US6083773A
Expired / Lapsed
US
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Methods of forming flip chip bumps and related flip chip bump constructions
Assignee: Round Rock Research LLC
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Filing: 1997-09-16
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Granted: 2000-07-04
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Expires: 2017-09-16
Abstract
Abstract Methods of forming flip chip bumps and related flip chip bump constructions are described. In one implementation, a bump of conductive material is formed over a substrate. At least a portion of the bump is dipped into a volume of conductive flowable material, with some of the flowable material remaining over the bump. The remaining flowable material over the bump is solidified and includes an outermost surface the entirety of which is outwardly exposed. In another implementation, the outermost surface include an uppermost generally planar surface away from the substrate. The solidified flowable material together with the conductive material of the bump provide a bump assembly having a height which is greater than the height of the original bump. The increased height is achieved without meaningfully increasing a width dimension of the bump proximate the substrate.
Inventors
- 👤 Rickie C. Lake
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:10
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/20; H10W72/01; H10W72/012; H10W72/01215; H10W72/01251; H10W72/251
Claims Analysis
Total Claims: 55
Claim 1
Independent Claim
78 words
A method of forming a flip chip bump comprising: forming a bump comprising conductive material over a substrate; with the entire bump being outwardly exposed, dipping at least a portion of the exposed bump into a volume of conductive flowable material, at least some of the conductive flowable material remaining over the bump; and solidifying the conductive flowable material remaining over the bump, the solidified conductive material having an outermost surface the entirety of which is outwardly exposed.
Claim 2
Independent Claim
78 words
A method of forming a flip chip bump comprising: forming a bump comprising conductive material over a substrate; with the entire bump being outwardly exposed, dipping at least a portion of the exposed bump into a volume of conductive flowable material, at least some of the conductive flowable material remaining over the bump; and solidifying the conductive flowable material remaining over the bump, the solidified conductive material having an outermost surface the entirety of which is outwardly exposed.
Claim 3
Dependent Claim
40 words
The method of claim 1 further comprising after solidifying the flowable material, dipping at least a portion of the outermost surface into a volume of conductive flowable material, at least some of said flowable material remaining over the outermost surface.
Claim 4
Dependent Claim
47 words
The method of claim 2 further comprising after dipping the outermost surface portion into the conductive flowable material, solidifying said flowable material remaining over the outermost surface, said solidified flowable material remaining over the outermost itself having an outermost surface the entirety of which is outwardly exposed.
Claim 5
Dependent Claim
58 words
The method of claim 1, wherein: the bump defines a bump height over the substrate; the volume of conductive flowable material is provided over a surface and to a desired thickness relative thereto; and the dipping of the bump portion comprises dipping said portion into the conductive flowable material a distance which is less than the bump height.
Claim 6
Dependent Claim
25 words
The method of claim 4, wherein said distance is sufficient to engage the bump with the surface over which the conductive flowable material is provided.
Claim 7
Dependent Claim
17 words
The method of claim 4, wherein said distance is about two-thirds to three-fourths of the bump height.
Claim 8
Dependent Claim
45 words
The method of claim 1, wherein: the bump comprises a base portion having an outer surface proximate the substrate, the base portion outer surface defining a width dimension; and the flowable material remaining over the bump is not disposed over the base portion outer surface.
Claim 9
Independent Claim
90 words
A method of forming a flip chip bump comprising: forming a bump comprising conductive material over a substrate; dipping at least a portion of the bump into a conductive flowable material, at least some of the flowable material remaining over the bump; and exposing the bump to conditions effective to solidify the flowable material over the bump, the solidified conductive material having an outermost surface the entirety of which is outwardly exposed, at least a portion of the outermost surface defining a generally planar uppermost surface away from the substrate.
Claim 10
Independent Claim
90 words
A method of forming a flip chip bump comprising: forming a bump comprising conductive material over a substrate; dipping at least a portion of the bump into a conductive flowable material, at least some of the flowable material remaining over the bump; and exposing the bump to conditions effective to solidify the flowable material over the bump, the solidified conductive material having an outermost surface the entirety of which is outwardly exposed, at least a portion of the outermost surface defining a generally planar uppermost surface away from the substrate.
