconductor section with a plurality of devices contained in corresponding respective device regions laterally disposed throughout the section; a first layer of insulating material underlying the semiconductor section; an interconnect section underlying the semiconductor section and selectively connecting ones of the plurality of devices with a plurality of conductive traces; a second layer of insulating material underlying the interconnect section, a bonding layer underlying the second insulating layer and supporting the first and second insulating layers, the interconnect section, and the device regions; the semiconductor section being formed with a plurality of first trenches between at least certain of the device regions and extending from the IC surface down through the semiconductor section to the first layer of insulating material; at least one additional trench formed in the IC and arranged to extend down through the semiconductor section and through the underlying first insulating layer to penetrate the interconnect section exposing at least one of the conductive traces of the interconnect section; and a metallization layer overlying a portion of the surface of at least one of the device regions of the semiconductor section.
Claim 3
Dependent Claim 39 words
The IC chip according to claim 1 further comprising: at least one contact opening in the second insulating layer forming a direct contact between the bonding layer and at least one of the conductive traces of the interconnect section.

References Cited (Backward Citations)

US5402989A Cited
US5479048A Cited
US5742075A Cited
US5939755A Cited
US5889302A Cited
US5936280A Cited
US5942781A Cited
US6013936A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-07-04 2004-01-03 2004-07-04 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-07-04 2008-01-03 2008-07-04 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-07-04 2012-01-03 2012-07-04 $7700.00 Window Closed / Lapsed

Assigned Categories & Tags

No categories assigned to this patent yet.

Assign Category Tag