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US6049158A
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Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
Assignee: NGK Insulators Ltd
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Filing: 1995-02-09
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Granted: 2000-04-11
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Expires: 2015-02-09
Abstract
Abstract A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and a diaphragm portion for closing each window, and a film-like piezoelectric/electrostrictive unit formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes outwards, in a direction away from the corresponding window. The piezoelectric/electrostrictive unit includes a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of the diaphragm portion by a film-forming method. Also disclosed is a method of producing the piezoelectric/electrostrictive film element as described above.
Inventors
- 👤 Yukihisa Takeuchi
- 👤 Tsutomu Nanataki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 02:03
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1621; B41J2/1637; B41J2/1607; B41J2/161; B41J2/1623; B41J2/1632; B41J2/164; B41J2/1642; B41J2/1643; B41J2/1646; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/09; H10N30/093; H10N30/097; H10N30/20; H10N30/204; H10N30/2047; H10N30/2048; B41J2/14; B41J2002/14387; H04; H04R; H04R17/00; H04R17/04; H04R17/08; H10N30/80; H10N30/85; H10N30/853; H10N30/8548; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
113 words
A piezoelectric/electrostrictive film element comprising: a ceramic substrate having at least one window, and a diaphragm portion formed as an integral part thereof, for closing each of said at least one window, said diaphragm portion having a convex shape and protruding outwards, in a direction away from a corresponding one of said at least one window; and a film-like piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of said diaphragm portion by a film-forming method, wherein said convex shape of the diaphragm portion is provided in an unbiased state of the piezoelectric/electrostrictive unit.
Claim 2
Dependent Claim
113 words
A piezoelectric/electrostrictive film element comprising: a ceramic substrate having at least one window, and a diaphragm portion formed as an integral part thereof, for closing each of said at least one window, said diaphragm portion having a convex shape and protruding outwards, in a direction away from a corresponding one of said at least one window; and a film-like piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of said diaphragm portion by a film-forming method, wherein said convex shape of the diaphragm portion is provided in an unbiased state of the piezoelectric/electrostrictive unit.
Claim 3
Dependent Claim
54 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein an amount of protrusion of said diaphragm portion of said ceramic substrate is not greater than 5% of a length of a shortest line which extends across a corresponding one of said at least one window and passes through a center of the window.
Claim 4
Dependent Claim
25 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said diaphragm portion has an average crystal grain size of not larger than 5 μm.
Claim 5
Dependent Claim
22 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said diaphragm portion has a thickness of not greater than 50 μm.
Claim 6
Dependent Claim
22 words
A piezoelectric/electrostrictive film element as defined in claim 4, wherein said diaphragm portion has a thickness of not greater than 30 μm.
Claim 7
Dependent Claim
22 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said piezoelectric/electrostrictive unit has a thickness of not greater than 100 μm.
Claim 8
Dependent Claim
54 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said ceramic substrate has a plurality of windows, and a plurality of diaphragm portions for closing said windows, respectively, each of said diaphragm portions having a convex shape, said piezoelectric/electrostrictive unit being formed on a convex outer surface of each of said diaphragm portions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-11 | 2003-10-11 | 2004-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-11 | 2007-10-11 | 2008-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-11 | 2011-10-11 | 2012-04-11 | $7700.00 | Window Closed / Lapsed |