Claim 11
Dependent Claim
36 words
The method of claim 8, wherein the exposing comprises: engaging the flowable material remaining over the bump with a generally planar surface; and the exposing comprising at least partially solidifying said flowable material during said engaging.
Claim 12
Dependent Claim
20 words
The method of claim 9, wherein the flowable material comprises a curable material and said solidifying comprises curing said material.
Claim 13
Dependent Claim
38 words
The method of claim 8, wherein: the bump defines a first surface area which engages the substrate; and the generally planar uppermost surface defines a second surface area, the first and second surface areas being different in magnitude.
Claim 14
Dependent Claim
23 words
The method of claim 11, wherein the magnitude of the second surface area is less than the magnitude of the first surface area.
Claim 15
Dependent Claim
18 words
The method of claim 11, wherein the first and second surface areas define planes which are generally parallel.
Claim 16
Dependent Claim
42 words
The method of claim 11, wherein the first surface area defines a width dimension in a direction and the second surface area defines a width dimension in the same direction which is less than the width dimension of the first surface area.
Claim 17
Independent Claim
93 words
A method of forming a flip chip bump comprising: forming a bump comprising conductive material over a substrate; dipping at least a portion of the bump into a conductive flowable material, at least some of the conductive flowable material remaining over the bump; while the remaining flowable material over the bump is in a generally flowable state, engaging the flowable material with a generally planar surface; exposing the bump to conditions which are effective to render the flowable material into a generally non-flowable state; and separating the substrate and the generally planar surface.
Claim 18
Independent Claim
93 words
A method of forming a flip chip bump comprising: forming a bump comprising conductive material over a substrate; dipping at least a portion of the bump into a conductive flowable material, at least some of the conductive flowable material remaining over the bump; while the remaining flowable material over the bump is in a generally flowable state, engaging the flowable material with a generally planar surface; exposing the bump to conditions which are effective to render the flowable material into a generally non-flowable state; and separating the substrate and the generally planar surface.
Claim 19
Dependent Claim
29 words
The method of claim 15, wherein the separating of the substrate and the generally planar surface takes place after the flowable material is rendered into the generally non-flowable state.
Claim 20
Dependent Claim
20 words
The method of claim 15, wherein at least some of the exposing of the bump takes place during said engaging.
Claim 21
Dependent Claim
58 words
The method of claim 15, wherein: the bump defines a first surface area which engages the substrate; and the separating of the substrate and the generally planar surface defines a generally planar second surface area joined with the bump away from and over the first surface area, the first and second surface areas having magnitudes which are different.
Claim 22
Dependent Claim
23 words
The method of claim 18, wherein the magnitude of the second surface area is less than the magnitude of the first surface area.
Claim 23
Dependent Claim
18 words
The method of claim 18, wherein the first and second surface areas define planes which are generally parallel.
Claim 24
Independent Claim
84 words
A method of forming a series of flip chip bumps comprising: forming a series of bumps comprising conductive material over a substrate; with an entirety of the bumps being outwardly exposed, dipping at least portions of the exposed bumps into a volume of conductive flowable material, at least some of the flowable material remaining over the bumps; and solidifying the flowable material remaining over the bumps, the solidified conductive material having outermost surfaces the entireties of which are outwardly exposed over the respective bumps.
Claim 25
Independent Claim
84 words
A method of forming a series of flip chip bumps comprising: forming a series of bumps comprising conductive material over a substrate; with an entirety of the bumps being outwardly exposed, dipping at least portions of the exposed bumps into a volume of conductive flowable material, at least some of the flowable material remaining over the bumps; and solidifying the flowable material remaining over the bumps, the solidified conductive material having outermost surfaces the entireties of which are outwardly exposed over the respective bumps.
Claim 26
Dependent Claim
39 words
The method of claim 21 further comprising after solidifying the flowable material, dipping at least portions of the outermost surfaces into a volume of conductive flowable material, at least some of said flowable material remaining over the outermost surfaces.
Claim 27
Dependent Claim
48 words
The method of claim 22 further comprising after dipping the outermost surface portions into the conductive flowable material, solidifying said flowable material remaining over the outermost surfaces, said solidified flowable material remaining over individual outermost surfaces and having respective outermost surfaces the entireties of which are outwardly exposed.
