Patent US6077310A successfully refreshed from Google Patents.
US6077310A
Expired / Lapsed
US
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Optical proximity correction system
Assignee: Toshiba Corp
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Filing: 1999-01-29
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Granted: 2000-06-20
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Expires: 2019-01-29
Abstract
Abstract Pattern data that is an object of correction is divided into an area on which correction is made using correction values that have been obtained in advance for patterns and their respective layouts and an area on which correction is made on the basis of correction values calculated by a simulator. For example, simulation-based correction is made on a gate layer in a memory, while rule-based correction is made on a gate layer in the other area than the memory on the basis of rules for active gate width only. After being subjected to the correction, the areas are combined.
Inventors
- 👤 Kazuko Yamamoto
- 👤 Sachiko Miyama
- 👤 Kiyomi Koyama
- 👤 Soichi Inoue
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 15:31
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70425; G03F7/70433; G03F7/70441; G03F1/00; G03F1/36; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 36
Claim 1
Independent Claim
139 words
An apparatus for correcting an optical proximity effect in a lithography process for an LSI (Large-Scale Integration) pattern, said apparatus comprising: a hierarchical processing portion for extracting area data to be processed from hierarchical data and inputting/outputting the area data; a rule-based correction portion for performing correction by use of a correction value calculated beforehand, such that the correction corresponds to a pattern and layout data surrounding the pattern; a simulation-based correction portion for calculating an amount of correction and executing correction based on a process simulating program; and a determination portion for dividing the pattern and layout data into areas to be corrected by rule-based correction and areas to be corrected by simulation-based correction, and for determining which correction portion, the rule-based correction portion and the simulation-based correction portion, should be used for correcting each of the areas.
Claim 2
Independent Claim
139 words
An apparatus for correcting an optical proximity effect in a lithography process for an LSI (Large-Scale Integration) pattern, said apparatus comprising: a hierarchical processing portion for extracting area data to be processed from hierarchical data and inputting/outputting the area data; a rule-based correction portion for performing correction by use of a correction value calculated beforehand, such that the correction corresponds to a pattern and layout data surrounding the pattern; a simulation-based correction portion for calculating an amount of correction and executing correction based on a process simulating program; and a determination portion for dividing the pattern and layout data into areas to be corrected by rule-based correction and areas to be corrected by simulation-based correction, and for determining which correction portion, the rule-based correction portion and the simulation-based correction portion, should be used for correcting each of the areas.
Claim 3
Dependent Claim
23 words
An apparatus according to claim 1, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 4
Dependent Claim
19 words
An apparatus according to claim 1, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 5
Dependent Claim
102 words
A computer program product, comprising: a computer readable medium and a computer program code embedded in the computer readable medium to control a central processor; a first computer code configured to input data to be processed; a second computer code configured to divide the data into areas to be corrected by rule-based correction and areas to be corrected by simulation-based correction; a third computer code configured to perform rule-based correction on the areas to be corrected by the rule-based correction which meet rules; and a fourth computer code configured to perform simulation-based correction on the areas to be corrected by simulation-based correction.
Claim 6
Dependent Claim
102 words
A computer program product, comprising: a computer readable medium and a computer program code embedded in the computer readable medium to control a central processor; a first computer code configured to input data to be processed; a second computer code configured to divide the data into areas to be corrected by rule-based correction and areas to be corrected by simulation-based correction; a third computer code configured to perform rule-based correction on the areas to be corrected by the rule-based correction which meet rules; and a fourth computer code configured to perform simulation-based correction on the areas to be corrected by simulation-based correction.
Claim 7
Dependent Claim
25 words
A computer program product according to claim 4, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 8
Dependent Claim
21 words
A computer program product according to claim 4, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 9
Dependent Claim
70 words
An optical proximity correction method for controlling accuracy in LSI (Large-Scale Integration), said method comprising the steps of: inputting data to be processed; dividing the data into areas to be corrected by rule-based correction and areas to be corrected by simulation-based correction; performing rule-based correction on the areas to be corrected by rule-base correction which meet rules; and performing simulation-based correction on the areas to be corrected by simulation-based correction.
Claim 10
Dependent Claim
70 words
An optical proximity correction method for controlling accuracy in LSI (Large-Scale Integration), said method comprising the steps of: inputting data to be processed; dividing the data into areas to be corrected by rule-based correction and areas to be corrected by simulation-based correction; performing rule-based correction on the areas to be corrected by rule-base correction which meet rules; and performing simulation-based correction on the areas to be corrected by simulation-based correction.
Claim 11
Dependent Claim
23 words
A method according to claim 7, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 12
Dependent Claim
19 words
A method according to claim 7, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 13
Dependent Claim
70 words
A computer program product, comprising: a computer readable medium and a computer program code embedded in the computer readable medium to control a central processor; a first computer code mechanism configured to input data to be processed; a second computer code mechanism configured to perform rule-based correction on parts which do not meet rules; and a third computer code mechanism configured to execute simulation-based correction on the rule-based correction data.
