US6049158A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Piezoelectric/electrostrictive film element having convex diaphragm portions and method of producing the same
Assignee: NGK Insulators Ltd
•
Filing: 1995-02-09
•
Granted: 2000-04-11
•
Expires: 2015-02-09
Abstract
Abstract A piezoelectric/electrostrictive film element which includes a ceramic substrate having at least one window and a diaphragm portion for closing each window, and a film-like piezoelectric/electrostrictive unit formed on the diaphragm portion. The diaphragm portion has a convex shape and protrudes outwards, in a direction away from the corresponding window. The piezoelectric/electrostrictive unit includes a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of the diaphragm portion by a film-forming method. Also disclosed is a method of producing the piezoelectric/electrostrictive film element as described above.
Inventors
- 👤 Yukihisa Takeuchi
- 👤 Tsutomu Nanataki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-10 01:42
CPC Classifications
B; B41; B41J; B41J2/00; B41J2/005; B41J2/01; B41J2/135; B41J2/16; B41J2/1621; B41J2/1637; B41J2/1607; B41J2/161; B41J2/1623; B41J2/1632; B41J2/164; B41J2/1642; B41J2/1643; B41J2/1646; H; H10; H10N; H10N30/00; H10N30/01; H10N30/07; H10N30/074; H10N30/09; H10N30/093; H10N30/097; H10N30/20; H10N30/204; H10N30/2047; H10N30/2048; B41J2/14; B41J2002/14387; H04; H04R; H04R17/00; H04R17/04; H04R17/08; H10N30/80; H10N30/85; H10N30/853; H10N30/8548; Y; Y10; Y10T; Y10T29/00; Y10T29/42
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
113 words
A piezoelectric/electrostrictive film element comprising: a ceramic substrate having at least one window, and a diaphragm portion formed as an integral part thereof, for closing each of said at least one window, said diaphragm portion having a convex shape and protruding outwards, in a direction away from a corresponding one of said at least one window; and a film-like piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of said diaphragm portion by a film-forming method, wherein said convex shape of the diaphragm portion is provided in an unbiased state of the piezoelectric/electrostrictive unit.
Claim 2
Dependent Claim
113 words
A piezoelectric/electrostrictive film element comprising: a ceramic substrate having at least one window, and a diaphragm portion formed as an integral part thereof, for closing each of said at least one window, said diaphragm portion having a convex shape and protruding outwards, in a direction away from a corresponding one of said at least one window; and a film-like piezoelectric/electrostrictive unit including a lower electrode, a piezoelectric/electrostrictive layer and an upper electrode, which are formed in lamination in the order of description on a convex outer surface of said diaphragm portion by a film-forming method, wherein said convex shape of the diaphragm portion is provided in an unbiased state of the piezoelectric/electrostrictive unit.
Claim 3
Dependent Claim
54 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein an amount of protrusion of said diaphragm portion of said ceramic substrate is not greater than 5% of a length of a shortest line which extends across a corresponding one of said at least one window and passes through a center of the window.
Claim 4
Dependent Claim
25 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said diaphragm portion has an average crystal grain size of not larger than 5 μm.
Claim 5
Dependent Claim
22 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said diaphragm portion has a thickness of not greater than 50 μm.
Claim 6
Dependent Claim
22 words
A piezoelectric/electrostrictive film element as defined in claim 4, wherein said diaphragm portion has a thickness of not greater than 30 μm.
Claim 7
Dependent Claim
22 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said piezoelectric/electrostrictive unit has a thickness of not greater than 100 μm.
Claim 8
Dependent Claim
54 words
A piezoelectric/electrostrictive film element as defined in claim 1, wherein said ceramic substrate has a plurality of windows, and a plurality of diaphragm portions for closing said windows, respectively, each of said diaphragm portions having a convex shape, said piezoelectric/electrostrictive unit being formed on a convex outer surface of each of said diaphragm portions.
References Cited (Backward Citations)
US3776361A
Cited
US3982143A
Cited
US4275597A
Cited
US4242541A
Cited
US4535205A
Cited
US4607145A
Cited
US4479070A
Cited
JPS60111600A
Cited
US4525464A
Cited
GB2161647A
Cited
US4635079A
Cited
US4605939A
Cited
US4702418A
Cited
JPS62213399A
Cited
US4777153A
Cited
US4938742A
Cited
US4848643A
Cited
US5185549A
Cited
JPH03128681A
Cited
US5089455A
Cited
US5171132A
Cited
US5315204A
Cited
US5126615A
Cited
US5277556A
Cited
EP0468796A1
Cited
US5210455A
Cited
JPH0549270A
Cited
EP0526048A1
Cited
JPH05270912A
Cited
EP0572230A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-11 | 2003-10-11 | 2004-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-11 | 2007-10-11 | 2008-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-11 | 2011-10-11 | 2012-04-11 | $7700.00 | Window Closed / Lapsed |