US6046546A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Stabilizer for switch-mode powered RF plasma
Assignee: Advanced Energy Industries Inc
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Filing: 1998-05-05
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Granted: 2000-04-04
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Expires: 2018-05-05
Abstract
Abstract Circuitry and techniques designed to allow stable and continuous delivery of alternating power to a plasma with switch-mode power supply (16) include a variety of embodiments. Parallel, series, and other circuit elements connected across switching element (7) are tuned so that energy at other than the fundamental frequency is absorbed and dissipated. This energy may be only at the second harmonic or it may be across broad frequency ranges through selecting high impedance at the fundamental frequency and relatively low impedance at other frequencies. In overcoming instabilities, oscillations, and even changing class of operation of the switch-mode power supply, the stabilizing element absorbs the energy to avoid allowing it to affect switch (7) of power supply (16).
Inventors
- 👤 Robert M. Porter
- 👤 Michael L. Mueller
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 17:40
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/32174; H02; H02M; H02M7/00; H02M7/42; H02M7/44; H02M7/48; H02M7/53; H02M7/537
Claims Analysis
Total Claims: 51
Claim 1
Independent Claim
54 words
A method of stably delivering power to a plasma through an alternating signal comprising the steps of: a. generating an alternating signal at a fundamental frequency by a switch-mode power supply; b. transmitting said alternating signal into the plasma; while c. affirmatively absorbing energy at substantially other than the fundamental frequency by electrical circuitry.
Claim 2
Independent Claim
54 words
A method of stably delivering power to a plasma through an alternating signal comprising the steps of: a. generating an alternating signal at a fundamental frequency by a switch-mode power supply; b. transmitting said alternating signal into the plasma; while c. affirmatively absorbing energy at substantially other than the fundamental frequency by electrical circuitry.
Claim 3
Dependent Claim
57 words
A method of stably delivering power to a processing plasma through an alternating signal as described in claim 1 wherein said switch-mode power supply has at least one primary switching element and wherein said step of substantially absorbing energy at other than the fundamental frequency occurs prior to allowing said energy to affect said primary switching element.
Claim 4
Dependent Claim
52 words
A method of stably delivering power to a processing plasma through an alternating signal as described in claim 1 wherein said switch-mode power supply has at least one primary switching element and wherein said step of substantially absorbing energy at other than the fundamental frequency is accomplished at said primary switching element.
Claim 5
Dependent Claim
54 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 1 wherein said step of transmitting said power to said plasma is accomplished by a transmission line and wherein said step of substantially absorbing energy at other than the fundamental frequency is accomplished on said transmission line.
Claim 6
Dependent Claim
46 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 4 wherein said step of substantially absorbing energy at other than the fundamental frequency comprises the step of subjecting said power transmission to more than one energy absorption element.
Claim 7
Dependent Claim
50 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 5 wherein said step of substantially absorbing energy at other than the fundamental frequency further comprises the step of changing the phase of said alternating signal between at least two energy absorption elements.
Claim 8
Dependent Claim
40 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 1 wherein said step of substantially absorbing energy at other than the fundamental frequency comprises the step of utilizing a tuned circuit element.
Claim 9
Dependent Claim
31 words
A method of stably delivering power to a processing plasma through an alternating signal as described in claim 7 wherein said tuned circuit element has high impedance at said fundamental frequency.
Claim 10
Dependent Claim
33 words
A method of stably delivering power to a processing plasma through an alternating signal as described in claim 8 wherein said tuned circuit element has relatively low impedance at least one other frequency.
Claim 11
Dependent Claim
32 words
A method of stably delivering power to a processing plasma through an alternating signal as described in claim 8 wherein said tuned circuit element has relatively low impedance at the second harmonic.
Claim 12
Dependent Claim
46 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 1 wherein said step of substantially absorbing energy at other than the fundamental frequency comprises the step of subjecting said alternating signal to more than one energy absorption element.
Claim 13
Dependent Claim
50 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 11 wherein said step of substantially absorbing energy at other than the fundamental frequency further comprises the step of changing the phase of said alternating signal between at least two energy absorption elements.
Claim 14
Dependent Claim
61 words
A circuit for delivering power to a plasma through an alternating signal comprising: a. a switch-mode power supply capable of generating an alternating power signal at a fundamental frequency; b. a transmission line which transmits said alternating power signal into the plasma; and c. at least one energy absorption element which affirmatively absorbs energy at substantially other than the fundamental frequency.
Claim 15
Dependent Claim
61 words
A circuit for delivering power to a plasma through an alternating signal comprising: a. a switch-mode power supply capable of generating an alternating power signal at a fundamental frequency; b. a transmission line which transmits said alternating power signal into the plasma; and c. at least one energy absorption element which affirmatively absorbs energy at substantially other than the fundamental frequency.
Claim 16
Dependent Claim
30 words
A circuit for delivering power to a processing plasma through an alternating signal as described in claim 13 wherein said tuned circuit element has high impedance at said fundamental frequency.
Claim 17
Dependent Claim
33 words
A circuit for delivering power to a processing plasma through an alternating signal as described in claim 14 wherein said tuned circuit element has relatively low impedance at at least one other frequency.
Claim 18
Dependent Claim
31 words
A circuit for delivering power to a processing plasma through, an alternating signal as described in claim 14 wherein said tuned circuit element has relatively low impedance at the second harmonic.