Claim 14
Dependent Claim
70 words
A computer program product, comprising: a computer readable medium and a computer program code embedded in the computer readable medium to control a central processor; a first computer code mechanism configured to input data to be processed; a second computer code mechanism configured to perform rule-based correction on parts which do not meet rules; and a third computer code mechanism configured to execute simulation-based correction on the rule-based correction data.
Claim 15
Dependent Claim
25 words
A computer program product according to claim 10, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 16
Dependent Claim
21 words
A computer program product according to claim 10, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 17
Dependent Claim
68 words
A computer program product, comprising: a computer readable medium and a computer program code embedded in the computer readable medium to control a central processor; a first computer code mechanism configured to input data to be processed; a second computer code mechanism configured to perform rule-based correction on parts which meet rules; and a third computer code mechanism configured to execute simulation-based correction on the rule-based correction data.
Claim 18
Dependent Claim
68 words
A computer program product, comprising: a computer readable medium and a computer program code embedded in the computer readable medium to control a central processor; a first computer code mechanism configured to input data to be processed; a second computer code mechanism configured to perform rule-based correction on parts which meet rules; and a third computer code mechanism configured to execute simulation-based correction on the rule-based correction data.
Claim 19
Dependent Claim
25 words
A computer program product according to claim 13, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 20
Dependent Claim
21 words
A computer program product according to claim 13, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 21
Dependent Claim
40 words
An optical proximity correction method for controlling accuracy in LSI (Large-Scale Integration), said method comprising the steps of: inputting data to be processed; performing rule-based correction on parts which meet rules; and executing simulation-based correction on the rule-based corrected data.
Claim 22
Dependent Claim
40 words
An optical proximity correction method for controlling accuracy in LSI (Large-Scale Integration), said method comprising the steps of: inputting data to be processed; performing rule-based correction on parts which meet rules; and executing simulation-based correction on the rule-based corrected data.
Claim 23
Dependent Claim
19 words
A method according to claim 16, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 24
Dependent Claim
23 words
A method according to claim 16, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 25
Dependent Claim
46 words
An optical proximity correction method for controlling accuracy in LSI (Large-Scale Integration), said method comprising the steps of: inputting data to be processed; performing rule-based correction on parts which meet rules; extracting parts which do not meet rules; and executing simulation-based correction on the extracted parts.
Claim 26
Dependent Claim
46 words
An optical proximity correction method for controlling accuracy in LSI (Large-Scale Integration), said method comprising the steps of: inputting data to be processed; performing rule-based correction on parts which meet rules; extracting parts which do not meet rules; and executing simulation-based correction on the extracted parts.
Claim 27
Dependent Claim
19 words
A method according to claim 19, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 28
Dependent Claim
23 words
A method according to claim 19, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 29
Independent Claim
59 words
An apparatus for correcting an optical proximity effect in a lithography process for an LSI (Large-Scale Integration) pattern, said apparatus comprising: a processing portion for processing data to be input and output; a rule-based correction portion for performing rule-based correction on parts which meet rules; and a simulation-based correction portion for executing simulation-based correction on the rule-based correction data.
Claim 30
Independent Claim
59 words
An apparatus for correcting an optical proximity effect in a lithography process for an LSI (Large-Scale Integration) pattern, said apparatus comprising: a processing portion for processing data to be input and output; a rule-based correction portion for performing rule-based correction on parts which meet rules; and a simulation-based correction portion for executing simulation-based correction on the rule-based correction data.
Claim 31
Dependent Claim
19 words
An apparatus according to claim 22, wherein the rule-based correction includes placement rules of assist features at pattern corners.
Claim 32
Dependent Claim
23 words
An apparatus according to claim 22, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
Claim 33
Independent Claim
68 words
An apparatus for correcting an optical proximity effect in a lithography process for an LSI (Large-Scale Integration) pattern, said apparatus comprising: a processing portion for processing data to be input and output; a rule-based correction portion for performing rule-based correction on parts which meet rules; a portion for extracting parts which do not meet rules; and a simulation-based correction portion for executing simulation-based correction on the extracted parts.
Claim 34
Independent Claim
68 words
An apparatus for correcting an optical proximity effect in a lithography process for an LSI (Large-Scale Integration) pattern, said apparatus comprising: a processing portion for processing data to be input and output; a rule-based correction portion for performing rule-based correction on parts which meet rules; a portion for extracting parts which do not meet rules; and a simulation-based correction portion for executing simulation-based correction on the extracted parts.
Claim 35
Dependent Claim
18 words
An apparatus according to claim 25, wherein the rule-based correction includes placement rules of assist features pattern corners.
Claim 36
Dependent Claim
23 words
An apparatus according to claim 25, wherein the rule-based correction includes placement rules of assist features which are smaller than a resolution limit.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-06-20 | 2003-12-20 | 2004-06-20 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-06-20 | 2007-12-20 | 2008-06-20 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-06-20 | 2011-12-20 | 2012-06-20 | $7700.00 | Window Closed / Lapsed |