US5210455A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoelectric/electrostrictive actuator having ceramic substrate having recess defining thin-walled portion
Assignee: NGK Insulators Ltd
•
Filing: 1991-07-23
•
Granted: 1993-05-11
•
Expires: 2011-07-23
Abstract
Abstract A piezoelectric/electrostrictive actuator including a ceramic substrate (2, 10, 16, 22, 38) and a piezoelectric/electrostrictive portion (26, 28, 29, 30, 33a, 33b, 36a, 36b, 37, 39). The ceramic substrate has at least one recess (6, 14, 20, 24, 42) having a bottom surface which defines a thin-walled portion (8a, 22a), and the piezoelectric/electrostrictive portion is formed on the thin-walled portion of the ceramic substrate.
Inventors
- 👤 Yukihisa Takeuchi
- 👤 Koji Kimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 07:37
CPC Classifications
H; H10; H10N; H10N30/00; H10N30/704; H10N30/706; H10N30/01; H10N30/07; H10N30/072; H10N30/073; H10N30/074; H10N30/20; H10N30/204; H10N30/2047
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
70 words
A piezoelectric/electrostrictive actuator comprising: an integrated ceramic substrate having at least one recess having a bottom surface which defines a thin-walled portion, said thin-walled portion having an average ceramic particle size of 0.1-2 μm; and a piezoelectric/electrostrictive portion integrated with said thin-walled portion of said ceramic substrate, said piezoelectric/electrostrictive portion being formed on said thin-walled portion by a film-forming process and subsequent heat treatment for integration with said ceramic substrate.
Claim 2
Dependent Claim
70 words
A piezoelectric/electrostrictive actuator comprising: an integrated ceramic substrate having at least one recess having a bottom surface which defines a thin-walled portion, said thin-walled portion having an average ceramic particle size of 0.1-2 μm; and a piezoelectric/electrostrictive portion integrated with said thin-walled portion of said ceramic substrate, said piezoelectric/electrostrictive portion being formed on said thin-walled portion by a film-forming process and subsequent heat treatment for integration with said ceramic substrate.
Claim 3
Dependent Claim
51 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said ceramic substrate includes a first layer having at least one opening formed through a thickness thereof, and a second layer which is superposed on and integrated with first layer and cooperates with said at least one opening to define said thin-walled portion.
Claim 4
Dependent Claim
20 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said piezoelectric/electrostrictive portion includes a plurality of films laminated o each other.
Claim 5
Dependent Claim
31 words
A piezoelectric/electrostrictive actuator according to claim 3, wherein said plurality of films of said piezoelectric/electrostrictive portion consists of two electrode films, and a piezoelectric/electrostrictive film interposed between said two electrode films
Claim 6
Dependent Claim
38 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said piezoelectric/electrostrictive portion includes a pattern of electrode strips and a pattern of piezoelectric/electrostrictive strips which are formed such that the electrode strips and the piezoelectric/electrostrictive strips are alternately disposed.
Claim 7
Dependent Claim
45 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said piezoelectric/electrostrictive portion consists of a plurality of piezoelectric/electrostrictive units which are formed on said ceramic substrate, such that said units are spaced from each other in a direction parallel to opposite major surfaces of said substrate.
Claim 8
Dependent Claim
34 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said piezoelectric/electrostrictive portion consists of a plurality of piezoelectric/electrostrictive units which are formed on said ceramic substrate such that said units are superposed on each other.
Claim 9
Dependent Claim
34 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said ceramic substrate includes at least one major component selected from the group consisting of aluminum oxide, magnesium oxide, zirconium oxide, aluminum nitride and silicon nitride.
Claim 10
Dependent Claim
42 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said ceramic substrate includes as a major component a zirconium oxide stabilized by at least one compound selected from the group consisting of yttrium oxide, ytterbium oxide, cerium oxide, calcium oxide and magnesium oxide.
Claim 11
Dependent Claim
23 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said thin-walled portion of said ceramic substrate has a thickness not larger than 50 μm.
Claim 12
Dependent Claim
19 words
A piezoelectric/electrostrictive actuator according to claim 1, wherein said piezoelectric/electrostrictive portion has a thickness not larger than 100 μm.
References Cited (Backward Citations)
US2540194A
Cited
US3509387A
Cited
US4216401A
Cited
US4491761A
Cited
US4456850A
Cited
JPS5932182A
Cited
US4564851A
Cited
JPS59175777A
Cited
US4649313A
Cited
US4556812A
Cited
US4633120A
Cited
US4638206A
Cited
GB2161647A
Cited
FR2570223A1
Cited
US4783321A
Cited
US4677336A
Cited
US4742264A
Cited
JPS61253873A
Cited
US4719383A
Cited
US4680595A
Cited
US4742260A
Cited
US4769570A
Cited
US4780639A
Cited
JPS62298190A
Cited
JPS62298189A
Cited
JPS6372171A
Cited
US4812698A
Cited
EP0262637A2
Cited
JPS6372172A
Cited
JPS63285983A
Cited
JPS64783A
Cited
US4906840A
Cited
WO1989007259A2
Cited
US4825227A
Cited
US4848643A
Cited
EP0408305A2
Cited
JPH03128680A
Cited
JPH03128681A
Cited
US5075641A
Cited
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