Claim 19
Dependent Claim
35 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 and further comprising a second energy absorption element that substantially absorbs energy at other than the fundamental frequency.
Claim 20
Dependent Claim
44 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 17 and further comprising at least one phase change element wherein said phase change element is connected between said energy absorption element and said second energy absorption element.
Claim 21
Dependent Claim
70 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 3 wherein said primary switching element has a common connection, an output connection, and a control connection and wherein said step of substantially absorbing energy reflected back to said switch-mode power supply at other than the fundamental frequency is accomplished by a circuit element connected across said control connection and said common connection.
Claim 22
Dependent Claim
70 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 3 wherein said primary switching element has a common connection, an output connection, and a control connection and wherein said step of substantially absorbing energy reflected back to said switch-mode power supply at other than the fundamental frequency is accomplished by a circuit element connected across said output connection and said common connection.
Claim 23
Dependent Claim
58 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 3 wherein said step of substantially absorbing energy at other than the fundamental frequency at said switch is accomplished by utilizing a resistor connected in series with a capacitor and an inductor where the capacitor and inductor are connected in parallel.
Claim 24
Dependent Claim
58 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 3 wherein said step of substantially absorbing energy at other than the fundamental frequency at said switch is accomplished by utilizing a resistor connected in parallel with a capacitor and an inductor where the capacitor and inductor are connected in series.
Claim 25
Dependent Claim
46 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 4 wherein said step of absorbing energy comprises utilizing a resistor connected in series with a capacitor and an inductor where the capacitor and inductor are connected in parallel.
Claim 26
Dependent Claim
46 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 6 wherein said step of absorbing energy comprises utilizing a resistor connected in parallel with a capacitor and an inductor where the capacitor and inductor are connected in series.
Claim 27
Dependent Claim
53 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 4 wherein said step of absorbing energy comprises utilizing a specific length of transmission line having two conducting elements connected together at one end and a resistor connected in series with one of said conducting elements.
Claim 28
Dependent Claim
55 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 4 wherein said step of absorbing energy comprises utilizing a specific length of transmission line having two conducting elements unconnected at one end and a resistor connected across said specific length of transmission line at its other end.
Claim 29
Dependent Claim
46 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 1 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class C operation and having a relatively short active region.
Claim 30
Dependent Claim
39 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 1 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class D operation.
Claim 31
Dependent Claim
39 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 1 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class E operation.
Claim 32
Dependent Claim
39 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 1 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class AE operation.
Claim 33
Dependent Claim
46 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 10 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class C operation and having a relatively short active region.
Claim 34
Dependent Claim
39 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 10 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class D operation.
Claim 35
Dependent Claim
39 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 10 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class E operation.
Claim 36
Dependent Claim
39 words
A method of stably delivering power to a plasma through an alternating signal as described in claim 10 wherein said step of generating the alternating power signal comprises the step of utilizing a power amplifier in class AE operation.
Claim 37
Dependent Claim
43 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said energy absorbing element comprises a resistor connected in series with a capacitor and an inductor where the capacitor and inductor are connected in parallel.
Claim 38
Dependent Claim
43 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said energy absorbing element comprises a resistor connected in parallel with a capacitor and an inductor where the capacitor and inductor are connected in series.
Claim 39
Dependent Claim
50 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said energy absorbing element comprises a specific length of transmission line having two conducting elements connected together at one end and a resistor connected in series with one of said conducting elements.
Claim 40
Dependent Claim
52 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said energy absorbing element comprises a specific length of transmission line having two conducting elements unconnected at one end and a resistor connected across said specific length of transmission line at its other end.
Claim 41
Dependent Claim
66 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said switch-mode power supply has a primary switching element having a common connection, an output connection, and a control connection and wherein said energy absorption element which absorbs energy at other than the fundamental frequency comprises a circuit element connected across said control connection and said common connection.
Claim 42
Dependent Claim
66 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said switch-mode power supply has a primary switching element having a common connection, an output connection, and a control connection and wherein said energy absorption element which absorbs energy at other than the fundamental frequency comprises a circuit element connected across said output connection and said common connection.
Claim 43
Dependent Claim
37 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said switch-mode power supply comprises a power amplifier in class C operation and having a relatively short active region.
Claim 44
Dependent Claim
30 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said switch-mode power supply comprises a power amplifier in class D operation.
Claim 45
Dependent Claim
30 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said switch-mode power supply comprises a power amplifier in class E operation.
Claim 46
Dependent Claim
30 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said switch-mode power supply comprises a power amplifier in class AE operation.
Claim 47
Dependent Claim
37 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 18 wherein said switch-mode power supply comprises a power amplifier in class C operation and having a relatively short active region.
Claim 48
Dependent Claim
30 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 18 wherein said switch-mode power supply comprises a power amplifier in class D operation.
Claim 49
Dependent Claim
30 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 18 wherein said switch-mode power supply comprises a power amplifier in class E operation.
Claim 50
Dependent Claim
30 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 18 wherein said switch-mode power supply comprises a power amplifier in class AE operation.
Claim 51
Dependent Claim
27 words
A circuit for delivering power to a plasma through an alternating signal as described in claim 13 wherein said energy absorption element comprises a tuned circuit element.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-04-04 | 2003-10-04 | 2004-04-04 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-04-04 | 2007-10-04 | 2008-04-04 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-04-04 | 2011-10-04 | 2012-04-04 | $7700.00 | Window Closed / Lapsed |