Claim 28
Dependent Claim
58 words
The method of claim 21, wherein: the bumps define respective bump heights over the substrate; the volume of conductive flowable material is provided over a surface and to a desired thickness relative thereto; and the dipping of the bump portions comprises dipping said portions into the conductive flowable material a distance which is less than the bump heights.
Claim 29
Dependent Claim
29 words
The method of claim 24, wherein said distance is sufficient to engage at least some of the bumps with the surface over which the conductive flowable material is provided.
Claim 30
Dependent Claim
48 words
The method of claim 21, wherein: the bumps comprise respective base portions having outer surfaces proximate the substrate, the base portion outer surfaces defining respective width dimensions; and the flowable material remaining over the bumps is not disposed over at least some of the base portion outer surfaces.
Claim 31
Dependent Claim
32 words
The method of claim 26, wherein the solidifying of the flowable material defines respective bump assemblies having width dimensions which are essentially no greater than individual width dimensions of respective associated bumps.
Claim 32
Independent Claim
99 words
A method of forming a series of flip chip bumps comprising: forming a series of bumps of conductive material over a substrate; dipping at least portions of the bumps into a conductive flowable material, at least some of the conductive flowable material remaining over the bumps; while the remaining flowable material over the bumps is in a generally flowable state, engaging the flowable material with a generally planar surface; exposing the bumps to conditions which are effective to render the flowable material into a generally non-flowable state; and after the exposing, separating the substrate and the generally planar surface.
Claim 33
Independent Claim
99 words
A method of forming a series of flip chip bumps comprising: forming a series of bumps of conductive material over a substrate; dipping at least portions of the bumps into a conductive flowable material, at least some of the conductive flowable material remaining over the bumps; while the remaining flowable material over the bumps is in a generally flowable state, engaging the flowable material with a generally planar surface; exposing the bumps to conditions which are effective to render the flowable material into a generally non-flowable state; and after the exposing, separating the substrate and the generally planar surface.
Claim 34
Dependent Claim
44 words
The method of claim 28, wherein the bumps have respective base portions which define base dimensions, and respective uppermost surface portions which define height dimensions, and the engaging and exposing increases the respective height dimensions of the bumps without increasing the respective base dimensions.
Claim 35
Dependent Claim
18 words
The method of claim 29, wherein the increased height dimensions define substantially uniform bump heights over the substrate.
Claim 36
Dependent Claim
60 words
The method of claim 28, wherein: the bumps define respective first surface areas which engage the substrate; and the separating of the substrate and the generally planar surface defines generally planar second surface areas which are joined with the respective bumps away from and over the respective first surface areas, magnitudes of the first and second surface areas being different.
Claim 37
Dependent Claim
29 words
The method of claim 31, wherein magnitudes of the second surface areas are less than magnitudes of associated first surface areas over which the second surface areas are joined.
Claim 38
Dependent Claim
25 words
The method of claim 31, wherein the first and second surface areas define respective planes at least some of which being parallel with one another.
Claim 39
Independent Claim
97 words
A method of interconnecting a pair of substrates comprising: forming a bump of conductive material over a substrate; with an entirety of the bump being outwardly exposed, dipping at least a portion of the exposed bump into a volume of conductive flowable material, at least some of the flowable material remaining over the bump; solidifying the conductive flowable material remaining over the bump, the solidified conductive material having an outermost surface the entirety of which is outwardly exposed; and after solidifying the conductive material, conductively bonding the substrate with a second substrate through the solidified conductive material.
Claim 40
Independent Claim
97 words
A method of interconnecting a pair of substrates comprising: forming a bump of conductive material over a substrate; with an entirety of the bump being outwardly exposed, dipping at least a portion of the exposed bump into a volume of conductive flowable material, at least some of the flowable material remaining over the bump; solidifying the conductive flowable material remaining over the bump, the solidified conductive material having an outermost surface the entirety of which is outwardly exposed; and after solidifying the conductive material, conductively bonding the substrate with a second substrate through the solidified conductive material.
Claim 41
Dependent Claim
82 words
The method of claim 34 further comprising: after solidifying the conductive material, dipping at least a portion of the outermost surface into a volume of conductive flowable material, at least some of said flowable material remaining over the outermost surface; and after dipping the outermost surface portion into the conductive flowable material, solidifying said flowable material remaining over the outermost surface, said solidified flowable material remaining over the outermost surface itself having an outermost surface the entirety of which is outwardly exposed.
Claim 42
Dependent Claim
52 words
The method of claim 34, further comprising: after solidifying the conductive material, dipping at least a portion of the outermost surface into a volume of conductive flowable material; and said conductively bonding comprising engaging said substrate with said second substrate while at least some conductive flowable material remains in a flowable state.
Claim 43
Dependent Claim
60 words
The method of claim 34, wherein the bump comprises a base portion defining a width dimension proximate the substrate and an uppermost surface portion defining a bump height, and the solidifying of the flowable material defines a height which is greater than the height defined by the uppermost surface portion without increasing the width dimension defined by the base portion.
Claim 44
Independent Claim
61 words
A method of interconnecting a pair of substrates comprising: forming a bump of material over a first substrate; immersing at least a portion of the bump in a flowable epoxy; removing the bump from the flowable epoxy; substantially curing flowable epoxy over the bump and forming a bump assembly; and after substantially curing, bonding the bump assembly with a second substrate.
Claim 45
Independent Claim
61 words
A method of interconnecting a pair of substrates comprising: forming a bump of material over a first substrate; immersing at least a portion of the bump in a flowable epoxy; removing the bump from the flowable epoxy; substantially curing flowable epoxy over the bump and forming a bump assembly; and after substantially curing, bonding the bump assembly with a second substrate.
Claim 46
Dependent Claim
39 words
The method of claim 38, wherein: the bump defines a bump height over the first substrate; and the bump assembly defines a bump assembly height over the first substrate, the bump assembly height being greater than the bump height.
Claim 47
Dependent Claim
34 words
The method of claim 38 further comprising prior to the bonding, immersing at least a portion of the bump assembly in the flowable epoxy and substantially curing the flowable epoxy over the bump assembly.
Claim 48
Dependent Claim
20 words
The method of claim 38, wherein the curing defines a generally planar bump assembly surface outwardly of the first substrate.
Claim 49
Dependent Claim
17 words
The method of claim 41, wherein the curing comprises curing the epoxy against a generally planar surface.
Claim 50
Dependent Claim
29 words
The method of claim 38, wherein prior to the bonding the bump assembly has an outer surface which comprises at least a portion of the material of the bump.
Claim 51
Independent Claim
115 words
A method of interconnecting a pair of substrates comprising: forming a bump of conductive material over a first substrate, the bump having a bump height; dipping at least a portion of the bump height into a volume of conductive flowable material, at least some of the conductive flowable material remaining over the bump; solidifying the conductive flowable material remaining over the bump and forming a bump assembly comprising the bump and solidified conductive material, the solidified conductive material defining a bump assembly outermost surface the entirety of which is outwardly exposed, the outermost surface defining a bump assembly height which is greater than the bump height; and bonding the bump assembly with a second substrate.
Claim 52
Independent Claim
115 words
A method of interconnecting a pair of substrates comprising: forming a bump of conductive material over a first substrate, the bump having a bump height; dipping at least a portion of the bump height into a volume of conductive flowable material, at least some of the conductive flowable material remaining over the bump; solidifying the conductive flowable material remaining over the bump and forming a bump assembly comprising the bump and solidified conductive material, the solidified conductive material defining a bump assembly outermost surface the entirety of which is outwardly exposed, the outermost surface defining a bump assembly height which is greater than the bump height; and bonding the bump assembly with a second substrate.
Claim 53
Dependent Claim
19 words
The method of claim 44, wherein a portion of the bump assembly outermost surface comprises conductive material of bump.
Claim 54
Dependent Claim
25 words
The method of claim 45, wherein said portion of the bump assembly outermost surface comprises a base portion of the bump proximate the first substrate.
Claim 55
Dependent Claim
17 words
The method of claim 44, wherein the bump assembly outermost surface comprises a generally planar uppermost surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-07-04 | 2004-01-03 | 2004-07-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-07-04 | 2008-01-03 | 2008-07-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-07-04 | 2012-01-03 | 2012-07-04 | $7700.00 | Window Closed / Lapsed |